Gettering and Defect Engineering in the Semiconductor Technology (GADEST '89): 3rd International Autumn Meeting, Garzau, October 8-13, 1989 ; Proceedings
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Garzau
SCI-TECH Publ.
1989
|
| Schlagworte: | |
| Beschreibung: | XI, 607 S. Ill. |
| ISBN: | 3908044049 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV025242202 | ||
| 003 | DE-604 | ||
| 005 | 00000000000000.0 | ||
| 007 | t | ||
| 008 | 100417s1989 a||| |||| 00||| und d | ||
| 020 | |a 3908044049 |9 3-908044-04-9 | ||
| 035 | |a (OCoLC)635317528 | ||
| 035 | |a (DE-599)BVBBV025242202 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | |a und | ||
| 049 | |a DE-11 | ||
| 245 | 1 | 0 | |a Gettering and Defect Engineering in the Semiconductor Technology (GADEST '89) |b 3rd International Autumn Meeting, Garzau, October 8-13, 1989 ; Proceedings |c ed. by M. Kittler |
| 264 | 1 | |a Garzau |b SCI-TECH Publ. |c 1989 | |
| 300 | |a XI, 607 S. |b Ill. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 0 | 7 | |a Kristallzüchtung |0 (DE-588)4140616-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Konferenz |0 (DE-588)4032055-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Gitterbaufehler |0 (DE-588)4125030-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Halbleiterbauelement |0 (DE-588)4113826-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Getterung |0 (DE-588)4157223-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Halbleitertechnologie |0 (DE-588)4158814-9 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Halbleiterbauelement |0 (DE-588)4113826-0 |D s |
| 689 | 1 | |5 DE-604 | |
| 689 | 2 | 0 | |a Gitterbaufehler |0 (DE-588)4125030-8 |D s |
| 689 | 2 | |5 DE-604 | |
| 689 | 3 | 0 | |a Kristallzüchtung |0 (DE-588)4140616-3 |D s |
| 689 | 3 | |5 DE-604 | |
| 689 | 4 | 0 | |a Silicium |0 (DE-588)4077445-4 |D s |
| 689 | 4 | |5 DE-604 | |
| 689 | 5 | 0 | |a Getterung |0 (DE-588)4157223-3 |D s |
| 689 | 5 | |5 DE-604 | |
| 689 | 6 | 0 | |a Konferenz |0 (DE-588)4032055-8 |D s |
| 689 | 6 | |5 DE-604 | |
| 700 | 1 | |a Kittler, M. |4 edt | |
| 711 | 2 | |a GADEST |n 3 |d 1989 |c Garzau |j Sonstige |0 (DE-588)5043024-5 |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-019880433 | ||
Datensatz im Suchindex
| _version_ | 1804142298488897536 |
|---|---|
| any_adam_object | |
| author2 | Kittler, M. |
| author2_role | edt |
| author2_variant | m k mk |
| author_facet | Kittler, M. |
| building | Verbundindex |
| bvnumber | BV025242202 |
| ctrlnum | (OCoLC)635317528 (DE-599)BVBBV025242202 |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01863nam a2200517 c 4500</leader><controlfield tag="001">BV025242202</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">00000000000000.0</controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">100417s1989 a||| |||| 00||| und d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3908044049</subfield><subfield code="9">3-908044-04-9</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)635317528</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV025242202</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">und</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-11</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Gettering and Defect Engineering in the Semiconductor Technology (GADEST '89)</subfield><subfield code="b">3rd International Autumn Meeting, Garzau, October 8-13, 1989 ; Proceedings</subfield><subfield code="c">ed. by M. Kittler</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Garzau</subfield><subfield code="b">SCI-TECH Publ.</subfield><subfield code="c">1989</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XI, 607 S.</subfield><subfield code="b">Ill.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Kristallzüchtung</subfield><subfield code="0">(DE-588)4140616-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Konferenz</subfield><subfield code="0">(DE-588)4032055-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Gitterbaufehler</subfield><subfield code="0">(DE-588)4125030-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleiterbauelement</subfield><subfield code="0">(DE-588)4113826-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Getterung</subfield><subfield code="0">(DE-588)4157223-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Halbleitertechnologie</subfield><subfield code="0">(DE-588)4158814-9</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Halbleiterbauelement</subfield><subfield code="0">(DE-588)4113826-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Gitterbaufehler</subfield><subfield code="0">(DE-588)4125030-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="3" ind2="0"><subfield code="a">Kristallzüchtung</subfield><subfield code="0">(DE-588)4140616-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="3" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="4" ind2="0"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="4" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="5" ind2="0"><subfield code="a">Getterung</subfield><subfield code="0">(DE-588)4157223-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="5" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="6" ind2="0"><subfield code="a">Konferenz</subfield><subfield code="0">(DE-588)4032055-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="6" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Kittler, M.