Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon:
Gespeichert in:
1. Verfasser: | |
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Format: | Abschlussarbeit Buch |
Sprache: | English |
Veröffentlicht: |
Berlin
Mensch-&-Buch-Verl.
2005
|
Schriftenreihe: | Physics
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Schlagworte: | |
Beschreibung: | 101 S. graph. Darst. |
ISBN: | 3898209067 |
Internformat
MARC
LEADER | 00000nam a2200000 c 4500 | ||
---|---|---|---|
001 | BV024606686 | ||
003 | DE-604 | ||
005 | 20170519 | ||
007 | t | ||
008 | 090924s2005 d||| m||| 00||| eng d | ||
015 | |a 05,N36,0583 |2 dnb | ||
015 | |a 05,A39,0749 |2 dnb | ||
020 | |a 3898209067 |9 3-89820-906-7 | ||
035 | |a (OCoLC)76782491 | ||
035 | |a (DE-599)BVBBV024606686 | ||
040 | |a DE-604 |b ger |e rakwb | ||
041 | 0 | |a eng | |
049 | |a DE-83 | ||
084 | |a 530 |2 sdnb | ||
100 | 1 | |a Gensch, Michael |e Verfasser |4 aut | |
245 | 1 | 0 | |a Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon |c vorgelegt von Michael Gensch |
264 | 1 | |a Berlin |b Mensch-&-Buch-Verl. |c 2005 | |
300 | |a 101 S. |b graph. Darst. | ||
336 | |b txt |2 rdacontent | ||
337 | |b n |2 rdamedia | ||
338 | |b nc |2 rdacarrier | ||
490 | 0 | |a Physics | |
502 | |a Zugl.: Berlin, Techn. Univ., Diss., 2004 | ||
650 | 0 | 7 | |a Organische Verbindungen |0 (DE-588)4043816-8 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Halbleitergrenzfläche |0 (DE-588)4158802-2 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Ellipsometrie |0 (DE-588)4152025-7 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Silicium |0 (DE-588)4077445-4 |2 gnd |9 rswk-swf |
650 | 0 | 7 | |a Dünne Schicht |0 (DE-588)4136925-7 |2 gnd |9 rswk-swf |
655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
689 | 0 | 0 | |a Silicium |0 (DE-588)4077445-4 |D s |
689 | 0 | 1 | |a Halbleitergrenzfläche |0 (DE-588)4158802-2 |D s |
689 | 0 | 2 | |a Organische Verbindungen |0 (DE-588)4043816-8 |D s |
689 | 0 | 3 | |a Dünne Schicht |0 (DE-588)4136925-7 |D s |
689 | 0 | 4 | |a Ellipsometrie |0 (DE-588)4152025-7 |D s |
689 | 0 | |5 DE-604 | |
999 | |a oai:aleph.bib-bvb.de:BVB01-018579621 |
Datensatz im Suchindex
_version_ | 1804140622442921984 |
---|---|
any_adam_object | |
author | Gensch, Michael |
author_facet | Gensch, Michael |
author_role | aut |
author_sort | Gensch, Michael |
author_variant | m g mg |
building | Verbundindex |
bvnumber | BV024606686 |
ctrlnum | (OCoLC)76782491 (DE-599)BVBBV024606686 |
discipline | Physik |
format | Thesis Book |
fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01652nam a2200457 c 4500</leader><controlfield tag="001">BV024606686</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20170519 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">090924s2005 d||| m||| 00||| eng d</controlfield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">05,N36,0583</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="015" ind1=" " ind2=" "><subfield code="a">05,A39,0749</subfield><subfield code="2">dnb</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">3898209067</subfield><subfield code="9">3-89820-906-7</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)76782491</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV024606686</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-83</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">530</subfield><subfield code="2">sdnb</subfield></datafield><datafield tag="100" ind1="1" ind2=" "><subfield code="a">Gensch, Michael</subfield><subfield code="e">Verfasser</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon</subfield><subfield code="c">vorgelegt von Michael Gensch</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Berlin</subfield><subfield code="b">Mensch-&-Buch-Verl.</subfield><subfield code="c">2005</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">101 S.