Extended defects in germanium: fundamental and technological aspects
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Berlin [u.a.]
Springer
2009
|
| Schriftenreihe: | Springer series in materials science
118 |
| Schlagworte: | |
| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | Literaturangaben |
| Beschreibung: | XX, 297 S. Ill., graph. Darst. |
| ISBN: | 9783540856115 |
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Datensatz im Suchindex
| _version_ | 1804142716224798720 |
|---|---|
| adam_text | CONTENTS 1 DISLOCATIONS IN GERMANIUM: MECHANICAL PROPERTIES . . . . . .
. . 1 1.1 INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . . . .
. . . . . . . . . . . . . . . . . . . 1 1.2 ELASTIC PROPERTIES OF
GERMANIUM . . . . . . . . . . . . . . . . . . . . . . . . . . 2 1.2.2
LINEAR EXPANSION COEFFICIENT OF GE . . . . . . . . . . . . . . . . . . 4
1.2.3 THE FIRST-ORDER ELASTIC CONSTANTS . . . . . . . . . . . . . . . .
. . . 6 1.2.4 THIRD-ORDER ELASTIC CONSTANTS . . . . . . . . . . . . . .
. . . . . . . . 7 1.2.5 INTERNAL FRICTION OF GE . . . . . . . . . . . .
. . . . . . . . . . . . . . . . . 8 1.3 DISLOCATION: DEFINITIONS AND
STRUCTURES . . . . . . . . . . . . . . . . . . . . . 11 1.4 CREATION AND
OBSERVATION OF DISLOCATIONS . . . . . . . . . . . . . . . . . . . 15
1.4.1 GROWN-IN DISLOCATIONS . . . . . . . . . . . . . . . . . . . . . .
. . . . . . . 17 1.4.3 OBSERVATION OF DISLOCATIONS . . . . . . . . . . .
. . . . . . . . . . . . . . 19 1.5 HARDNESS AND PLASTICITY OF GE AT ROOM
TEMPERATURE. . . . . . . . . 24 1.6 HIGH TEMPERATURE PLASTICITY OF
GERMANIUM . . . . . . . . . . . . . . . . . 30 1.6.1 DISLOCATION
VELOCITY: EXPERIMENTAL FACTS . . . . . . . . . . . . . 31 1.6.2
DISLOCATION VELOCITY: FUNDAMENTAL UNDERSTANDING . . . . . 41 1.6.3
STATIC FLOW TESTS OR CREEP CURVE. . . . . . . . . . . . . . . . . . . .
42 1.6.4 DYNAMIC TESTING: STRESS*STRAIN YIELD CURVES IN GE . . . . 46
1.7 IMPACT OF DISLOCATIONS ON DOPANT DIFFUSION . . . . . . . . . . . . .
. . . . 54 1.8 CONCLUSIONS . . . . . . . . . . . . . . . . . . . . . . .
. . . . . . . . . . . . . . . . . . . . . . 57 REFERENCES . . . . . . .
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
. . . . . . . 58 2 ELECTRICAL AND OPTICAL PROPERTIES . . . . . . . . . .
. . . . . . . . . . . . . . . . 65 2.1 INTRODUCTION . . . . . . . . . .
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 65
2.2.1 READ*S ACCEPTOR LEVEL MODEL . . . . . . . . . . . . . . . . . . .
. . . . 67 2.2.2 SCHR¨ OTER*S 1D BAND MODEL . . . . . . . . . . . . . .
. . . . . . . . . . . . 70 2.2.3 FIRST PRINCIPLES CALCULATIONS AND EPR
RESULTS: DO DBS EXIST IN SPLIT DISLOCATIONS? . . . . . . . . . . . . . .
. . . 75 2.2.4 ONE DIMENSIONAL CONDUCTION ALONG DISLOCATIONS . . . . . .
77 X CONTENTS 2.2.5 DEFORMATION-INDUCED POINT DEFECTS . . . . . . . . .
. . . . . . . . . 83 2.2.6 ELECTRICAL ACTIVITY OF GROWN-IN DISLOCATIONS
. . . . . . . . . . 85 2.3 IMPACT OF DISLOCATIONS ON CARRIER MOBILITY. .
. . . . . . . . . . . . . . . . 89 2.4 IMPACT OF DISLOCATIONS ON
LIFETIME, TRAPPING, AND NOISE . . . . . . 93 2.4.1 IMPACT ON CARRIER
RECOMBINATION . . . . . . . . . . . . . . . . . . . 93 2.4.2 IMPACT ON
LOW FREQUENCY NOISE . . . . . . . . . . . . . . . . . . . . . 99 2.5
IMPACT OF DISLOCATIONS ON GE JUNCTION DEVICES . . . . . . . . . . . . .
. 100 2.6 IMPACT OF DISLOCATIONS ON OPTICAL PROPERTIES . . . . . . . . .
