VLSI electronics - microstructure science: 21 Beam processing technologies
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
New York [u.a.]
Academic Press
1989
|
| Schlagworte: | |
| Beschreibung: | XII, 546 S. |
| ISBN: | 012234121X |
Internformat
MARC
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| 245 | 1 | 0 | |a VLSI electronics - microstructure science |n 21 |p Beam processing technologies |c ed. by Norman G. Einspruch |
| 264 | 1 | |a New York [u.a.] |b Academic Press |c 1989 | |
| 300 | |a XII, 546 S. | ||
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Datensatz im Suchindex
| _version_ | 1804141618478972928 |
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| any_adam_object | |
| author2 | Einspruch, Norman G. |
| author2_role | edt |
| author2_variant | n g e ng nge |
| author_facet | Einspruch, Norman G. |
| building | Verbundindex |
| bvnumber | BV025759872 |
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| id | DE-604.BV025759872 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T22:18:44Z |
| institution | BVB |
| isbn | 012234121X |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019364204 |
| oclc_num | 635329169 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | XII, 546 S. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Academic Press |
| record_format | marc |
| spelling | VLSI electronics - microstructure science 21 Beam processing technologies ed. by Norman G. Einspruch New York [u.a.] Academic Press 1989 XII, 546 S. txt rdacontent n rdamedia nc rdacarrier MOS-Speicher (DE-588)4040351-8 gnd rswk-swf Epitaxie (DE-588)4152545-0 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf Lasertechnologie (DE-588)4166821-2 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf VLSI (DE-588)4117388-0 gnd rswk-swf Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf VLSI (DE-588)4117388-0 s DE-604 MOS-Speicher (DE-588)4040351-8 s Integrierte Schaltung (DE-588)4027242-4 s Lasertechnologie (DE-588)4166821-2 s Halbleitertechnologie (DE-588)4158814-9 s Silicium (DE-588)4077445-4 s Mikroelektronik (DE-588)4039207-7 s Epitaxie (DE-588)4152545-0 s Einspruch, Norman G. edt (DE-604)BV025241632 21 |
| spellingShingle | VLSI electronics - microstructure science MOS-Speicher (DE-588)4040351-8 gnd Epitaxie (DE-588)4152545-0 gnd Mikroelektronik (DE-588)4039207-7 gnd Lasertechnologie (DE-588)4166821-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Silicium (DE-588)4077445-4 gnd VLSI (DE-588)4117388-0 gnd Integrierte Schaltung (DE-588)4027242-4 gnd |
| subject_GND | (DE-588)4040351-8 (DE-588)4152545-0 (DE-588)4039207-7 (DE-588)4166821-2 (DE-588)4158814-9 (DE-588)4077445-4 (DE-588)4117388-0 (DE-588)4027242-4 |
| title | VLSI electronics - microstructure science |
| title_auth | VLSI electronics - microstructure science |
| title_exact_search | VLSI electronics - microstructure science |
| title_full | VLSI electronics - microstructure science 21 Beam processing technologies ed. by Norman G. Einspruch |
| title_fullStr | VLSI electronics - microstructure science 21 Beam processing technologies ed. by Norman G. Einspruch |
| title_full_unstemmed | VLSI electronics - microstructure science 21 Beam processing technologies ed. by Norman G. Einspruch |
| title_short | VLSI electronics - microstructure science |
| title_sort | vlsi electronics microstructure science beam processing technologies |
| topic | MOS-Speicher (DE-588)4040351-8 gnd Epitaxie (DE-588)4152545-0 gnd Mikroelektronik (DE-588)4039207-7 gnd Lasertechnologie (DE-588)4166821-2 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Silicium (DE-588)4077445-4 gnd VLSI (DE-588)4117388-0 gnd Integrierte Schaltung (DE-588)4027242-4 gnd |
| topic_facet | MOS-Speicher Epitaxie Mikroelektronik Lasertechnologie Halbleitertechnologie Silicium VLSI Integrierte Schaltung |
| volume_link | (DE-604)BV025241632 |
| work_keys_str_mv | AT einspruchnormang vlsielectronicsmicrostructurescience21 |