</subfield><subfield code="b">graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="0" ind2=" "><subfield code="a">Physics</subfield></datafield><datafield tag="502" ind1=" " ind2=" "><subfield code="a">Zugl.: Berlin, Techn. Univ., Diss., 2004</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Organische Verbindungen</subfield><subfield code="0">(DE-588)4043816-8</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Halbleitergrenzfläche</subfield><subfield code="0">(DE-588)4158802-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ellipsometrie</subfield><subfield code="0">(DE-588)4152025-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)4113937-9</subfield><subfield code="a">Hochschulschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Silicium</subfield><subfield code="0">(DE-588)4077445-4</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="1"><subfield code="a">Halbleitergrenzfläche</subfield><subfield code="0">(DE-588)4158802-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="2"><subfield code="a">Organische Verbindungen</subfield><subfield code="0">(DE-588)4043816-8</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="3"><subfield code="a">Dünne Schicht</subfield><subfield code="0">(DE-588)4136925-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2="4"><subfield code="a">Ellipsometrie</subfield><subfield code="0">(DE-588)4152025-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-018579621</subfield></datafield></record></collection> |
genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
genre_facet | Hochschulschrift |
id | DE-604.BV024606686 |
illustrated | Illustrated |
indexdate | 2024-07-09T22:02:54Z |
institution | BVB |
isbn | 3898209067 |
language | English |
oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018579621 |
oclc_num | 76782491 |
open_access_boolean | |
owner | DE-83 |
owner_facet | DE-83 |
physical | 101 S. graph. Darst. |
publishDate | 2005 |
publishDateSearch | 2005 |
publishDateSort | 2005 |
publisher | Mensch-&-Buch-Verl. |
record_format | marc |
series2 | Physics |
spelling | Gensch, Michael Verfasser aut Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon vorgelegt von Michael Gensch Berlin Mensch-&-Buch-Verl. 2005 101 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Physics Zugl.: Berlin, Techn. Univ., Diss., 2004 Organische Verbindungen (DE-588)4043816-8 gnd rswk-swf Halbleitergrenzfläche (DE-588)4158802-2 gnd rswk-swf Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Silicium (DE-588)4077445-4 gnd rswk-swf Dünne Schicht (DE-588)4136925-7 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Silicium (DE-588)4077445-4 s Halbleitergrenzfläche (DE-588)4158802-2 s Organische Verbindungen (DE-588)4043816-8 s Dünne Schicht (DE-588)4136925-7 s Ellipsometrie (DE-588)4152025-7 s DE-604 |
spellingShingle | Gensch, Michael Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon Organische Verbindungen (DE-588)4043816-8 gnd Halbleitergrenzfläche (DE-588)4158802-2 gnd Ellipsometrie (DE-588)4152025-7 gnd Silicium (DE-588)4077445-4 gnd Dünne Schicht (DE-588)4136925-7 gnd |
subject_GND | (DE-588)4043816-8 (DE-588)4158802-2 (DE-588)4152025-7 (DE-588)4077445-4 (DE-588)4136925-7 (DE-588)4113937-9 |
title | Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon |
title_auth | Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon |
title_exact_search | Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon |
title_full | Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon vorgelegt von Michael Gensch |
title_fullStr | Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon vorgelegt von Michael Gensch |
title_full_unstemmed | Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon vorgelegt von Michael Gensch |
title_short | Infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon |
title_sort | infrared ellipsometry for the investigation of interfacial layers and thin organic films on silicon |
topic | Organische Verbindungen (DE-588)4043816-8 gnd Halbleitergrenzfläche (DE-588)4158802-2 gnd Ellipsometrie (DE-588)4152025-7 gnd Silicium (DE-588)4077445-4 gnd Dünne Schicht (DE-588)4136925-7 gnd |
topic_facet | Organische Verbindungen Halbleitergrenzfläche Ellipsometrie Silicium Dünne Schicht Hochschulschrift |
work_keys_str_mv | AT genschmichael infraredellipsometryfortheinvestigationofinterfaciallayersandthinorganicfilmsonsilicon |