Osnovy technologii kremnievych integral'nych schem: 1 Okislenie, diffuzija, epitaksija
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Russian |
| Veröffentlicht: |
Moskva
Izdat. Mir
1969
|
| Beschreibung: | 451 S. |
Internformat
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Datensatz im Suchindex
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| any_adam_object | |
| author2 | Burger, R. M. Burger, R. M. |
| author2_role | edt edt |
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| author_facet | Burger, R. M. Burger, R. M. |
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| bvnumber | BV025747963 |
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| id | DE-604.BV025747963 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T22:18:29Z |
| institution | BVB |
| language | Russian |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019352295 |
| oclc_num | 315863137 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | 451 S. |
| publishDate | 1969 |
| publishDateSearch | 1969 |
| publishDateSort | 1969 |
| publisher | Izdat. Mir |
| record_format | marc |
| spelling | Fundamentals of silicon integrated device technology Osnovy technologii kremnievych integral'nych schem 1 Okislenie, diffuzija, epitaksija pod red. R. Burgera ... Moskva Izdat. Mir 1969 451 S. txt rdacontent n rdamedia nc rdacarrier Burger, R. M. edt (DE-604)BV024981049 1 |
| spellingShingle | Osnovy technologii kremnievych integral'nych schem |
| title | Osnovy technologii kremnievych integral'nych schem |
| title_alt | Fundamentals of silicon integrated device technology |
| title_auth | Osnovy technologii kremnievych integral'nych schem |
| title_exact_search | Osnovy technologii kremnievych integral'nych schem |
| title_full | Osnovy technologii kremnievych integral'nych schem 1 Okislenie, diffuzija, epitaksija pod red. R. Burgera ... |
| title_fullStr | Osnovy technologii kremnievych integral'nych schem 1 Okislenie, diffuzija, epitaksija pod red. R. Burgera ... |
| title_full_unstemmed | Osnovy technologii kremnievych integral'nych schem 1 Okislenie, diffuzija, epitaksija pod red. R. Burgera ... |
| title_short | Osnovy technologii kremnievych integral'nych schem |
| title_sort | osnovy technologii kremnievych integral nych schem okislenie diffuzija epitaksija |
| volume_link | (DE-604)BV024981049 |
| work_keys_str_mv | UT fundamentalsofsiliconintegrateddevicetechnology AT burgerrm osnovytechnologiikremnievychintegralnychschem1 |