Ionenimplantation in der Halbleitertechnik:
Gespeichert in:
| Hauptverfasser: | , |
|---|---|
| Format: | Buch |
| Sprache: | German |
| Veröffentlicht: |
München
Hanser
1981
|
| Schlagworte: | |
| Beschreibung: | 265 S. Ill. |
| ISBN: | 3446125531 |
Internformat
MARC
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| 084 | |a UP 3000 |0 (DE-625)146369: |2 rvk | ||
| 100 | 1 | |a Carter, George |e Verfasser |4 aut | |
| 240 | 1 | 0 | |a Ion implantation of semiconductors |
| 245 | 1 | 0 | |a Ionenimplantation in der Halbleitertechnik |c G. Carter ; W. A. Grant |
| 264 | 1 | |a München |b Hanser |c 1981 | |
| 300 | |a 265 S. |b Ill. | ||
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| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ionenimplantation |0 (DE-588)4027606-5 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | 1 | |a Ionenimplantation |0 (DE-588)4027606-5 |D s |
| 689 | 0 | |5 DE-604 | |
| 700 | 1 | |a Grant, William A. |e Verfasser |4 aut | |
| 940 | 1 | |q TUB-nve | |
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Datensatz im Suchindex
| _version_ | 1804140065786429440 |
|---|---|
| any_adam_object | |
| author | Carter, George Grant, William A. |
| author_facet | Carter, George Grant, William A. |
| author_role | aut aut |
| author_sort | Carter, George |
| author_variant | g c gc w a g wa wag |
| building | Verbundindex |
| bvnumber | BV024651767 |
| classification_rvk | UP 3000 |
| ctrlnum | (OCoLC)163447342 (DE-599)BVBBV024651767 |
| discipline | Physik |
| format | Book |
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| id | DE-604.BV024651767 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:54:03Z |
| institution | BVB |
| isbn | 3446125531 |
| language | German |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018063322 |
| oclc_num | 163447342 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | 265 S. Ill. |
| psigel | TUB-nve |
| publishDate | 1981 |
| publishDateSearch | 1981 |
| publishDateSort | 1981 |
| publisher | Hanser |
| record_format | marc |
| spelling | Carter, George Verfasser aut Ion implantation of semiconductors Ionenimplantation in der Halbleitertechnik G. Carter ; W. A. Grant München Hanser 1981 265 S. Ill. txt rdacontent n rdamedia nc rdacarrier Halbleiter (DE-588)4022993-2 gnd rswk-swf Ionenimplantation (DE-588)4027606-5 gnd rswk-swf Halbleiter (DE-588)4022993-2 s Ionenimplantation (DE-588)4027606-5 s DE-604 Grant, William A. Verfasser aut |
| spellingShingle | Carter, George Grant, William A. Ionenimplantation in der Halbleitertechnik Halbleiter (DE-588)4022993-2 gnd Ionenimplantation (DE-588)4027606-5 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4027606-5 |
| title | Ionenimplantation in der Halbleitertechnik |
| title_alt | Ion implantation of semiconductors |
| title_auth | Ionenimplantation in der Halbleitertechnik |
| title_exact_search | Ionenimplantation in der Halbleitertechnik |
| title_full | Ionenimplantation in der Halbleitertechnik G. Carter ; W. A. Grant |
| title_fullStr | Ionenimplantation in der Halbleitertechnik G. Carter ; W. A. Grant |
| title_full_unstemmed | Ionenimplantation in der Halbleitertechnik G. Carter ; W. A. Grant |
| title_short | Ionenimplantation in der Halbleitertechnik |
| title_sort | ionenimplantation in der halbleitertechnik |
| topic | Halbleiter (DE-588)4022993-2 gnd Ionenimplantation (DE-588)4027606-5 gnd |
| topic_facet | Halbleiter Ionenimplantation |
| work_keys_str_mv | AT cartergeorge ionimplantationofsemiconductors AT grantwilliama ionimplantationofsemiconductors AT cartergeorge ionenimplantationinderhalbleitertechnik AT grantwilliama ionenimplantationinderhalbleitertechnik |