Holdings: Particles on surfaces 7

Particles on surfaces 7: detection, adhesion and removal

Saved in:

Bibliographic Details
Other Authors:	Mittal, K. L. (Editor)
Format:	Book
Language:	English
Published:	Zeist VSP 2002
Online Access:	Inhaltsverzeichnis
Item Description:	proceedings of the 7th international symposium on particles on surfaces, ..., held ... in Newark, New Jersey, June 19 - 21, 2000
Physical Description:	X, 451 S. Ill., graph. Darst.
ISBN:	9067643726

Staff View

MARC


LEADER	00000nam a2200000 c 4500
001	BV025289219
003	DE-604
005	00000000000000.0
007	t
008	100417s2002 ad\|\| \|\|\|\| 00\|\|\| eng d
020			\|a 9067643726 \|9 90-6764-372-6
035			\|a (OCoLC)917165537
035			\|a (DE-599)BVBBV025289219
040			\|a DE-604 \|b ger \|e rakwb
041	0		\|a eng
049			\|a DE-11
084			\|a UP 7990 \|0 (DE-625)146446: \|2 rvk
245	1	0	\|a Particles on surfaces 7 \|b detection, adhesion and removal \|c ed.: K. L. Mittal
264		1	\|a Zeist \|b VSP \|c 2002
300			\|a X, 451 S. \|b Ill., graph. Darst.
336			\|b txt \|2 rdacontent
337			\|b n \|2 rdamedia
338			\|b nc \|2 rdacarrier
500			\|a proceedings of the 7th international symposium on particles on surfaces, ..., held ... in Newark, New Jersey, June 19 - 21, 2000
700	1		\|a Mittal, K. L. \|4 edt
856	4	2	\|m GBV Datenaustausch \|q application/pdf \|u http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=019922592&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA \|3 Inhaltsverzeichnis
999			\|a oai:aleph.bib-bvb.de:BVB01-019922592

