Physical sputtering of elemental metals and semiconductors:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Jülich
Zentralbibliothek der Kernforschungsanlage
1985
|
| Ausgabe: | Als Ms. gedr. |
| Schlagworte: | |
| Beschreibung: | 24 S. graph. Darst. |
Internformat
MARC
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| 007 | t | ||
| 008 | 090924s1985 d||| t||| 00||| eng d | ||
| 015 | |a 86,B19,0227 |2 dnb | ||
| 035 | |a (OCoLC)256272146 | ||
| 035 | |a (DE-599)BVBBV024515338 | ||
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| 041 | 0 | |a eng | |
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| 088 | |a Jül 2028 | ||
| 100 | 1 | |a Hofer, Wolfgang O. |d 1941- |e Verfasser |0 (DE-588)129690635 |4 aut | |
| 245 | 1 | 0 | |a Physical sputtering of elemental metals and semiconductors |c Wolfgang O. Hofer |
| 250 | |a Als Ms. gedr. | ||
| 264 | 1 | |a Jülich |b Zentralbibliothek der Kernforschungsanlage |c 1985 | |
| 300 | |a 24 S. |b graph. Darst. | ||
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| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 650 | 0 | 7 | |a Halbleiter |0 (DE-588)4022993-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Metall |0 (DE-588)4038860-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Sputtern |0 (DE-588)4182614-0 |2 gnd |9 rswk-swf |
| 689 | 0 | 0 | |a Sputtern |0 (DE-588)4182614-0 |D s |
| 689 | 0 | 1 | |a Halbleiter |0 (DE-588)4022993-2 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Sputtern |0 (DE-588)4182614-0 |D s |
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| 689 | 1 | |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-018489461 | ||
Datensatz im Suchindex
| _version_ | 1804140516393091072 |
|---|---|
| any_adam_object | |
| author | Hofer, Wolfgang O. 1941- |
| author_GND | (DE-588)129690635 |
| author_facet | Hofer, Wolfgang O. 1941- |
| author_role | aut |
| author_sort | Hofer, Wolfgang O. 1941- |
| author_variant | w o h wo woh |
| building | Verbundindex |
| bvnumber | BV024515338 |
| ctrlnum | (OCoLC)256272146 (DE-599)BVBBV024515338 |
| edition | Als Ms. gedr. |
| format | Book |
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| id | DE-604.BV024515338 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:01:13Z |
| institution | BVB |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018489461 |
| oclc_num | 256272146 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | 24 S. graph. Darst. |
| publishDate | 1985 |
| publishDateSearch | 1985 |
| publishDateSort | 1985 |
| publisher | Zentralbibliothek der Kernforschungsanlage |
| record_format | marc |
| spelling | Hofer, Wolfgang O. 1941- Verfasser (DE-588)129690635 aut Physical sputtering of elemental metals and semiconductors Wolfgang O. Hofer Als Ms. gedr. Jülich Zentralbibliothek der Kernforschungsanlage 1985 24 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Halbleiter (DE-588)4022993-2 gnd rswk-swf Metall (DE-588)4038860-8 gnd rswk-swf Sputtern (DE-588)4182614-0 gnd rswk-swf Sputtern (DE-588)4182614-0 s Halbleiter (DE-588)4022993-2 s DE-604 Metall (DE-588)4038860-8 s |
| spellingShingle | Hofer, Wolfgang O. 1941- Physical sputtering of elemental metals and semiconductors Halbleiter (DE-588)4022993-2 gnd Metall (DE-588)4038860-8 gnd Sputtern (DE-588)4182614-0 gnd |
| subject_GND | (DE-588)4022993-2 (DE-588)4038860-8 (DE-588)4182614-0 |
| title | Physical sputtering of elemental metals and semiconductors |
| title_auth | Physical sputtering of elemental metals and semiconductors |
| title_exact_search | Physical sputtering of elemental metals and semiconductors |
| title_full | Physical sputtering of elemental metals and semiconductors Wolfgang O. Hofer |
| title_fullStr | Physical sputtering of elemental metals and semiconductors Wolfgang O. Hofer |
| title_full_unstemmed | Physical sputtering of elemental metals and semiconductors Wolfgang O. Hofer |
| title_short | Physical sputtering of elemental metals and semiconductors |
| title_sort | physical sputtering of elemental metals and semiconductors |
| topic | Halbleiter (DE-588)4022993-2 gnd Metall (DE-588)4038860-8 gnd Sputtern (DE-588)4182614-0 gnd |
| topic_facet | Halbleiter Metall Sputtern |
| work_keys_str_mv | AT hoferwolfgango physicalsputteringofelementalmetalsandsemiconductors |