Introduction to microelectronic fabrication:
Saved in:
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Reading, Mass. [u. a.]
Addison-Wesley
1995
|
| Edition: | repr. with corr., 11. print. |
| Series: | Modular series on solid state devices
5 |
| Subjects: | |
| Physical Description: | XIII, 232 S. graph. Darst. |
| ISBN: | 0201146959 |
Staff View
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Record in the Search Index
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| author | Jaeger, Richard C. |
| author_facet | Jaeger, Richard C. |
| author_role | aut |
| author_sort | Jaeger, Richard C. |
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| ctrlnum | (OCoLC)916906139 (DE-599)BVBBV024978479 |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| edition | repr. with corr., 11. print. |
| format | Book |
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| genre_facet | Konferenzschrift |
| id | DE-604.BV024978479 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:24:56Z |
| institution | BVB |
| isbn | 0201146959 |
| language | English |
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| physical | XIII, 232 S. graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | Addison-Wesley |
| record_format | marc |
| series | Modular series on solid state devices |
| series2 | Modular series on solid state devices |
| spelling | Jaeger, Richard C. Verfasser aut Introduction to microelectronic fabrication Richard C. Jaeger repr. with corr., 11. print. Reading, Mass. [u. a.] Addison-Wesley 1995 XIII, 232 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Modular series on solid state devices 5 Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf Halbleitertechnologie (DE-588)4158814-9 gnd rswk-swf Mikroelektronik (DE-588)4039207-7 gnd rswk-swf 1\p (DE-588)1071861417 Konferenzschrift gnd-content Mikroelektronik (DE-588)4039207-7 s Halbleitertechnologie (DE-588)4158814-9 s 2\p DE-604 Integrierte Schaltung (DE-588)4027242-4 s 3\p DE-604 Modular series on solid state devices 5 (DE-604)BV001896679 5 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Jaeger, Richard C. Introduction to microelectronic fabrication Modular series on solid state devices Integrierte Schaltung (DE-588)4027242-4 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| subject_GND | (DE-588)4027242-4 (DE-588)4158814-9 (DE-588)4039207-7 (DE-588)1071861417 |
| title | Introduction to microelectronic fabrication |
| title_auth | Introduction to microelectronic fabrication |
| title_exact_search | Introduction to microelectronic fabrication |
| title_full | Introduction to microelectronic fabrication Richard C. Jaeger |
| title_fullStr | Introduction to microelectronic fabrication Richard C. Jaeger |
| title_full_unstemmed | Introduction to microelectronic fabrication Richard C. Jaeger |
| title_short | Introduction to microelectronic fabrication |
| title_sort | introduction to microelectronic fabrication |
| topic | Integrierte Schaltung (DE-588)4027242-4 gnd Halbleitertechnologie (DE-588)4158814-9 gnd Mikroelektronik (DE-588)4039207-7 gnd |
| topic_facet | Integrierte Schaltung Halbleitertechnologie Mikroelektronik Konferenzschrift |
| volume_link | (DE-604)BV001896679 |
| work_keys_str_mv | AT jaegerrichardc introductiontomicroelectronicfabrication |