Hesselbom, H. (1982). Some semiconductor processes and modelling with emphasis on sputtering and its applications.
Chicago-Zitierstil (17. Ausg.)Hesselbom, Hjalmar. Some Semiconductor Processes and Modelling with Emphasis on Sputtering and Its Applications. 1982.
MLA-Zitierstil (9. Ausg.)Hesselbom, Hjalmar. Some Semiconductor Processes and Modelling with Emphasis on Sputtering and Its Applications. 1982.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.