Science, Education and Technology Division Vacation School on Plasma and Plasma Related Etching of Semiconductor Materials: held from 1-5 September 1986 at the University of Liverpool
Gespeichert in:
| Format: | Buch |
|---|---|
| Sprache: | Undetermined |
| Veröffentlicht: |
London
IEE
1986
|
| Schlagworte: | |
| Beschreibung: | [getr. Zählung] |
Internformat
MARC
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| 245 | 1 | 0 | |a Science, Education and Technology Division Vacation School on Plasma and Plasma Related Etching of Semiconductor Materials |b held from 1-5 September 1986 at the University of Liverpool |c The Institution of Electrical Engineers |
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Datensatz im Suchindex
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| genre_facet | Konferenzschrift |
| id | DE-604.BV025241873 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T22:29:32Z |
| institution | BVB |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019880151 |
| oclc_num | 917014404 |
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| owner | DE-11 |
| owner_facet | DE-11 |
| physical | [getr. Zählung] |
| publishDate | 1986 |
| publishDateSearch | 1986 |
| publishDateSort | 1986 |
| publisher | IEE |
| record_format | marc |
| spelling | Science, Education and Technology Division Vacation School on Plasma and Plasma Related Etching of Semiconductor Materials held from 1-5 September 1986 at the University of Liverpool The Institution of Electrical Engineers London IEE 1986 [getr. Zählung] txt rdacontent n rdamedia nc rdacarrier Halbleiter (DE-588)4022993-2 gnd rswk-swf Plasmadiagnostik (DE-588)4260997-5 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Plasmaätzen (DE-588)4174821-9 gnd rswk-swf Konferenz (DE-588)4032055-8 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf Elektronik (DE-588)4014346-6 gnd rswk-swf Verbindungshalbleiter (DE-588)4062623-4 gnd rswk-swf Plasmatechnik (DE-588)4140353-8 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Konferenz (DE-588)4032055-8 s DE-604 Plasmaätzen (DE-588)4174821-9 s Plasmatechnik (DE-588)4140353-8 s Plasmadiagnostik (DE-588)4260997-5 s Verbindungshalbleiter (DE-588)4062623-4 s Elektronik (DE-588)4014346-6 s Halbleiter (DE-588)4022993-2 s Halbleitertechnologie (DE-588)4158814-9 s Sputtern (DE-588)4182614-0 s |
| spellingShingle | Science, Education and Technology Division Vacation School on Plasma and Plasma Related Etching of Semiconductor Materials held from 1-5 September 1986 at the University of Liverpool Halbleiter (DE-588)4022993-2 gnd Plasmadiagnostik (DE-588)4260997-5 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Plasmaätzen (DE-588)4174821-9 gnd Konferenz (DE-588)4032055-8 gnd Sputtern (DE-588)4182614-0 gnd Elektronik (DE-588)4014346-6 gnd Verbindungshalbleiter (DE-588)4062623-4 gnd Plasmatechnik (DE-588)4140353-8 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4260997-5 (DE-588)4158814-9 (DE-588)4174821-9 (DE-588)4032055-8 (DE-588)4182614-0 (DE-588)4014346-6 (DE-588)4062623-4 (DE-588)4140353-8 (DE-588)1071861417 |
| title | Science, Education and Technology Division Vacation School on Plasma and Plasma Related Etching of Semiconductor Materials held from 1-5 September 1986 at the University of Liverpool |
| title_auth | Science, Education and Technology Division Vacation School on Plasma and Plasma Related Etching of Semiconductor Materials held from 1-5 September 1986 at the University of Liverpool |
| title_exact_search | Science, Education and Technology Division Vacation School on Plasma and Plasma Related Etching of Semiconductor Materials held from 1-5 September 1986 at the University of Liverpool |
| title_full | Science, Education and Technology Division Vacation School on Plasma and Plasma Related Etching of Semiconductor Materials held from 1-5 September 1986 at the University of Liverpool The Institution of Electrical Engineers |
| title_fullStr | Science, Education and Technology Division Vacation School on Plasma and Plasma Related Etching of Semiconductor Materials held from 1-5 September 1986 at the University of Liverpool The Institution of Electrical Engineers |
| title_full_unstemmed | Science, Education and Technology Division Vacation School on Plasma and Plasma Related Etching of Semiconductor Materials held from 1-5 September 1986 at the University of Liverpool The Institution of Electrical Engineers |
| title_short | Science, Education and Technology Division Vacation School on Plasma and Plasma Related Etching of Semiconductor Materials |
| title_sort | science education and technology division vacation school on plasma and plasma related etching of semiconductor materials held from 1 5 september 1986 at the university of liverpool |
| title_sub | held from 1-5 September 1986 at the University of Liverpool |
| topic | Halbleiter (DE-588)4022993-2 gnd Plasmadiagnostik (DE-588)4260997-5 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Plasmaätzen (DE-588)4174821-9 gnd Konferenz (DE-588)4032055-8 gnd Sputtern (DE-588)4182614-0 gnd Elektronik (DE-588)4014346-6 gnd Verbindungshalbleiter (DE-588)4062623-4 gnd Plasmatechnik (DE-588)4140353-8 gnd |
| topic_facet | Halbleiter Plasmadiagnostik Halbleitertechnologie Plasmaätzen Konferenz Sputtern Elektronik Verbindungshalbleiter Plasmatechnik Konferenzschrift |