Defect control in semiconductors: proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors ; The Yokohama 21st Century Forum, Yokohama, Japan, September 17 - 22, 1989 1
Gespeichert in:
| Format: | Tagungsbericht Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
Amsterdam u.a.
North-Holland
1990
|
| Schlagworte: | |
| Beschreibung: | [getr. Zählung] |
Internformat
MARC
| LEADER | 00000nam a2200000 cc4500 | ||
|---|---|---|---|
| 001 | BV025842201 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 100417s1990 |||| 00||| und d | ||
| 035 | |a (OCoLC)830813107 | ||
| 035 | |a (DE-599)BVBBV025842201 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | |a und | ||
| 049 | |a DE-11 | ||
| 245 | 1 | 0 | |a Defect control in semiconductors |b proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors ; The Yokohama 21st Century Forum, Yokohama, Japan, September 17 - 22, 1989 |n 1 |c ed. by K. Sumino |
| 264 | 1 | |a Amsterdam u.a. |b North-Holland |c 1990 | |
| 300 | |a [getr. Zählung] | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 0 | 7 | |a Konferenz |0 (DE-588)4032055-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Verunreinigung |0 (DE-588)4188107-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Gitterbaufehler |0 (DE-588)4125030-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Getterung |0 (DE-588)4157223-3 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Gitterbaufehler |0 (DE-588)4125030-8 |D s |
| 689 | 1 | |5 DE-604 | |
| 689 | 2 | 0 | |a Konferenz |0 (DE-588)4032055-8 |D s |
| 689 | 2 | |5 DE-604 | |
| 689 | 3 | 0 | |a Verunreinigung |0 (DE-588)4188107-2 |D s |
| 689 | 3 | |5 DE-604 | |
| 689 | 4 | 0 | |a Getterung |0 (DE-588)4157223-3 |D s |
| 689 | 4 | |5 DE-604 | |
| 689 | 5 | 0 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
| 689 | 5 | |5 DE-604 | |
| 700 | 1 | |a Sumino, K. |e Sonstige |4 oth | |
| 711 | 2 | |a International Conference on the Science and Technology of Defect Control in Semiconductors |d 1989 |c Yokohama |j Sonstige |0 (DE-588)5049482-X |4 oth | |
| 773 | 0 | 8 | |w (DE-604)BV005589800 |g 1 |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-019439060 | ||
Datensatz im Suchindex
| _version_ | 1804141736306409472 |
|---|---|
| any_adam_object | |
| building | Verbundindex |
| bvnumber | BV025842201 |
| ctrlnum | (OCoLC)830813107 (DE-599)BVBBV025842201 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01864nam a2200481 cc4500</leader><controlfield tag="001">BV025842201</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">100417s1990 |||| 00||| und d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)830813107</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV025842201</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">und</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-11</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Defect control in semiconductors</subfield><subfield code="b">proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors ; The Yokohama 21st Century Forum, Yokohama, Japan, September 17 - 22, 1989</subfield><subfield code="n">1</subfield><subfield code="c">ed. by K. Sumino</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Amsterdam u.a.</subfield><subfield code="b">North-Holland</subfield><subfield code="c">1990</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">[getr. Zählung]</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Konferenz</subfield><subfield code="0">(DE-588)4032055-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Verunreinigung</subfield><subfield code="0">(DE-588)4188107-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Gitterbaufehler</subfield><subfield code="0">(DE-588)4125030-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Getterung</subfield><subfield code="0">(DE-588)4157223-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleiter</subfield><subfield code="0">(DE-588)4022993-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Gitterbaufehler</subfield><subfield code="0">(DE-588)4125030-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Konferenz</subfield><subfield code="0">(DE-588)4032055-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="3" ind2="0"><subfield code="a">Verunreinigung</subfield><subfield code="0">(DE-588)4188107-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="3" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="4" ind2="0"><subfield code="a">Getterung</subfield><subfield code="0">(DE-588)4157223-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="4" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="5" ind2="0"><subfield code="a">Ionenimplantation</subfield><subfield code="0">(DE-588)4027606-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="5" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Sumino, K.</subfield><subfield code="e">Sonstige</subfield><subfield code="4">oth</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">International Conference on the Science and Technology of Defect Control in Semiconductors</subfield><subfield code="d">1989</subfield><subfield code="c">Yokohama</subfield><subfield code="j">Sonstige</subfield><subfield code="0">(DE-588)5049482-X</subfield><subfield code="4">oth</subfield></datafield><datafield tag="773" ind1="0" ind2="8"><subfield code="w">(DE-604)BV005589800</subfield><subfield code="g">1</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-019439060</subfield></datafield></record></collection> |