Record in the Search Index

_version_	1804142356809646080
adam_text	PARTICLES ON SURFACES 7: DETECTION, ADHESION AND REMOVAL EDITOR: K.L MITTAL ///VSP/// UTRECHT * BOSTON 2002 TECHNISCHE INFORMATIONSEISLIOTHEK UNIVERSITALSBISLIOTHEK HANNOVER CONTENTS PREFACE IX PART 1: PARTICLE ANALYSIS AND GENERAL CLEANING-RELATED TOPICS APPLYING SURFACE ANALYSIS TECHNIQUES FOR PARTICLE IDENTIFICATION W.F. STICKLE 3 TOTAL REFLECTION AND GRAZING EMISSION X-RAY FLUORESCENCE SPECTROMETRY: ASSESSMENT OF THE SIZE OF CONTAMINANT PARTICLES ON SILICON WAFER SURFACES H. SCFNVENKE, P. A. BEAVEN ANDJ. KNOTH 11 DEVELOPMENT OF A PARTICLE DEPOSITION METER D. SEMLEIT, A. TRAMPE AND H. FISSAN 27 REDUCTION OF CLEANING AND VERIFICATION TIMES FOR AN AQUEOUS BASED PROCESS BY ON-LINE MONITORING A.J. PERVAN, J. GRILLY, S.L. LIM AND R. KAISER 41 IMPLEMENTATION OF THE IMEC-CLEANING IN ADVANCED CMOS MANUFACTURING M. MEURIS, S. ARNAUTS, 1. CORNELISSEN, K. KENIS, M. LUX, S. DE GENDT, P.W. MERTENS, I. TEERLINCK, R. VOS, L. LOEWENSTEIN, M.M. HEYNS ANDK. WOLKE 57 CLEANING, RINSING AND DRYING ISSUES IN POST-CU CMP CLEANING: A CASE STUDY W. FYEN, R VOS, E. VRANCKEN, J. GRILLAERT, M. MEURIS AND M. HEYNS 69 AGING EFFECTS IN TEST SILICON WAFERS PREPARED FOR WAFER CLEANING PROCESS EVALUATION N. NARAYANSWAMI, G. THOMES, J. WEYGAND, J. BUTTERBAUGH, S.-H. YOO, B. LIU, D. PAUL, J. SCHERER, L. DAVIS ANDK, CHILDS 97 VI CONTENTS PART 2: PARTICLE ADHESION AND REMOVAL ADHESION OF SMALL PARTICLES AND INNOVATIVE METHODS FOR THEIR REMOVAL KKOHLI 113 EFFECTS OF SURFACE ROUGHNESS ON VAN DER WAALS AND ELECTROSTATIC CONTRIBUTIONS TO PARTICLE-PARTICLE INTERACTIONS AND PARTICLE ADHESION J.Y. WALZANDN. SUN 151 EFFECT OF SURFACE HYDROPHOBICITY ON THE DETACHMENT OF PARTICLES FROM SURFACES M.M. SHARMA AND A.M. FREITAS 171 ADHESION AND REMOVAL OF PARTICLES FROM CHARGED SURFACES UNDER A HUMIDITY-CONTROLLED AIR STREAM P. SCHMITZ ANDJ. CARDOT 189 ADHESION MEASUREMENTS BY AFM AND SURFACE ENERGY CHARACTERISTICS BY IGC OF XEROGRAPHIC TONER PARTICLES UNDER DIFFERENT MECHANICAL AND ENVIRONMENTAL CONDITIONS L.H.G.J. SEGEREN, F.G. KARSSENBERG, J.P. PICKERING, J.W.A. VAN DEN BERG AND G.J. VANCSO 197 MEASUREMENTS OF ADHESION FORCES IN PHARMACEUTICAL POWDER-POLYMER SYSTEMS BY ATOMIC FORCE MICROSCOPY E. BEACH, J. DRELICH AND R. HAN 219 DIRECT ADHESION MEASUREMENTS BETWEEN PHARMACEUTICAL MATERIALS F.M. ETZLER, T.H. IBRAHIM, T.R. BURKANDRD. NEUMAN 235 LASER ASSISTED PARTICLE REMOVAL S.D. ALLEN AND K. IMEN 253 LASER REMOVAL OF PARTICLES FROM SOLID SURFACES Y.F. LU, W.D. SONG, L ZHANG, B. LUK YANCHUYK, Y.W. ZHENG, W.J. WANG, Y. ZHANG, M.H. HONG AND T.C. CHONG 261 LASER ASSISTED PARTICLE REMOVAL FROM SILICON WAFERS M. MOSBACHER, H.-J. MILNZER, M. BERTSCH, V. DOBLER, N. CHAOUI, J. SIEGEL, R. OLTRA, D. BDUERLE, J. BONEBERG AND P. LEIDERER 275 LASER CLEANING OF SILICON MEMBRANE STENCIL MASKS W. ZAPKA, C. GOLLASCH, R. LILISCHKIS, A. EHRMANN ANDK.F. ZAPKA 295 TRANSIENT LASER-BASED SURFACE ACCELERATION SIMULATIONS FOR PARTICLE REMOVAL C. LI, C. WU AND C. CETINKAYA 309 CONTENTS VII PARTICLE REMOVAL FROM SEMICONDUCTOR SUBSTRATES USING THE PLASMAX TECHNOLOGY J.B. BAILEY, J.J. FESTA ANDA.S. GELLER 325 PARTICLE REMOVAL WITH ULTRASONICS AND MEGASONICS S.B. AWAD 341 INFLUENCE OF TEMPERATURE AND DISSOLVED AIR ON MEGASONIC PARTICLE REMOVAL T.H. KUEHN, C.H. YANG ANDD.B. KITTELSON 35 5 A STUDY OF PARTICLE REMOVAL BASED ON MONTE CARLO SIMULATION OF ION INTERACTIONS F. TARDIF, I. CONSTANT, RJ.-M. PELLENQ AND A. DELVILLE 311 REMOVAL OF FIBRIN COATED PARTICLES FROM SURFACES S. LORTHOIS AND P. SCHMITZ 395 ENHANCEMENT OF PARTICLE REMOVAL AND MODIFICATION OF INTERFACIAL PHENOMENA USING SURFACTANTS M.L. FREE AND D. O. SHAH 405 THE ENHANCEMENT OF PARTICLE REMOVAL BY ADDING VALTRON SP2200 SURFACTANT INTO SC1 SOLUTION L. LIU AND S. VERHAVERBEKE 419 OPTIMIZATION OF PARTICLE REMOVAL PERFORMANCE OF DHF-BASED CLEANING RECIPES R. VOS, I. CORNELISSEN, K. XU, W. FYEN, P. MERTENS, M. MEURIS AND M. HEYNS 421 SPRAY CLEANING WITH HYDROFLUOROCARBON SOLUTIONS R. KAISER, R.S. MILLER AND J.J. CARDIN 443
