Diamond-like Carbon (DLC) Films: deposited using XeCI-excimer laser with Laser Assisted Physical Vapour Deposition (LPVD) Method
Gespeichert in:
1. Verfasser: | |
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Format: | Abschlussarbeit Buch |
Sprache: | English |
Veröffentlicht: |
1997
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Schlagworte: | |
Beschreibung: | Zsfassung in deutscher Spr. |
Beschreibung: | XXV, 146 S. Ill., graph. Darst. |
Internformat
MARC
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100 | 1 | |a Wei, Mau-Kuo |d 1965- |e Verfasser |0 (DE-588)115736212 |4 aut | |
245 | 1 | 0 | |a Diamond-like Carbon (DLC) Films |b deposited using XeCI-excimer laser with Laser Assisted Physical Vapour Deposition (LPVD) Method |c von Mau-Kuo Wei |
264 | 1 | |c 1997 | |
300 | |a XXV, 146 S. |b Ill., graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
500 | |a Zsfassung in deutscher Spr. | ||
502 | |a Erlangen-Nürnberg, Univ., Diss., 1997 | ||
650 | 0 | 7 | |a Kohlenstoff |0 (DE-588)4164538-8 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Abscheidung |0 (DE-588)4141100-6 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Excimerlaser |0 (DE-588)4153300-8 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Xenonchloridlaser |0 (DE-588)4222246-1 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Diamant |0 (DE-588)4012069-7 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a PVD-Verfahren |0 (DE-588)4115673-0 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
689 | 0 | 0 | |a Diamant |0 (DE-588)4012069-7 |D s |
689 | 0 | 1 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
689 | 0 | 2 | |a PVD-Verfahren |0 (DE-588)4115673-0 |D s |
689 | 0 | 3 | |a Xenonchloridlaser |0 (DE-588)4222246-1 |D s |
689 | 0 | |5 DE-604 | |
689 | 1 | 0 | |a Diamant |0 (DE-588)4012069-7 |D s |
689 | 1 | 1 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
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689 | 1 | |5 DE-604 | |
999 | |a oai:aleph.bib-bvb.de:BVB01-019521382 |
Datensatz im Suchindex
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any_adam_object | |
author | Wei, Mau-Kuo 1965- |
author_GND | (DE-588)115736212 |
author_facet | Wei, Mau-Kuo 1965- |
author_role | aut |
author_sort | Wei, Mau-Kuo 1965- |
author_variant | m k w mkw |
building | Verbundindex |
bvnumber | BV024844063 |
classification_rvk | UP 7550 |
ctrlnum | (OCoLC)723015962 (DE-599)BVBBV024844063 |
discipline | Physik |
format | Thesis Book |
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genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
genre_facet | Hochschulschrift |
id | DE-604.BV024844063 |
illustrated | Illustrated |
indexdate | 2024-07-09T22:22:18Z |
institution | BVB |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-019521382 |
oclc_num | 723015962 |
open_access_boolean | |
owner | DE-11 |
owner_facet | DE-11 |
physical | XXV, 146 S. Ill., graph. Darst. |
publishDate | 1997 |
publishDateSearch | 1997 |
publishDateSort | 1997 |
record_format | marc |
spelling | Wei, Mau-Kuo 1965- Verfasser (DE-588)115736212 aut Diamond-like Carbon (DLC) Films deposited using XeCI-excimer laser with Laser Assisted Physical Vapour Deposition (LPVD) Method von Mau-Kuo Wei 1997 XXV, 146 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Zsfassung in deutscher Spr. Erlangen-Nürnberg, Univ., Diss., 1997 Kohlenstoff (DE-588)4164538-8 gnd rswk-swf Abscheidung (DE-588)4141100-6 gnd rswk-swf Excimerlaser (DE-588)4153300-8 gnd rswk-swf Xenonchloridlaser (DE-588)4222246-1 gnd rswk-swf Diamant (DE-588)4012069-7 gnd rswk-swf PVD-Verfahren (DE-588)4115673-0 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Diamant (DE-588)4012069-7 s Dünne Schicht (DE-588)4136925-7 s PVD-Verfahren (DE-588)4115673-0 s Xenonchloridlaser (DE-588)4222246-1 s DE-604 Kohlenstoff (DE-588)4164538-8 s Abscheidung (DE-588)4141100-6 s Excimerlaser (DE-588)4153300-8 s |
spellingShingle | Wei, Mau-Kuo 1965- Diamond-like Carbon (DLC) Films deposited using XeCI-excimer laser with Laser Assisted Physical Vapour Deposition (LPVD) Method Kohlenstoff (DE-588)4164538-8 gnd Abscheidung (DE-588)4141100-6 gnd Excimerlaser (DE-588)4153300-8 gnd Xenonchloridlaser (DE-588)4222246-1 gnd Diamant (DE-588)4012069-7 gnd PVD-Verfahren (DE-588)4115673-0 gnd Dünne Schicht (DE-588)4136925-7 gnd |
subject_GND | (DE-588)4164538-8 (DE-588)4141100-6 (DE-588)4153300-8 (DE-588)4222246-1 (DE-588)4012069-7 (DE-588)4115673-0 (DE-588)4136925-7 (DE-588)4113937-9 |
title | Diamond-like Carbon (DLC) Films deposited using XeCI-excimer laser with Laser Assisted Physical Vapour Deposition (LPVD) Method |
title_auth | Diamond-like Carbon (DLC) Films deposited using XeCI-excimer laser with Laser Assisted Physical Vapour Deposition (LPVD) Method |
title_exact_search | Diamond-like Carbon (DLC) Films deposited using XeCI-excimer laser with Laser Assisted Physical Vapour Deposition (LPVD) Method |
title_full | Diamond-like Carbon (DLC) Films deposited using XeCI-excimer laser with Laser Assisted Physical Vapour Deposition (LPVD) Method von Mau-Kuo Wei |
title_fullStr | Diamond-like Carbon (DLC) Films deposited using XeCI-excimer laser with Laser Assisted Physical Vapour Deposition (LPVD) Method von Mau-Kuo Wei |
title_full_unstemmed | Diamond-like Carbon (DLC) Films deposited using XeCI-excimer laser with Laser Assisted Physical Vapour Deposition (LPVD) Method von Mau-Kuo Wei |
title_short | Diamond-like Carbon (DLC) Films |
title_sort | diamond like carbon dlc films deposited using xeci excimer laser with laser assisted physical vapour deposition lpvd method |
title_sub | deposited using XeCI-excimer laser with Laser Assisted Physical Vapour Deposition (LPVD) Method |
topic | Kohlenstoff (DE-588)4164538-8 gnd Abscheidung (DE-588)4141100-6 gnd Excimerlaser (DE-588)4153300-8 gnd Xenonchloridlaser (DE-588)4222246-1 gnd Diamant (DE-588)4012069-7 gnd PVD-Verfahren (DE-588)4115673-0 gnd Dünne Schicht (DE-588)4136925-7 gnd |
topic_facet | Kohlenstoff Abscheidung Excimerlaser Xenonchloridlaser Diamant PVD-Verfahren Dünne Schicht Hochschulschrift |
work_keys_str_mv | AT weimaukuo diamondlikecarbondlcfilmsdepositedusingxeciexcimerlaserwithlaserassistedphysicalvapourdepositionlpvdmethod |