Gettering and defect engineering in the semiconductor technology: GADEST' 89 ; proceedings of the 3rd International Autumn Meeting ; Garzau, German Demokratic Republic October 8 - 13, 1989
Gespeichert in:
Weitere Verfasser: | |
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Format: | Tagungsbericht Buch |
Sprache: | English |
Veröffentlicht: |
Brookfield
Sci-Tech Publ
1989
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Beschreibung: | XI, 607 S. |
Internformat
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spelling | Gettering and defect engineering in the semiconductor technology GADEST' 89 ; proceedings of the 3rd International Autumn Meeting ; Garzau, German Demokratic Republic October 8 - 13, 1989 ed. by M. Kittler Brookfield Sci-Tech Publ 1989 XI, 607 S. txt rdacontent n rdamedia nc rdacarrier Kittler, M. edt GADEST 3 1989 Garzau Sonstige (DE-588)5043024-5 oth |
spellingShingle | Gettering and defect engineering in the semiconductor technology GADEST' 89 ; proceedings of the 3rd International Autumn Meeting ; Garzau, German Demokratic Republic October 8 - 13, 1989 |
title | Gettering and defect engineering in the semiconductor technology GADEST' 89 ; proceedings of the 3rd International Autumn Meeting ; Garzau, German Demokratic Republic October 8 - 13, 1989 |
title_auth | Gettering and defect engineering in the semiconductor technology GADEST' 89 ; proceedings of the 3rd International Autumn Meeting ; Garzau, German Demokratic Republic October 8 - 13, 1989 |
title_exact_search | Gettering and defect engineering in the semiconductor technology GADEST' 89 ; proceedings of the 3rd International Autumn Meeting ; Garzau, German Demokratic Republic October 8 - 13, 1989 |
title_full | Gettering and defect engineering in the semiconductor technology GADEST' 89 ; proceedings of the 3rd International Autumn Meeting ; Garzau, German Demokratic Republic October 8 - 13, 1989 ed. by M. Kittler |
title_fullStr | Gettering and defect engineering in the semiconductor technology GADEST' 89 ; proceedings of the 3rd International Autumn Meeting ; Garzau, German Demokratic Republic October 8 - 13, 1989 ed. by M. Kittler |
title_full_unstemmed | Gettering and defect engineering in the semiconductor technology GADEST' 89 ; proceedings of the 3rd International Autumn Meeting ; Garzau, German Demokratic Republic October 8 - 13, 1989 ed. by M. Kittler |
title_short | Gettering and defect engineering in the semiconductor technology |
title_sort | gettering and defect engineering in the semiconductor technology gadest 89 proceedings of the 3rd international autumn meeting garzau german demokratic republic october 8 13 1989 |
title_sub | GADEST' 89 ; proceedings of the 3rd International Autumn Meeting ; Garzau, German Demokratic Republic October 8 - 13, 1989 |
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