Particles on surfaces 7: detection, adhesion and removal
Gespeichert in:
| Weitere Verfasser: | |
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| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Zeist
VSP
2002
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| Online-Zugang: | Inhaltsverzeichnis |
| Beschreibung: | proceedings of the 7th international symposium on particles on surfaces, ..., held ... in Newark, New Jersey, June 19 - 21, 2000 |
| Beschreibung: | X, 451 S. Ill., graph. Darst. |
| ISBN: | 9067643726 |
Internformat
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| 500 | |a proceedings of the 7th international symposium on particles on surfaces, ..., held ... in Newark, New Jersey, June 19 - 21, 2000 | ||
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Datensatz im Suchindex
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| adam_text | PARTICLES ON SURFACES 7: DETECTION, ADHESION AND REMOVAL EDITOR: K.L
MITTAL ///VSP/// UTRECHT * BOSTON 2002 TECHNISCHE INFORMATIONSEISLIOTHEK
UNIVERSITALSBISLIOTHEK HANNOVER CONTENTS PREFACE IX PART 1: PARTICLE
ANALYSIS AND GENERAL CLEANING-RELATED TOPICS APPLYING SURFACE ANALYSIS
TECHNIQUES FOR PARTICLE IDENTIFICATION W.F. STICKLE 3 TOTAL REFLECTION
AND GRAZING EMISSION X-RAY FLUORESCENCE SPECTROMETRY: ASSESSMENT OF THE
SIZE OF CONTAMINANT PARTICLES ON SILICON WAFER SURFACES H. SCFNVENKE, P.
A. BEAVEN ANDJ. KNOTH 11 DEVELOPMENT OF A PARTICLE DEPOSITION METER D.
SEMLEIT, A. TRAMPE AND H. FISSAN 27 REDUCTION OF CLEANING AND
VERIFICATION TIMES FOR AN AQUEOUS BASED PROCESS BY ON-LINE MONITORING
A.J. PERVAN, J. GRILLY, S.L. LIM AND R. KAISER 41 IMPLEMENTATION OF THE
IMEC-CLEANING IN ADVANCED CMOS MANUFACTURING M. MEURIS, S. ARNAUTS, 1.
CORNELISSEN, K. KENIS, M. LUX, S. DE GENDT, P.W. MERTENS, I. TEERLINCK,
R. VOS, L. LOEWENSTEIN, M.M. HEYNS ANDK. WOLKE 57 CLEANING, RINSING AND
DRYING ISSUES IN POST-CU CMP CLEANING: A CASE STUDY W. FYEN, R VOS, E.
VRANCKEN, J. GRILLAERT, M. MEURIS AND M. HEYNS 69 AGING EFFECTS IN TEST
SILICON WAFERS PREPARED FOR WAFER CLEANING PROCESS EVALUATION N.
NARAYANSWAMI, G. THOMES, J. WEYGAND, J. BUTTERBAUGH, S.-H. YOO, B. LIU,
D. PAUL, J. SCHERER, L. DAVIS ANDK, CHILDS 97 VI CONTENTS PART 2:
PARTICLE ADHESION AND REMOVAL ADHESION OF SMALL PARTICLES AND INNOVATIVE
METHODS FOR THEIR REMOVAL KKOHLI 113 EFFECTS OF SURFACE ROUGHNESS ON VAN
DER WAALS AND ELECTROSTATIC CONTRIBUTIONS TO PARTICLE-PARTICLE
INTERACTIONS AND PARTICLE ADHESION J.Y. WALZANDN. SUN 151 EFFECT OF
SURFACE HYDROPHOBICITY ON THE DETACHMENT OF PARTICLES FROM SURFACES M.M.
SHARMA AND A.M. FREITAS 171 ADHESION AND REMOVAL OF PARTICLES FROM
CHARGED SURFACES UNDER A HUMIDITY-CONTROLLED AIR STREAM P. SCHMITZ ANDJ.
CARDOT 189 ADHESION MEASUREMENTS BY AFM AND SURFACE ENERGY
CHARACTERISTICS BY IGC OF XEROGRAPHIC TONER PARTICLES UNDER DIFFERENT
MECHANICAL AND ENVIRONMENTAL CONDITIONS L.H.G.J. SEGEREN, F.G.
KARSSENBERG, J.P. PICKERING, J.W.A. VAN DEN BERG AND G.J. VANCSO 197
MEASUREMENTS OF ADHESION FORCES IN PHARMACEUTICAL POWDER-POLYMER SYSTEMS
BY ATOMIC FORCE MICROSCOPY E. BEACH, J. DRELICH AND R. HAN 219 DIRECT
ADHESION MEASUREMENTS BETWEEN PHARMACEUTICAL MATERIALS F.M. ETZLER, T.H.
