Excimer laser lithography:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Bellingham
SPIE Optical Engineering Press
1990
|
| Subjects: | |
| Physical Description: | X, 212 S. |
| ISBN: | 0819402710 0819402729 |
Staff View
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV025885505 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 100417s1990 |||| 00||| eng d | ||
| 020 | |a 0819402710 |9 0-8194-0271-0 | ||
| 020 | |a 0819402729 |9 0-8194-0272-9 | ||
| 035 | |a (OCoLC)916315804 | ||
| 035 | |a (DE-599)BVBBV025885505 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-11 | ||
| 084 | |a UH 5628 |0 (DE-625)145673: |2 rvk | ||
| 084 | |a UH 5750 |0 (DE-625)145705: |2 rvk | ||
| 100 | 1 | |a Jain, Kanti |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Excimer laser lithography |c Kanti Jain |
| 264 | 1 | |a Bellingham |b SPIE Optical Engineering Press |c 1990 | |
| 300 | |a X, 212 S. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 0 | 7 | |a Excimerlaser |0 (DE-588)4153300-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Excimerlaser |0 (DE-588)4153300-8 |D s |
| 689 | 0 | 1 | |a Lithografie |g Halbleitertechnologie |0 (DE-588)4191584-7 |D s |
| 689 | 0 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-019132220 | ||
Record in the Search Index
| _version_ | 1804141344648593408 |
|---|---|
| any_adam_object | |
| author | Jain, Kanti |
| author_facet | Jain, Kanti |
| author_role | aut |
| author_sort | Jain, Kanti |
| author_variant | k j kj |
| building | Verbundindex |
| bvnumber | BV025885505 |
| classification_rvk | UH 5628 UH 5750 |
| ctrlnum | (OCoLC)916315804 (DE-599)BVBBV025885505 |
| discipline | Physik |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01118nam a2200349 c 4500</leader><controlfield tag="001">BV025885505</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">100417s1990 |||| 00||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0819402710</subfield><subfield code="9">0-8194-0271-0</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0819402729</subfield><subfield code="9">0-8194-0272-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)916315804</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV025885505</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-11</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UH 5628</subfield><subfield code="0">(DE-625)145673:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UH 5750</subfield><subfield code="0">(DE-625)145705:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Jain, Kanti</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Excimer laser lithography</subfield><subfield code="c">Kanti Jain</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Bellingham</subfield><subfield code="b">SPIE Optical Engineering Press</subfield><subfield code="c">1990</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">X, 212 S.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Excimerlaser</subfield><subfield code="0">(DE-588)4153300-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Lithografie</subfield><subfield code="g">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4191584-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Excimerlaser</subfield><subfield code="0">(DE-588)4153300-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Lithografie</subfield><subfield code="g">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4191584-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-019132220</subfield></datafield></record></collection> |
| id | DE-604.BV025885505 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T22:14:23Z |
| institution | BVB |
| isbn | 0819402710 0819402729 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019132220 |
| oclc_num | 916315804 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | X, 212 S. |
| publishDate | 1990 |
| publishDateSearch | 1990 |
| publishDateSort | 1990 |
| publisher | SPIE Optical Engineering Press |
| record_format | marc |
| spelling | Jain, Kanti Verfasser aut Excimer laser lithography Kanti Jain Bellingham SPIE Optical Engineering Press 1990 X, 212 S. txt rdacontent n rdamedia nc rdacarrier Excimerlaser (DE-588)4153300-8 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Excimerlaser (DE-588)4153300-8 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 |
| spellingShingle | Jain, Kanti Excimer laser lithography Excimerlaser (DE-588)4153300-8 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4153300-8 (DE-588)4191584-7 |
| title | Excimer laser lithography |
| title_auth | Excimer laser lithography |
| title_exact_search | Excimer laser lithography |
| title_full | Excimer laser lithography Kanti Jain |
| title_fullStr | Excimer laser lithography Kanti Jain |
| title_full_unstemmed | Excimer laser lithography Kanti Jain |
| title_short | Excimer laser lithography |
| title_sort | excimer laser lithography |
| topic | Excimerlaser (DE-588)4153300-8 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Excimerlaser Lithografie Halbleitertechnologie |
| work_keys_str_mv | AT jainkanti excimerlaserlithography |