any_adam_object	1
author2	Mittal, K. L.
author2_role	edt
author2_variant	k l m kl klm
author_facet	Mittal, K. L.
building	Verbundindex
bvnumber	BV025289219
classification_rvk	UP 7990
ctrlnum	(OCoLC)917165537 (DE-599)BVBBV025289219
discipline	Physik
format	Book
fullrecord	<?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01143nam a2200289 c 4500</leader><controlfield tag="001">BV025289219</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">100417s2002 ad\|\| \|\|\|\| 00\|\|\| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">9067643726</subfield><subfield code="9">90-6764-372-6</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)917165537</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV025289219</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-11</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UP 7990</subfield><subfield code="0">(DE-625)146446:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Particles on surfaces 7</subfield><subfield code="b">detection, adhesion and removal</subfield><subfield code="c">ed.: K. L. Mittal</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Zeist</subfield><subfield code="b">VSP</subfield><subfield code="c">2002</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">X, 451 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="500" ind1=" " ind2=" "><subfield code="a">proceedings of the 7th international symposium on particles on surfaces, ..., held ... in Newark, New Jersey, June 19 - 21, 2000</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Mittal, K. L.</subfield><subfield code="4">edt</subfield></datafield><datafield tag="856" ind1="4" ind2="2"><subfield code="m">GBV Datenaustausch</subfield><subfield code="q">application/pdf</subfield><subfield code="u">http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=019922592&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA</subfield><subfield code="3">Inhaltsverzeichnis</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-019922592</subfield></datafield></record></collection>
id	DE-604.BV025289219
illustrated	Illustrated
indexdate	2024-07-09T22:30:28Z
institution	BVB
isbn	9067643726
language	English
oai_aleph_id	oai:aleph.bib-bvb.de:BVB01-019922592
oclc_num	917165537
open_access_boolean
owner	DE-11
owner_facet	DE-11
physical	X, 451 S. Ill., graph. Darst.
publishDate	2002
publishDateSearch	2002
publishDateSort	2002
publisher	VSP
record_format	marc
spelling	Particles on surfaces 7 detection, adhesion and removal ed.: K. L. Mittal Zeist VSP 2002 X, 451 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier proceedings of the 7th international symposium on particles on surfaces, ..., held ... in Newark, New Jersey, June 19 - 21, 2000 Mittal, K. L. edt GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=019922592&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis
spellingShingle	Particles on surfaces 7 detection, adhesion and removal
title	Particles on surfaces 7 detection, adhesion and removal
title_auth	Particles on surfaces 7 detection, adhesion and removal
title_exact_search	Particles on surfaces 7 detection, adhesion and removal
title_full	Particles on surfaces 7 detection, adhesion and removal ed.: K. L. Mittal
title_fullStr	Particles on surfaces 7 detection, adhesion and removal ed.: K. L. Mittal
title_full_unstemmed	Particles on surfaces 7 detection, adhesion and removal ed.: K. L. Mittal
title_short	Particles on surfaces 7
title_sort	particles on surfaces 7 detection adhesion and removal
title_sub	detection, adhesion and removal
url	http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=019922592&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA
work_keys_str_mv	AT mittalkl particlesonsurfaces7detectionadhesionandremoval

Holdings

There is no print copy available.

Interlibrary loan Place Request Caution: Not in THWS collection! Indexes

MARC

Record in the Search Index

There is no print copy available.

Similar Items