IBRAHIM, T.R. BURKANDRD. NEUMAN 235 LASER ASSISTED PARTICLE REMOVAL S.D.
ALLEN AND K. IMEN 253 LASER REMOVAL OF PARTICLES FROM SOLID SURFACES
Y.F. LU, W.D. SONG, L ZHANG, B. LUK YANCHUYK, Y.W. ZHENG, W.J. WANG, Y.
ZHANG, M.H. HONG AND T.C. CHONG 261 LASER ASSISTED PARTICLE REMOVAL FROM
SILICON WAFERS M. MOSBACHER, H.-J. MILNZER, M. BERTSCH, V. DOBLER, N.
CHAOUI, J. SIEGEL, R. OLTRA, D. BDUERLE, J. BONEBERG AND P. LEIDERER 275
LASER CLEANING OF SILICON MEMBRANE STENCIL MASKS W. ZAPKA, C. GOLLASCH,
R. LILISCHKIS, A. EHRMANN ANDK.F. ZAPKA 295 TRANSIENT LASER-BASED
SURFACE ACCELERATION SIMULATIONS FOR PARTICLE REMOVAL C. LI, C. WU AND
C. CETINKAYA 309 CONTENTS VII PARTICLE REMOVAL FROM SEMICONDUCTOR
SUBSTRATES USING THE PLASMAX TECHNOLOGY J.B. BAILEY, J.J. FESTA ANDA.S.
GELLER 325 PARTICLE REMOVAL WITH ULTRASONICS AND MEGASONICS S.B. AWAD
341 INFLUENCE OF TEMPERATURE AND DISSOLVED AIR ON MEGASONIC PARTICLE
REMOVAL T.H. KUEHN, C.H. YANG ANDD.B. KITTELSON 35 5 A STUDY OF PARTICLE
REMOVAL BASED ON MONTE CARLO SIMULATION OF ION INTERACTIONS F. TARDIF,
I. CONSTANT, RJ.-M. PELLENQ AND A. DELVILLE 311 REMOVAL OF FIBRIN COATED
PARTICLES FROM SURFACES S. LORTHOIS AND P. SCHMITZ 395 ENHANCEMENT OF
PARTICLE REMOVAL AND MODIFICATION OF INTERFACIAL PHENOMENA USING
SURFACTANTS M.L. FREE AND D. O. SHAH 405 THE ENHANCEMENT OF PARTICLE
REMOVAL BY ADDING VALTRON SP2200 SURFACTANT INTO SC1 SOLUTION L. LIU AND
S. VERHAVERBEKE 419 OPTIMIZATION OF PARTICLE REMOVAL PERFORMANCE OF
DHF-BASED CLEANING RECIPES R. VOS, I. CORNELISSEN, K. XU, W. FYEN, P.
MERTENS, M. MEURIS AND M. HEYNS 421 SPRAY CLEANING WITH
HYDROFLUOROCARBON SOLUTIONS R. KAISER, R.S. MILLER AND J.J. CARDIN 443
|
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| ctrlnum | (OCoLC)917165537 (DE-599)BVBBV025289219 |
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| illustrated | Illustrated |
| indexdate | 2024-07-09T22:30:28Z |
| institution | BVB |
| isbn | 9067643726 |
| language | English |
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| physical | X, 451 S. Ill., graph. Darst. |
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| spelling | Particles on surfaces 7 detection, adhesion and removal ed.: K. L. Mittal Zeist VSP 2002 X, 451 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier proceedings of the 7th international symposium on particles on surfaces, ..., held ... in Newark, New Jersey, June 19 - 21, 2000 Mittal, K. L. edt GBV Datenaustausch application/pdf http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=019922592&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA Inhaltsverzeichnis |
| spellingShingle | Particles on surfaces 7 detection, adhesion and removal |
| title | Particles on surfaces 7 detection, adhesion and removal |
| title_auth | Particles on surfaces 7 detection, adhesion and removal |
| title_exact_search | Particles on surfaces 7 detection, adhesion and removal |
| title_full | Particles on surfaces 7 detection, adhesion and removal ed.: K. L. Mittal |
| title_fullStr | Particles on surfaces 7 detection, adhesion and removal ed.: K. L. Mittal |
| title_full_unstemmed | Particles on surfaces 7 detection, adhesion and removal ed.: K. L. Mittal |
| title_short | Particles on surfaces 7 |
| title_sort | particles on surfaces 7 detection adhesion and removal |
| title_sub | detection, adhesion and removal |
| url | http://bvbr.bib-bvb.de:8991/F?func=service&doc_library=BVB01&local_base=BVB01&doc_number=019922592&sequence=000001&line_number=0001&func_code=DB_RECORDS&service_type=MEDIA |
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