. . . . . . . 104 2.6.1 ABSORPTION AND RECOMBINATION. . . . . . . . . .
. . . . . . . . . . . . 107 2.6.2 OPTICAL RECOMBINATION . . . . . . . .
. . . . . . . . . . . . . . . . . . . . . 110 2.6.3 PHOTOCONDUCTIVITY .
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 113
2.6.4 PHOTOLUMINESCENCE . . . . . . . . . . . . . . . . . . . . . . . .
. . . . . . . . 126 2.7 CONCLUSIONS . . . . . . . . . . . . . . . . . .
. . . . . . . . . . . . . . . . . . . . . . . . . . . 131 REFERENCES . .
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
. . . . . . . . . . . . 132 3 GRAIN BOUNDARIES IN GERMANIUM . . . . . .
. . . . . . . . . . . . . . . . . . . . 137 3.1 INTRODUCTION . . . . . .
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
. . 137 3.2 STRUCTURE AND OBSERVATION OF GRAIN BOUNDARIES . . . . . . .
. . . . . . 137 3.3 ELECTRICAL PROPERTIES OF GRAIN BOUNDARIES . . . . .
. . . . . . . . . . . . . . 141 3.4 OPTICAL PROPERTIES OF GRAIN
BOUNDARIES . . . . . . . . . . . . . . . . . . . . 150 3.5 CONCLUSIONS .
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
. . . . . . . . 151 REFERENCES . . . . . . . . . . . . . . . . . . . . .
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 151 4
GERMANIUM-BASED SUBSTRATE DEFECTS . . . . . . . . . . . . . . . . . . .
. . . 153 4.1 INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . .
. . . . . . . . . . . . . . . . . . . . . 153 4.2 EPITAXIAL DEPOSITION:
DEFINITIONS . . . . . . . . . . . . . . . . . . . . . . . . . . 154
4.2.1 MODERN EPITAXIAL TECHNIQUES . . . . . . . . . . . . . . . . . . .
. . . . 154 4.2.2 EPITAXIAL GROWTH MODES . . . . . . . . . . . . . . . .
. . . . . . . . . . . 158 4.3 HETEROEPITAXIAL STRAINED LAYERS . . . . .
. . . . . . . . . . . . . . . . . . . . . . 159 4.3.1 EQUILIBRIUM
CRITICAL THICKNESS . . . . . . . . . . . . . . . . . . . . . . 160 4.3.2
METASTABLE CRITICAL THICKNESS . . . . . . . . . . . . . . . . . . . . .
. . 163 4.3.3 MISFIT AND THREADING DISLOCATION DENSITIES . . . . . . . .
. . . 165 4.3.4 STRAINED LAYER DISLOCATION NUCLEATION MECHANISM . . . .
. 166 4.3.5 DISLOCATION GLIDE AND CLIMB IN STRAINED LAYERS . . . . . . .
169 4.3.6 DISLOCATION INTERACTION MECHANISMS . . . . . . . . . . . . . .
. . . . 172 4.3.7 ELASTIC RELAXATION BY SURFACE ROUGHENING . . . . . . .
. . . . . 175 4.3.8 STRAIN RELAXATION IN LOCAL EPITAXIAL GROWTH . . . .
. . . . . . 178 4.4 HOMOEPITAXY OF GERMANIUM . . . . . . . . . . . . . .
. . . . . . . . . . . . . . . . 180 4.4.1 GROWTH MODES . . . . . . . . .
. . . . . . . . . . . . . . . . . . . . . . . . . . . 180 4.4.2 GROWTH
ROUGHNESS AND EPITAXIAL BREAKDOWN AT LOW TEMPERATURES . . . . . . . . .
. . . . . . . . . . . . . . . . . . . . . 184 4.5 HETEROEPITAXIAL GROWTH
OF GE ON SI . . . . . . . . . . . . . . . . . . . . . . . . 193 4.5.1
INITIAL GROWTH MECHANISMS . . . . . . . . . . . . . . . . . . . . . . .
. . 195 4.5.2 DIRECT LAYER-BY-LAYER GROWTH OF GE ON SI . . . . . . . . .
. . 198 4.5.3 GROWTH OF THICK RELAXED GE LAYERS DIRECTLY ON SI . . . .
203 CONTENTS XI 4.5.4 GROWTH OF THICK RELAXED GE LAYERS BY MEANS OF A
GRADED VIRTUAL SUBSTRATE. . . . . . . . . . . . . . . . . . . . . . .
206 4.5.5 SELECTIVE EPITAXIAL GROWTH OF RELAXED GE ON SI . . . . . . .
210 4.5.6 GROWTH OF STRAINED GE AND SI LAYERS AND SI/GE SUPERLATTICES .
