Thin film processes:
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
New York [u.a.]
Academic Press
1978
|
| Schlagworte: | |
| Beschreibung: | X, 564 S. |
| ISBN: | 0127282505 |
Internformat
MARC
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| 245 | 1 | 0 | |a Thin film processes |c ed. by John L. Vossen ... |
| 264 | 1 | |a New York [u.a.] |b Academic Press |c 1978 | |
| 300 | |a X, 564 S. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
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| 689 | 3 | |5 DE-604 | |
| 700 | 1 | |a Vossen, John L. |4 edt | |
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Datensatz im Suchindex
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|---|---|
| any_adam_object | |
| author2 | Vossen, John L. |
| author2_role | edt |
| author2_variant | j l v jl jlv |
| author_facet | Vossen, John L. |
| building | Verbundindex |
| bvnumber | BV025242930 |
| classification_rvk | UP 7500 VE 7000 |
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| dewey-full | 621.38171 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 621 - Applied physics |
| dewey-raw | 621.38171 |
| dewey-search | 621.38171 |
| dewey-sort | 3621.38171 |
| dewey-tens | 620 - Engineering and allied operations |
| discipline | Chemie / Pharmazie Physik Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Book |
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| id | DE-604.BV025242930 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T22:29:33Z |
| institution | BVB |
| isbn | 0127282505 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019881055 |
| oclc_num | 247372644 |
| open_access_boolean | |
| owner | DE-11 DE-526 DE-83 DE-91 DE-BY-TUM DE-91G DE-BY-TUM |
| owner_facet | DE-11 DE-526 DE-83 DE-91 DE-BY-TUM DE-91G DE-BY-TUM |
| physical | X, 564 S. |
| publishDate | 1978 |
| publishDateSearch | 1978 |
| publishDateSort | 1978 |
| publisher | Academic Press |
| record_format | marc |
| spelling | Thin film processes ed. by John L. Vossen ... New York [u.a.] Academic Press 1978 X, 564 S. txt rdacontent n rdamedia nc rdacarrier Dünnschichttechnik (DE-588)4136339-5 gnd rswk-swf CVD-Verfahren (DE-588)4009846-1 gnd rswk-swf Ätzen (DE-588)4000648-7 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf Dünnschichttechnik (DE-588)4136339-5 s DE-604 CVD-Verfahren (DE-588)4009846-1 s Sputtern (DE-588)4182614-0 s Ätzen (DE-588)4000648-7 s Vossen, John L. edt |
| spellingShingle | Thin film processes Dünnschichttechnik (DE-588)4136339-5 gnd CVD-Verfahren (DE-588)4009846-1 gnd Ätzen (DE-588)4000648-7 gnd Sputtern (DE-588)4182614-0 gnd |
| subject_GND | (DE-588)4136339-5 (DE-588)4009846-1 (DE-588)4000648-7 (DE-588)4182614-0 |
| title | Thin film processes |
| title_auth | Thin film processes |
| title_exact_search | Thin film processes |
| title_full | Thin film processes ed. by John L. Vossen ... |
| title_fullStr | Thin film processes ed. by John L. Vossen ... |
| title_full_unstemmed | Thin film processes ed. by John L. Vossen ... |
| title_short | Thin film processes |
| title_sort | thin film processes |
| topic | Dünnschichttechnik (DE-588)4136339-5 gnd CVD-Verfahren (DE-588)4009846-1 gnd Ätzen (DE-588)4000648-7 gnd Sputtern (DE-588)4182614-0 gnd |
| topic_facet | Dünnschichttechnik CVD-Verfahren Ätzen Sputtern |
| work_keys_str_mv | AT vossenjohnl thinfilmprocesses |