Introductory MEMS: fabrication and applications
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
New York, NY
Springer
2010
|
| Schlagworte: | |
| Beschreibung: | XV, 444 S. Ill., graph. Darst. |
| ISBN: | 9780387095103 |
Internformat
MARC
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| 008 | 100417s2010 ad|| |||| 00||| eng d | ||
| 020 | |a 9780387095103 |9 978-0-387-09510-3 | ||
| 035 | |a (OCoLC)254538507 | ||
| 035 | |a (DE-599)BVBBV025541167 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
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| 100 | 1 | |a Adams, Thomas M. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Introductory MEMS |b fabrication and applications |c Thomas M. Adams ; Richard A. Layton |
| 264 | 1 | |a New York, NY |b Springer |c 2010 | |
| 300 | |a XV, 444 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 0 | 7 | |a Automatentheorie |0 (DE-588)4003953-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a MEMS |0 (DE-588)4824724-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Programmiersprache |0 (DE-588)4047409-4 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |y 1979 |z Graz |2 gnd-content | |
| 689 | 0 | 0 | |a MEMS |0 (DE-588)4824724-8 |D s |
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| 689 | 1 | 0 | |a Automatentheorie |0 (DE-588)4003953-5 |D s |
| 689 | 1 | 1 | |a Programmiersprache |0 (DE-588)4047409-4 |D s |
| 689 | 1 | |5 DE-604 | |
| 700 | 1 | |a Layton, Richard A. |e Verfasser |4 aut | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-020142802 | ||
Datensatz im Suchindex
| _version_ | 1804142713944145920 |
|---|---|
| any_adam_object | |
| author | Adams, Thomas M. Layton, Richard A. |
| author_facet | Adams, Thomas M. Layton, Richard A. |
| author_role | aut aut |
| author_sort | Adams, Thomas M. |
| author_variant | t m a tm tma r a l ra ral |
| building | Verbundindex |
| bvnumber | BV025541167 |
| classification_rvk | ZN 3700 ZN 3750 |
| ctrlnum | (OCoLC)254538507 (DE-599)BVBBV025541167 |
| dewey-full | 621.381 620 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics 620 - Engineering and allied operations |
| dewey-raw | 621.381 620 |
| dewey-search | 621.381 620 |
| dewey-sort | 3621.381 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1979 Graz gnd-content |
| genre_facet | Konferenzschrift 1979 Graz |
| id | DE-604.BV025541167 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:36:09Z |
| institution | BVB |
| isbn | 9780387095103 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-020142802 |
| oclc_num | 254538507 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | XV, 444 S. Ill., graph. Darst. |
| publishDate | 2010 |
| publishDateSearch | 2010 |
| publishDateSort | 2010 |
| publisher | Springer |
| record_format | marc |
| spelling | Adams, Thomas M. Verfasser aut Introductory MEMS fabrication and applications Thomas M. Adams ; Richard A. Layton New York, NY Springer 2010 XV, 444 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Automatentheorie (DE-588)4003953-5 gnd rswk-swf MEMS (DE-588)4824724-8 gnd rswk-swf Programmiersprache (DE-588)4047409-4 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1979 Graz gnd-content MEMS (DE-588)4824724-8 s DE-604 Automatentheorie (DE-588)4003953-5 s Programmiersprache (DE-588)4047409-4 s Layton, Richard A. Verfasser aut |
| spellingShingle | Adams, Thomas M. Layton, Richard A. Introductory MEMS fabrication and applications Automatentheorie (DE-588)4003953-5 gnd MEMS (DE-588)4824724-8 gnd Programmiersprache (DE-588)4047409-4 gnd |
| subject_GND | (DE-588)4003953-5 (DE-588)4824724-8 (DE-588)4047409-4 (DE-588)1071861417 |
| title | Introductory MEMS fabrication and applications |
| title_auth | Introductory MEMS fabrication and applications |
| title_exact_search | Introductory MEMS fabrication and applications |
| title_full | Introductory MEMS fabrication and applications Thomas M. Adams ; Richard A. Layton |
| title_fullStr | Introductory MEMS fabrication and applications Thomas M. Adams ; Richard A. Layton |
| title_full_unstemmed | Introductory MEMS fabrication and applications Thomas M. Adams ; Richard A. Layton |
| title_short | Introductory MEMS |
| title_sort | introductory mems fabrication and applications |
| title_sub | fabrication and applications |
| topic | Automatentheorie (DE-588)4003953-5 gnd MEMS (DE-588)4824724-8 gnd Programmiersprache (DE-588)4047409-4 gnd |
| topic_facet | Automatentheorie MEMS Programmiersprache Konferenzschrift 1979 Graz |
| work_keys_str_mv | AT adamsthomasm introductorymemsfabricationandapplications AT laytonricharda introductorymemsfabricationandapplications |