| id | DE-604.BV025842201 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T22:20:37Z |
| institution | BVB |
| institution_GND | (DE-588)5049482-X |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019439060 |
| oclc_num | 830813107 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | [getr. Zählung] |
| publishDate | 1990 |
| publishDateSearch | 1990 |
| publishDateSort | 1990 |
| publisher | North-Holland |
| record_format | marc |
| spelling | Defect control in semiconductors proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors ; The Yokohama 21st Century Forum, Yokohama, Japan, September 17 - 22, 1989 1 ed. by K. Sumino Amsterdam u.a. North-Holland 1990 [getr. Zählung] txt rdacontent n rdamedia nc rdacarrier Konferenz (DE-588)4032055-8 gnd rswk-swf Verunreinigung (DE-588)4188107-2 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Getterung (DE-588)4157223-3 gnd rswk-swf Halbleiter (DE-588)4022993-2 s DE-604 Gitterbaufehler (DE-588)4125030-8 s Konferenz (DE-588)4032055-8 s Verunreinigung (DE-588)4188107-2 s Getterung (DE-588)4157223-3 s Ionenimplantation (DE-588)4027606-5 s Sumino, K. Sonstige oth International Conference on the Science and Technology of Defect Control in Semiconductors 1989 Yokohama Sonstige (DE-588)5049482-X oth (DE-604)BV005589800 1 |
| spellingShingle | Defect control in semiconductors proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors ; The Yokohama 21st Century Forum, Yokohama, Japan, September 17 - 22, 1989 Konferenz (DE-588)4032055-8 gnd Verunreinigung (DE-588)4188107-2 gnd Ionenimplantation (DE-588)4027606-5 gnd Gitterbaufehler (DE-588)4125030-8 gnd Halbleiter (DE-588)4022993-2 gnd Getterung (DE-588)4157223-3 gnd |
| subject_GND | (DE-588)4032055-8 (DE-588)4188107-2 (DE-588)4027606-5 (DE-588)4125030-8 (DE-588)4022993-2 (DE-588)4157223-3 |
| title | Defect control in semiconductors proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors ; The Yokohama 21st Century Forum, Yokohama, Japan, September 17 - 22, 1989 |
| title_auth | Defect control in semiconductors proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors ; The Yokohama 21st Century Forum, Yokohama, Japan, September 17 - 22, 1989 |
| title_exact_search | Defect control in semiconductors proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors ; The Yokohama 21st Century Forum, Yokohama, Japan, September 17 - 22, 1989 |
| title_full | Defect control in semiconductors proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors ; The Yokohama 21st Century Forum, Yokohama, Japan, September 17 - 22, 1989 1 ed. by K. Sumino |
| title_fullStr | Defect control in semiconductors proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors ; The Yokohama 21st Century Forum, Yokohama, Japan, September 17 - 22, 1989 1 ed. by K. Sumino |
| title_full_unstemmed | Defect control in semiconductors proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors ; The Yokohama 21st Century Forum, Yokohama, Japan, September 17 - 22, 1989 1 ed. by K. Sumino |
| title_short | Defect control in semiconductors |
| title_sort | defect control in semiconductors proceedings of the international conference on the science and technology of defect control in semiconductors the yokohama 21st century forum yokohama japan september 17 22 1989 |
| title_sub | proceedings of the International Conference on the Science and Technology of Defect Control in Semiconductors ; The Yokohama 21st Century Forum, Yokohama, Japan, September 17 - 22, 1989 |
| topic | Konferenz (DE-588)4032055-8 gnd Verunreinigung (DE-588)4188107-2 gnd Ionenimplantation (DE-588)4027606-5 gnd Gitterbaufehler (DE-588)4125030-8 gnd Halbleiter (DE-588)4022993-2 gnd Getterung (DE-588)4157223-3 gnd |
| topic_facet | Konferenz Verunreinigung Ionenimplantation Gitterbaufehler Halbleiter Getterung |
| volume_link | (DE-604)BV005589800 |
| work_keys_str_mv | AT suminok defectcontrolinsemiconductorsproceedingsoftheinternationalconferenceonthescienceandtechnologyofdefectcontrolinsemiconductorstheyokohama21stcenturyforumyokohamajapanseptember172219891 AT internationalconferenceonthescienceandtechnologyofdefectcontrolinsemiconductorsyokohama defectcontrolinsemiconductorsproceedingsoftheinternationalconferenceonthescienceandtechnologyofdefectcontrolinsemiconductorstheyokohama21stcenturyforumyokohamajapanseptember172219891 |