Vavuum technology, thin films, and sputtering: an introduction
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
New York [u.a.]
Academic Press
1983
|
| Schlagworte: | |
| Beschreibung: | VIII, 151 S. |
| ISBN: | 0126747806 |
Internformat
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| 264 | 1 | |a New York [u.a.] |b Academic Press |c 1983 | |
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Datensatz im Suchindex
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| author | Stuart, R. V. |
| author_facet | Stuart, R. V. |
| author_role | aut |
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| id | DE-604.BV025244076 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T22:29:35Z |
| institution | BVB |
| isbn | 0126747806 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019882082 |
| oclc_num | 611053666 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | VIII, 151 S. |
| publishDate | 1983 |
| publishDateSearch | 1983 |
| publishDateSort | 1983 |
| publisher | Academic Press |
| record_format | marc |
| spelling | Stuart, R. V. Verfasser aut Vavuum technology, thin films, and sputtering an introduction R. V. Stuart New York [u.a.] Academic Press 1983 VIII, 151 S. txt rdacontent n rdamedia nc rdacarrier Pumpe (DE-588)4047843-9 gnd rswk-swf Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd rswk-swf Vakuumtechnik (DE-588)4062270-8 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Zerstäubung (DE-588)4067687-0 gnd rswk-swf Vakuumtechnik (DE-588)4062270-8 s DE-604 Dünne Schicht (DE-588)4136925-7 s Zerstäubung (DE-588)4067687-0 s Pumpe (DE-588)4047843-9 s Fotolithografie Halbleitertechnologie (DE-588)4174516-4 s |
| spellingShingle | Stuart, R. V. Vavuum technology, thin films, and sputtering an introduction Pumpe (DE-588)4047843-9 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd Vakuumtechnik (DE-588)4062270-8 gnd Dünne Schicht (DE-588)4136925-7 gnd Zerstäubung (DE-588)4067687-0 gnd |
| subject_GND | (DE-588)4047843-9 (DE-588)4174516-4 (DE-588)4062270-8 (DE-588)4136925-7 (DE-588)4067687-0 |
| title | Vavuum technology, thin films, and sputtering an introduction |
| title_auth | Vavuum technology, thin films, and sputtering an introduction |
| title_exact_search | Vavuum technology, thin films, and sputtering an introduction |
| title_full | Vavuum technology, thin films, and sputtering an introduction R. V. Stuart |
| title_fullStr | Vavuum technology, thin films, and sputtering an introduction R. V. Stuart |
| title_full_unstemmed | Vavuum technology, thin films, and sputtering an introduction R. V. Stuart |
| title_short | Vavuum technology, thin films, and sputtering |
| title_sort | vavuum technology thin films and sputtering an introduction |
| title_sub | an introduction |
| topic | Pumpe (DE-588)4047843-9 gnd Fotolithografie Halbleitertechnologie (DE-588)4174516-4 gnd Vakuumtechnik (DE-588)4062270-8 gnd Dünne Schicht (DE-588)4136925-7 gnd Zerstäubung (DE-588)4067687-0 gnd |
| topic_facet | Pumpe Fotolithografie Halbleitertechnologie Vakuumtechnik Dünne Schicht Zerstäubung |
| work_keys_str_mv | AT stuartrv vavuumtechnologythinfilmsandsputteringanintroduction |