Some semiconductor processes and modelling with emphasis on sputtering and its applications:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | English |
| Veröffentlicht: |
1982
|
| Schlagworte: | |
| Beschreibung: | Ausz. |
| Beschreibung: | 16 S. |
Internformat
MARC
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| indexdate | 2024-07-09T22:23:26Z |
| institution | BVB |
| language | English |
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| spelling | Hesselbom, Hjalmar Verfasser aut Some semiconductor processes and modelling with emphasis on sputtering and its applications Hjalmar Hesselbom 1982 16 S. txt rdacontent n rdamedia nc rdacarrier Ausz. Uppsala, Univ., Diss., 1982 Halbleiter (DE-588)4022993-2 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Sputtern (DE-588)4182614-0 s Halbleiter (DE-588)4022993-2 s DE-604 |
| spellingShingle | Hesselbom, Hjalmar Some semiconductor processes and modelling with emphasis on sputtering and its applications Halbleiter (DE-588)4022993-2 gnd Sputtern (DE-588)4182614-0 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4182614-0 (DE-588)4113937-9 |
| title | Some semiconductor processes and modelling with emphasis on sputtering and its applications |
| title_auth | Some semiconductor processes and modelling with emphasis on sputtering and its applications |
| title_exact_search | Some semiconductor processes and modelling with emphasis on sputtering and its applications |
| title_full | Some semiconductor processes and modelling with emphasis on sputtering and its applications Hjalmar Hesselbom |
| title_fullStr | Some semiconductor processes and modelling with emphasis on sputtering and its applications Hjalmar Hesselbom |
| title_full_unstemmed | Some semiconductor processes and modelling with emphasis on sputtering and its applications Hjalmar Hesselbom |
| title_short | Some semiconductor processes and modelling with emphasis on sputtering and its applications |
| title_sort | some semiconductor processes and modelling with emphasis on sputtering and its applications |
| topic | Halbleiter (DE-588)4022993-2 gnd Sputtern (DE-588)4182614-0 gnd |
| topic_facet | Halbleiter Sputtern Hochschulschrift |
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