X-ray lithography and applications of soft x-rays to technology: October 19-20, 1983, Upton, New York
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
1983
|
| Schriftenreihe: | Proceedings of the SPIE
448 |
| Schlagworte: | |
| Beschreibung: | VI, 140 S. Ill. |
| ISBN: | 0892524839 |
Internformat
MARC
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| 264 | 1 | |a Bellingham, Wash. |b SPIE |c 1983 | |
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Datensatz im Suchindex
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| author2 | Wilson, Alan D. |
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| id | DE-604.BV025243205 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:29:34Z |
| institution | BVB |
| isbn | 0892524839 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019881288 |
| oclc_num | 917018260 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | VI, 140 S. Ill. |
| publishDate | 1983 |
| publishDateSearch | 1983 |
| publishDateSort | 1983 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings of the SPIE |
| spelling | X-ray lithography and applications of soft x-rays to technology October 19-20, 1983, Upton, New York Ed.: Alan D. Wilson Bellingham, Wash. SPIE 1983 VI, 140 S. Ill. txt rdacontent n rdamedia nc rdacarrier Proceedings of the SPIE 448 Konferenz (DE-588)4032055-8 gnd rswk-swf Röntgenlithografie (DE-588)4178314-1 gnd rswk-swf Technologie (DE-588)4059276-5 gnd rswk-swf Weiche Röntgenstrahlung (DE-588)4189406-6 gnd rswk-swf Röntgenlithografie (DE-588)4178314-1 s DE-604 Weiche Röntgenstrahlung (DE-588)4189406-6 s Technologie (DE-588)4059276-5 s Konferenz (DE-588)4032055-8 s Wilson, Alan D. edt Society of Photo-Optical Instrumentation Engineers Proceedings of the SPIE 448 (DE-604)BV000010887 448 |
| spellingShingle | X-ray lithography and applications of soft x-rays to technology October 19-20, 1983, Upton, New York Konferenz (DE-588)4032055-8 gnd Röntgenlithografie (DE-588)4178314-1 gnd Technologie (DE-588)4059276-5 gnd Weiche Röntgenstrahlung (DE-588)4189406-6 gnd |
| subject_GND | (DE-588)4032055-8 (DE-588)4178314-1 (DE-588)4059276-5 (DE-588)4189406-6 |
| title | X-ray lithography and applications of soft x-rays to technology October 19-20, 1983, Upton, New York |
| title_auth | X-ray lithography and applications of soft x-rays to technology October 19-20, 1983, Upton, New York |
| title_exact_search | X-ray lithography and applications of soft x-rays to technology October 19-20, 1983, Upton, New York |
| title_full | X-ray lithography and applications of soft x-rays to technology October 19-20, 1983, Upton, New York Ed.: Alan D. Wilson |
| title_fullStr | X-ray lithography and applications of soft x-rays to technology October 19-20, 1983, Upton, New York Ed.: Alan D. Wilson |
| title_full_unstemmed | X-ray lithography and applications of soft x-rays to technology October 19-20, 1983, Upton, New York Ed.: Alan D. Wilson |
| title_short | X-ray lithography and applications of soft x-rays to technology |
| title_sort | x ray lithography and applications of soft x rays to technology october 19 20 1983 upton new york |
| title_sub | October 19-20, 1983, Upton, New York |
| topic | Konferenz (DE-588)4032055-8 gnd Röntgenlithografie (DE-588)4178314-1 gnd Technologie (DE-588)4059276-5 gnd Weiche Röntgenstrahlung (DE-588)4189406-6 gnd |
| topic_facet | Konferenz Röntgenlithografie Technologie Weiche Röntgenstrahlung |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT wilsonaland xraylithographyandapplicationsofsoftxraystotechnologyoctober19201983uptonnewyork |