Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon:
Saved in:
| Main Author: | |
|---|---|
| Format: | Thesis Book |
| Language: | English |
| Published: |
Berlin
Mensch-&-Buch-Verl.
2005
|
| Series: | Physics
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| Subjects: | |
| Physical Description: | 101 S. graph. Darst. |
| ISBN: | 3898209067 |
Staff View
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| author | Gensch, Michael |
| author_facet | Gensch, Michael |
| author_role | aut |
| author_sort | Gensch, Michael |
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| discipline | Physik |
| format | Thesis Book |
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| genre_facet | Hochschulschrift |
| id | DE-604.BV024606686 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:02:54Z |
| institution | BVB |
| isbn | 3898209067 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018579621 |
| oclc_num | 76782491 |
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| owner | DE-83 |
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| physical | 101 S. graph. Darst. |
| publishDate | 2005 |
| publishDateSearch | 2005 |
| publishDateSort | 2005 |
| publisher | Mensch-&-Buch-Verl. |
| record_format | marc |
| series2 | Physics |
| spelling | Gensch, Michael Verfasser aut Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon vorgelegt von Michael Gensch Berlin Mensch-&-Buch-Verl. 2005 101 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Physics Zugl.: Berlin, Techn. Univ., Diss., 2004 Organische Verbindungen (DE-588)4043816-8 gnd rswk-swf Halbleitergrenzfläche (DE-588)4158802-2 gnd rswk-swf Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Silicium (DE-588)4077445-4 s Halbleitergrenzfläche (DE-588)4158802-2 s Organische Verbindungen (DE-588)4043816-8 s Dünne Schicht (DE-588)4136925-7 s Ellipsometrie (DE-588)4152025-7 s DE-604 |
| spellingShingle | Gensch, Michael Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon Organische Verbindungen (DE-588)4043816-8 gnd Halbleitergrenzfläche (DE-588)4158802-2 gnd Ellipsometrie (DE-588)4152025-7 gnd Silicium (DE-588)4077445-4 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| subject_GND | (DE-588)4043816-8 (DE-588)4158802-2 (DE-588)4152025-7 (DE-588)4077445-4 (DE-588)4136925-7 (DE-588)4113937-9 |
| title | Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon |
| title_auth | Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon |
| title_exact_search | Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon |
| title_full | Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon vorgelegt von Michael Gensch |
| title_fullStr | Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon vorgelegt von Michael Gensch |
| title_full_unstemmed | Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon vorgelegt von Michael Gensch |
| title_short | Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon |
| title_sort | infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon |
| topic | Organische Verbindungen (DE-588)4043816-8 gnd Halbleitergrenzfläche (DE-588)4158802-2 gnd Ellipsometrie (DE-588)4152025-7 gnd Silicium (DE-588)4077445-4 gnd Dünne Schicht (DE-588)4136925-7 gnd |
| topic_facet | Organische Verbindungen Halbleitergrenzfläche Ellipsometrie Silicium Dünne Schicht Hochschulschrift |
| work_keys_str_mv | AT genschmichael infraredellipsometryfortheinvestigationofinterfaciallayersandthinorganicfilmsonsilicon |