</subfield><subfield code="4">edt</subfield></datafield><datafield tag="711" ind1="2" ind2=" "><subfield code="a">GADEST</subfield><subfield code="n">3</subfield><subfield code="d">1989</subfield><subfield code="c">Garzau</subfield><subfield code="j">Sonstige</subfield><subfield code="0">(DE-588)5043024-5</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-019880433</subfield></datafield></record></collection> |
| id | DE-604.BV025242202 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:29:33Z |
| institution | BVB |
| institution_GND | (DE-588)5043024-5 |
| isbn | 3908044049 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019880433 |
| oclc_num | 635317528 |
| open_access_boolean | |
| owner | DE-11 |
| owner_facet | DE-11 |
| physical | XI, 607 S. Ill. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | SCI-TECH Publ. |
| record_format | marc |
| spelling | Gettering and Defect Engineering in the Semiconductor Technology (GADEST '89) 3rd International Autumn Meeting, Garzau, October 8-13, 1989 ; Proceedings ed. by M. Kittler Garzau SCI-TECH Publ. 1989 XI, 607 S. Ill. txt rdacontent n rdamedia nc rdacarrier Kristallzüchtung (DE-588)4140616-3 gnd rswk-swf Konferenz (DE-588)4032055-8 gnd rswk-swf Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Halbleiterbauelement (DE-588)4113826-0 gnd rswk-swf Getterung (DE-588)4157223-3 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 s DE-604 Halbleiterbauelement (DE-588)4113826-0 s Gitterbaufehler (DE-588)4125030-8 s Kristallzüchtung (DE-588)4140616-3 s Silicium (DE-588)4077445-4 s Getterung (DE-588)4157223-3 s Konferenz (DE-588)4032055-8 s Kittler, M. edt GADEST 3 1989 Garzau Sonstige (DE-588)5043024-5 oth |
| spellingShingle | Gettering and Defect Engineering in the Semiconductor Technology (GADEST '89) 3rd International Autumn Meeting, Garzau, October 8-13, 1989 ; Proceedings Kristallzüchtung (DE-588)4140616-3 gnd Konferenz (DE-588)4032055-8 gnd Gitterbaufehler (DE-588)4125030-8 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Halbleiterbauelement (DE-588)4113826-0 gnd Getterung (DE-588)4157223-3 gnd Silicium (DE-588)4077445-4 gnd |
| subject_GND | (DE-588)4140616-3 (DE-588)4032055-8 (DE-588)4125030-8 (DE-588)4158814-9 (DE-588)4113826-0 (DE-588)4157223-3 (DE-588)4077445-4 |
| title | Gettering and Defect Engineering in the Semiconductor Technology (GADEST '89) 3rd International Autumn Meeting, Garzau, October 8-13, 1989 ; Proceedings |
| title_auth | Gettering and Defect Engineering in the Semiconductor Technology (GADEST '89) 3rd International Autumn Meeting, Garzau, October 8-13, 1989 ; Proceedings |
| title_exact_search | Gettering and Defect Engineering in the Semiconductor Technology (GADEST '89) 3rd International Autumn Meeting, Garzau, October 8-13, 1989 ; Proceedings |
| title_full | Gettering and Defect Engineering in the Semiconductor Technology (GADEST '89) 3rd International Autumn Meeting, Garzau, October 8-13, 1989 ; Proceedings ed. by M. Kittler |
| title_fullStr | Gettering and Defect Engineering in the Semiconductor Technology (GADEST '89) 3rd International Autumn Meeting, Garzau, October 8-13, 1989 ; Proceedings ed. by M. Kittler |
| title_full_unstemmed | Gettering and Defect Engineering in the Semiconductor Technology (GADEST '89) 3rd International Autumn Meeting, Garzau, October 8-13, 1989 ; Proceedings ed. by M. Kittler |
| title_short | Gettering and Defect Engineering in the Semiconductor Technology (GADEST '89) |
| title_sort | gettering and defect engineering in the semiconductor technology gadest 89 3rd international autumn meeting garzau october 8 13 1989 proceedings |
| title_sub | 3rd International Autumn Meeting, Garzau, October 8-13, 1989 ; Proceedings |
| topic | Kristallzüchtung (DE-588)4140616-3 gnd Konferenz (DE-588)4032055-8 gnd Gitterbaufehler (DE-588)4125030-8 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Halbleiterbauelement (DE-588)4113826-0 gnd Getterung (DE-588)4157223-3 gnd Silicium (DE-588)4077445-4 gnd |
| topic_facet | Kristallzüchtung Konferenz Gitterbaufehler Halbleitertechnologie Halbleiterbauelement Getterung Silicium |
| work_keys_str_mv | AT kittlerm getteringanddefectengineeringinthesemiconductortechnologygadest893rdinternationalautumnmeetinggarzauoctober8131989proceedings AT gadestgarzau getteringanddefectengineeringinthesemiconductortechnologygadest893rdinternationalautumnmeetinggarzauoctober8131989proceedings |