Integrated cicuit metrology: may 4-5, 1982, Arlington, Virginia
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
1982
|
| Schriftenreihe: | Proceedings of the SPIE
342 |
| Schlagworte: | |
| Beschreibung: | VI, 132 S. Ill. |
| ISBN: | 0892523778 |
Internformat
MARC
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| 245 | 1 | 0 | |a Integrated cicuit metrology |b may 4-5, 1982, Arlington, Virginia |c Ed.: Diana Nyyssonen |
| 264 | 1 | |a Bellingham, Wash. |b SPIE |c 1982 | |
| 300 | |a VI, 132 S. |b Ill. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
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| 490 | 1 | |a Proceedings of the SPIE |v 342 | |
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| 650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
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| 700 | 1 | |a Nyyssonen, Diana |4 edt | |
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Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author2 | Nyyssonen, Diana |
| author2_role | edt |
| author2_variant | d n dn |
| author_facet | Nyyssonen, Diana |
| building | Verbundindex |
| bvnumber | BV025243224 |
| ctrlnum | (OCoLC)917018324 (DE-599)BVBBV025243224 |
| format | Book |
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| id | DE-604.BV025243224 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:29:34Z |
| institution | BVB |
| isbn | 0892523778 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019881307 |
| oclc_num | 917018324 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | VI, 132 S. Ill. |
| publishDate | 1982 |
| publishDateSearch | 1982 |
| publishDateSort | 1982 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings of the SPIE |
| spelling | Integrated cicuit metrology may 4-5, 1982, Arlington, Virginia Ed.: Diana Nyyssonen Bellingham, Wash. SPIE 1982 VI, 132 S. Ill. txt rdacontent n rdamedia nc rdacarrier Proceedings of the SPIE 342 Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Metrologie (DE-588)4169749-2 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf Dickenmessung (DE-588)4149635-8 gnd rswk-swf Integrierte Schaltung (DE-588)4027242-4 s DE-604 Metrologie (DE-588)4169749-2 s Lithografie Halbleitertechnologie (DE-588)4191584-7 s Mikrosystemtechnik (DE-588)4221617-5 s Dünne Schicht (DE-588)4136925-7 s Dickenmessung (DE-588)4149635-8 s Nyyssonen, Diana edt Society of Photo-Optical Instrumentation Engineers Proceedings of the SPIE 342 (DE-604)BV000010887 342 |
| spellingShingle | Integrated cicuit metrology may 4-5, 1982, Arlington, Virginia Integrierte Schaltung (DE-588)4027242-4 gnd Dünne Schicht (DE-588)4136925-7 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Metrologie (DE-588)4169749-2 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Dickenmessung (DE-588)4149635-8 gnd |
| subject_GND | (DE-588)4027242-4 (DE-588)4136925-7 (DE-588)4191584-7 (DE-588)4169749-2 (DE-588)4221617-5 (DE-588)4149635-8 |
| title | Integrated cicuit metrology may 4-5, 1982, Arlington, Virginia |
| title_auth | Integrated cicuit metrology may 4-5, 1982, Arlington, Virginia |
| title_exact_search | Integrated cicuit metrology may 4-5, 1982, Arlington, Virginia |
| title_full | Integrated cicuit metrology may 4-5, 1982, Arlington, Virginia Ed.: Diana Nyyssonen |
| title_fullStr | Integrated cicuit metrology may 4-5, 1982, Arlington, Virginia Ed.: Diana Nyyssonen |
| title_full_unstemmed | Integrated cicuit metrology may 4-5, 1982, Arlington, Virginia Ed.: Diana Nyyssonen |
| title_short | Integrated cicuit metrology |
| title_sort | integrated cicuit metrology may 4 5 1982 arlington virginia |
| title_sub | may 4-5, 1982, Arlington, Virginia |
| topic | Integrierte Schaltung (DE-588)4027242-4 gnd Dünne Schicht (DE-588)4136925-7 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd Metrologie (DE-588)4169749-2 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd Dickenmessung (DE-588)4149635-8 gnd |
| topic_facet | Integrierte Schaltung Dünne Schicht Lithografie Halbleitertechnologie Metrologie Mikrosystemtechnik Dickenmessung |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT nyyssonendiana integratedcicuitmetrologymay451982arlingtonvirginia |