Optical microlithography IV: March 13-14, 1985, Santa Clara, Calif.
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
1985
|
| Schriftenreihe: | Proceedings of the SPIE
538 |
| Schlagworte: | |
| Beschreibung: | VI, 260 S. Ill. |
Internformat
MARC
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| 245 | 1 | 0 | |a Optical microlithography IV |b March 13-14, 1985, Santa Clara, Calif. |c Ed.: Harry L. Stover |
| 264 | 1 | |a Bellingham, Wash. |b SPIE |c 1985 | |
| 300 | |a VI, 260 S. |b Ill. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Proceedings of the SPIE |v 538 | |
| 650 | 0 | 7 | |a Messung |0 (DE-588)4038852-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Optik |0 (DE-588)4043650-0 |2 gnd |9 rswk-swf |
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| 700 | 1 | |a Stover, Harry L. |4 edt | |
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Datensatz im Suchindex
| _version_ | 1804142299646525440 |
|---|---|
| any_adam_object | |
| author2 | Stover, Harry L. |
| author2_role | edt |
| author2_variant | h l s hl hls |
| author_facet | Stover, Harry L. |
| building | Verbundindex |
| bvnumber | BV025243176 |
| ctrlnum | (OCoLC)833239198 (DE-599)BVBBV025243176 |
| dewey-full | 621.38174 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38174 |
| dewey-search | 621.38174 |
| dewey-sort | 3621.38174 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV025243176 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:29:34Z |
| institution | BVB |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019881259 |
| oclc_num | 833239198 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | VI, 260 S. Ill. |
| publishDate | 1985 |
| publishDateSearch | 1985 |
| publishDateSort | 1985 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings of the SPIE |
| spelling | Optical microlithography IV March 13-14, 1985, Santa Clara, Calif. Ed.: Harry L. Stover Bellingham, Wash. SPIE 1985 VI, 260 S. Ill. txt rdacontent n rdamedia nc rdacarrier Proceedings of the SPIE 538 Messung (DE-588)4038852-9 gnd rswk-swf Optik (DE-588)4043650-0 gnd rswk-swf Bildverarbeitung (DE-588)4006684-8 gnd rswk-swf Modellierung (DE-588)4170297-9 gnd rswk-swf Holografie (DE-588)4025643-1 gnd rswk-swf Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf Optik (DE-588)4043650-0 s DE-604 Lithografie Halbleitertechnologie (DE-588)4191584-7 s Bildverarbeitung (DE-588)4006684-8 s Holografie (DE-588)4025643-1 s Messung (DE-588)4038852-9 s Modellierung (DE-588)4170297-9 s Stover, Harry L. edt Society of Photo-Optical Instrumentation Engineers Proceedings of the SPIE 538 (DE-604)BV000010887 538 |
| spellingShingle | Optical microlithography IV March 13-14, 1985, Santa Clara, Calif. Messung (DE-588)4038852-9 gnd Optik (DE-588)4043650-0 gnd Bildverarbeitung (DE-588)4006684-8 gnd Modellierung (DE-588)4170297-9 gnd Holografie (DE-588)4025643-1 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4038852-9 (DE-588)4043650-0 (DE-588)4006684-8 (DE-588)4170297-9 (DE-588)4025643-1 (DE-588)4191584-7 |
| title | Optical microlithography IV March 13-14, 1985, Santa Clara, Calif. |
| title_auth | Optical microlithography IV March 13-14, 1985, Santa Clara, Calif. |
| title_exact_search | Optical microlithography IV March 13-14, 1985, Santa Clara, Calif. |
| title_full | Optical microlithography IV March 13-14, 1985, Santa Clara, Calif. Ed.: Harry L. Stover |
| title_fullStr | Optical microlithography IV March 13-14, 1985, Santa Clara, Calif. Ed.: Harry L. Stover |
| title_full_unstemmed | Optical microlithography IV March 13-14, 1985, Santa Clara, Calif. Ed.: Harry L. Stover |
| title_short | Optical microlithography IV |
| title_sort | optical microlithography iv march 13 14 1985 santa clara calif |
| title_sub | March 13-14, 1985, Santa Clara, Calif. |
| topic | Messung (DE-588)4038852-9 gnd Optik (DE-588)4043650-0 gnd Bildverarbeitung (DE-588)4006684-8 gnd Modellierung (DE-588)4170297-9 gnd Holografie (DE-588)4025643-1 gnd Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Messung Optik Bildverarbeitung Modellierung Holografie Lithografie Halbleitertechnologie |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT stoverharryl opticalmicrolithographyivmarch13141985santaclaracalif |