APA (7th ed.) Citation

Stievenard, D., & Bourgoin, J. C. (1988). Ion implantation in semiconductors. Trans Tech Publ.

Chicago Style (17th ed.) Citation

Stievenard, D., and J. C. Bourgoin. Ion Implantation in Semiconductors. Brookfield [u.a.]: Trans Tech Publ, 1988.

MLA (9th ed.) Citation

Stievenard, D., and J. C. Bourgoin. Ion Implantation in Semiconductors. Trans Tech Publ, 1988.