. . . . . . . . . . . . . . . . . . . . . . . . . . . 215 4.6 DEFECTS IN
GERMANIUM-ON-INSULATOR SUBSTRATES . . . . . . . . . . . . . . 216 4.7
SUMMARY AND CONCLUSIONS . . . . . . . . . . . . . . . . . . . . . . . .
. . . . . . . . 227 REFERENCES . . . . . . . . . . . . . . . . . . . . .
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 228 5
PROCESS-INDUCED DEFECTS IN GERMANIUM . . . . . . . . . . . . . . . . . .
. 241 5.1 INTRODUCTION . . . . . . . . . . . . . . . . . . . . . . . . .
. . . . . . . . . . . . . . . . . . . 241 5.2 FUNDAMENTAL ION
IMPLANTATION DAMAGE MECHANISMS . . . . . . . . . 242 5.3 HEAVY ION
INDUCED VOID FORMATION . . . . . . . . . . . . . . . . . . . . . . . .
254 5.4 DAMAGE ANNEALING AND SOLID PHASE EPITAXIAL REGROWTH . . . . . .
257 5.5 IMPLANTATION DAMAGE AND REMOVAL BY STANDARD DOPANT IONS . 265
5.5.1 LATTICE SITE AND DAMAGE OF IMPLANTED SPECIES IN GE . . . 265 5.5.2
BORON IMPLANTATION IN GE . . . . . . . . . . . . . . . . . . . . . . . .
. . 268 5.5.3 AL IMPLANTATION IN GE . . . . . . . . . . . . . . . . . .
. . . . . . . . . . . 277 5.5.4 P AND AS IMPLANTATION IN GE . . . . . .
. . . . . . . . . . . . . . . . . 278 5.5.5 { 311 } INTERSTITIAL
CLUSTERS IN GE . . . . . . . . . . . . . . . . . . . . . 282 5.6 OXYGEN
IMPLANTATION IN GE AND ION BEAM MIXING . . . . . . . . . . . 283 5.7
HYDROGEN-RELATED EXTENDED DEFECTS IN GERMANIUM . . . . . . . . . . 285
5.8 CONCLUSIONS . . . . . . . . . . . . . . . . . . . . . . . . . . . .
. . . . . . . . . . . . . . . . . 287 REFERENCES . . . . . . . . . . . .
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
. . 288 INDEX . . . . . . . . . . . . . . . . . . . . . . . . . . . . .
. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 293
|
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| discipline | Maschinenbau / Maschinenwesen Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV025543344 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:36:11Z |
| institution | BVB |
| isbn | 9783540856115 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-020144736 |
| oclc_num | 316052974 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | XX, 297 S. Ill., graph. Darst. |
| publishDate | 2009 |
| publishDateSearch | 2009 |
| publishDateSort | 2009 |
| publisher | Springer |
| record_format | marc |
| series | Springer series in materials science |
| series2 | Springer series in materials science |
| spelling | Claeys, Cor Verfasser aut Extended defects in germanium fundamental and technological aspects Cor Claeys ; Eddy Simoen Berlin [u.a.] Springer 2009 XX, 297 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Springer series in materials science 118 Literaturangaben Germanium (DE-588)4135644-5 gnd rswk-swf Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf Germanium (DE-588)4135644-5 s Gitterbaufehler (DE-588)4125030-8 s DE-604 Simoen, Eddy Verfasser aut Springer series in materials science 118 (DE-604)BV000683335 118 SWB Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=020144736&sequence=000003&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Claeys, Cor Simoen, Eddy Extended defects in germanium fundamental and technological aspects Springer series in materials science Germanium (DE-588)4135644-5 gnd Gitterbaufehler (DE-588)4125030-8 gnd |
| subject_GND | (DE-588)4135644-5 (DE-588)4125030-8 |
| title | Extended defects in germanium fundamental and technological aspects |
| title_auth | Extended defects in germanium fundamental and technological aspects |
| title_exact_search | Extended defects in germanium fundamental and technological aspects |
| title_full | Extended defects in germanium fundamental and technological aspects Cor Claeys ; Eddy Simoen |
| title_fullStr | Extended defects in germanium fundamental and technological aspects Cor Claeys ; Eddy Simoen |
| title_full_unstemmed | Extended defects in germanium fundamental and technological aspects Cor Claeys ; Eddy Simoen |
| title_short | Extended defects in germanium |
| title_sort | extended defects in germanium fundamental and technological aspects |
| title_sub | fundamental and technological aspects |
| topic | Germanium (DE-588)4135644-5 gnd Gitterbaufehler (DE-588)4125030-8 gnd |
| topic_facet | Germanium Gitterbaufehler |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=020144736&sequence=000003&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
| volume_link | (DE-604)BV000683335 |
| work_keys_str_mv | AT claeyscor extendeddefectsingermaniumfundamentalandtechnologicalaspects AT simoeneddy extendeddefectsingermaniumfundamentalandtechnologicalaspects |