Analytical Techniques for Semiconductor Materials and Process Characterization: Proceedings of the Satellite Symposium to ESSDERC 89 Berlin
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Pennington
Electrochemical Society
1990
|
| Schriftenreihe: | Proceedings / American Electrochemical Society
90/11 |
| Schlagworte: | |
| Beschreibung: | VIII, 364 S. |
Internformat
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| 245 | 1 | 0 | |a Analytical Techniques for Semiconductor Materials and Process Characterization |b Proceedings of the Satellite Symposium to ESSDERC 89 Berlin |c ed. by Bernd O. Kolbesen ... |
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Datensatz im Suchindex
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| physical | VIII, 364 S. |
| publishDate | 1990 |
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| series2 | Proceedings / American Electrochemical Society |
| spelling | Analytical Techniques for Semiconductor Materials and Process Characterization Proceedings of the Satellite Symposium to ESSDERC 89 Berlin ed. by Bernd O. Kolbesen ... Pennington Electrochemical Society 1990 VIII, 364 S. txt rdacontent n rdamedia nc rdacarrier Proceedings / American Electrochemical Society 90/11 Verunreinigung (DE-588)4188107-2 gnd rswk-swf Halbleitergrenzfläche (DE-588)4158802-2 gnd rswk-swf Halbleiterwerkstoff (DE-588)4158817-4 gnd rswk-swf Gitterbaufehler (DE-588)4125030-8 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf Halbleiteroberfläche (DE-588)4137418-6 gnd rswk-swf Konferenz (DE-588)4032055-8 gnd rswk-swf Halbleiter (DE-588)4022993-2 gnd rswk-swf Analytische Methode (DE-588)4142352-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Konferenz (DE-588)4032055-8 s DE-604 Halbleiter (DE-588)4022993-2 s Halbleiterwerkstoff (DE-588)4158817-4 s Halbleiteroberfläche (DE-588)4137418-6 s Halbleitergrenzfläche (DE-588)4158802-2 s Gitterbaufehler (DE-588)4125030-8 s Verunreinigung (DE-588)4188107-2 s Analytische Methode (DE-588)4142352-5 s Dünne Schicht (DE-588)4136925-7 s Kolbesen, Bernd O. edt ESSDERC 19 1989 Berlin, West Sonstige (DE-588)2107287-5 oth American Electrochemical Society Proceedings 90/11 (DE-604)BV001900941 90/11 |
| spellingShingle | Analytical Techniques for Semiconductor Materials and Process Characterization Proceedings of the Satellite Symposium to ESSDERC 89 Berlin Verunreinigung (DE-588)4188107-2 gnd Halbleitergrenzfläche (DE-588)4158802-2 gnd Halbleiterwerkstoff (DE-588)4158817-4 gnd Gitterbaufehler (DE-588)4125030-8 gnd Dünne Schicht (DE-588)4136925-7 gnd Halbleiteroberfläche (DE-588)4137418-6 gnd Konferenz (DE-588)4032055-8 gnd Halbleiter (DE-588)4022993-2 gnd Analytische Methode (DE-588)4142352-5 gnd |
| subject_GND | (DE-588)4188107-2 (DE-588)4158802-2 (DE-588)4158817-4 (DE-588)4125030-8 (DE-588)4136925-7 (DE-588)4137418-6 (DE-588)4032055-8 (DE-588)4022993-2 (DE-588)4142352-5 (DE-588)1071861417 |
| title | Analytical Techniques for Semiconductor Materials and Process Characterization Proceedings of the Satellite Symposium to ESSDERC 89 Berlin |
| title_auth | Analytical Techniques for Semiconductor Materials and Process Characterization Proceedings of the Satellite Symposium to ESSDERC 89 Berlin |
| title_exact_search | Analytical Techniques for Semiconductor Materials and Process Characterization Proceedings of the Satellite Symposium to ESSDERC 89 Berlin |
| title_full | Analytical Techniques for Semiconductor Materials and Process Characterization Proceedings of the Satellite Symposium to ESSDERC 89 Berlin ed. by Bernd O. Kolbesen ... |
| title_fullStr | Analytical Techniques for Semiconductor Materials and Process Characterization Proceedings of the Satellite Symposium to ESSDERC 89 Berlin ed. by Bernd O. Kolbesen ... |
| title_full_unstemmed | Analytical Techniques for Semiconductor Materials and Process Characterization Proceedings of the Satellite Symposium to ESSDERC 89 Berlin ed. by Bernd O. Kolbesen ... |
| title_short | Analytical Techniques for Semiconductor Materials and Process Characterization |
| title_sort | analytical techniques for semiconductor materials and process characterization proceedings of the satellite symposium to essderc 89 berlin |
| title_sub | Proceedings of the Satellite Symposium to ESSDERC 89 Berlin |
| topic | Verunreinigung (DE-588)4188107-2 gnd Halbleitergrenzfläche (DE-588)4158802-2 gnd Halbleiterwerkstoff (DE-588)4158817-4 gnd Gitterbaufehler (DE-588)4125030-8 gnd Dünne Schicht (DE-588)4136925-7 gnd Halbleiteroberfläche (DE-588)4137418-6 gnd Konferenz (DE-588)4032055-8 gnd Halbleiter (DE-588)4022993-2 gnd Analytische Methode (DE-588)4142352-5 gnd |
| topic_facet | Verunreinigung Halbleitergrenzfläche Halbleiterwerkstoff Gitterbaufehler Dünne Schicht Halbleiteroberfläche Konferenz Halbleiter Analytische Methode Konferenzschrift |
| volume_link | (DE-604)BV001900941 |
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