Advances in chemical mechanical polishing: symposium held April 13 - 15, 2004, San Francisco, California, USA
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Warrendale, Pa.
Materials Research Soc.
2004
|
| Schriftenreihe: | Materials Research Society symposium proceedings
816 |
| Schlagworte: | |
| Beschreibung: | XI, 292 S. Ill., graph. Darst. |
| ISBN: | 1558997660 |
Internformat
MARC
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| 020 | |a 1558997660 |9 1-55899-766-0 | ||
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| 245 | 1 | 0 | |a Advances in chemical mechanical polishing |b symposium held April 13 - 15, 2004, San Francisco, California, USA |c ed.: Duane S. Boning ... |
| 264 | 1 | |a Warrendale, Pa. |b Materials Research Soc. |c 2004 | |
| 300 | |a XI, 292 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Materials Research Society symposium proceedings |v 816 | |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 700 | 1 | |a Boning, Duane S. |4 edt | |
| 830 | 0 | |a Materials Research Society symposium proceedings |v 816 |w (DE-604)BV001899105 |9 816 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-018488910 | ||
Datensatz im Suchindex
| _version_ | 1804140515566813184 |
|---|---|
| any_adam_object | |
| author2 | Boning, Duane S. |
| author2_role | edt |
| author2_variant | d s b ds dsb |
| author_facet | Boning, Duane S. |
| building | Verbundindex |
| bvnumber | BV024514768 |
| classification_rvk | UD 8400 |
| ctrlnum | (OCoLC)253877146 (DE-599)BVBBV024514768 |
| dewey-full | 671.72 |
| dewey-hundreds | 600 - Technology (Applied sciences) |
| dewey-ones | 671 - Metalworking & primary metal products |
| dewey-raw | 671.72 |
| dewey-search | 671.72 |
| dewey-sort | 3671.72 |
| dewey-tens | 670 - Manufacturing |
| discipline | Physik Werkstoffwissenschaften / Fertigungstechnik |
| format | Book |
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| genre_facet | Konferenzschrift |
| id | DE-604.BV024514768 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:01:12Z |
| institution | BVB |
| isbn | 1558997660 |
| language | English |
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| physical | XI, 292 S. Ill., graph. Darst. |
| publishDate | 2004 |
| publishDateSearch | 2004 |
| publishDateSort | 2004 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society symposium proceedings |
| series2 | Materials Research Society symposium proceedings |
| spelling | Advances in chemical mechanical polishing symposium held April 13 - 15, 2004, San Francisco, California, USA ed.: Duane S. Boning ... Warrendale, Pa. Materials Research Soc. 2004 XI, 292 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposium proceedings 816 (DE-588)1071861417 Konferenzschrift gnd-content Boning, Duane S. edt Materials Research Society symposium proceedings 816 (DE-604)BV001899105 816 |
| spellingShingle | Advances in chemical mechanical polishing symposium held April 13 - 15, 2004, San Francisco, California, USA Materials Research Society symposium proceedings |
| subject_GND | (DE-588)1071861417 |
| title | Advances in chemical mechanical polishing symposium held April 13 - 15, 2004, San Francisco, California, USA |
| title_auth | Advances in chemical mechanical polishing symposium held April 13 - 15, 2004, San Francisco, California, USA |
| title_exact_search | Advances in chemical mechanical polishing symposium held April 13 - 15, 2004, San Francisco, California, USA |
| title_full | Advances in chemical mechanical polishing symposium held April 13 - 15, 2004, San Francisco, California, USA ed.: Duane S. Boning ... |
| title_fullStr | Advances in chemical mechanical polishing symposium held April 13 - 15, 2004, San Francisco, California, USA ed.: Duane S. Boning ... |
| title_full_unstemmed | Advances in chemical mechanical polishing symposium held April 13 - 15, 2004, San Francisco, California, USA ed.: Duane S. Boning ... |
| title_short | Advances in chemical mechanical polishing |
| title_sort | advances in chemical mechanical polishing symposium held april 13 15 2004 san francisco california usa |
| title_sub | symposium held April 13 - 15, 2004, San Francisco, California, USA |
| topic_facet | Konferenzschrift |
| volume_link | (DE-604)BV001899105 |
| work_keys_str_mv | AT boningduanes advancesinchemicalmechanicalpolishingsymposiumheldapril13152004sanfranciscocaliforniausa |