Symposium: held November 25 - 28, 2001, Boston, Massachusetts, USA
Gespeichert in:
| Körperschaft: | |
|---|---|
| Weitere Verfasser: | |
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Warrendale, Pa.
Materials Research Soc.
2002
|
| Schriftenreihe: | Materials Research Society symposium proceedings
687 : Materials science of microelectromechanical systems (MEMS) devices ; 4 Materials Research Society symposium proceedings 687 |
| Schlagworte: | |
| Beschreibung: | XI, 318 S. Ill., graph. Darst. |
| ISBN: | 1558996230 |
Internformat
MARC
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| 490 | 1 | |a Materials Research Society symposium proceedings |v 687 | |
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Datensatz im Suchindex
| _version_ | 1804140493559300096 |
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| author2 | Ayón, Arturo A. |
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| author_corporate | Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices Boston, Mass |
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| author_facet | Ayón, Arturo A. Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices Boston, Mass |
| author_sort | Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices Boston, Mass |
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| discipline | Physik |
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| id | DE-604.BV024498180 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:00:51Z |
| institution | BVB |
| institution_GND | (DE-588)10061373-1 |
| isbn | 1558996230 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018473030 |
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| physical | XI, 318 S. Ill., graph. Darst. |
| publishDate | 2002 |
| publishDateSearch | 2002 |
| publishDateSort | 2002 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society symposium proceedings |
| series2 | Materials Research Society symposium proceedings |
| spelling | Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices 4 2001 Boston, Mass. Verfasser (DE-588)10061373-1 aut Symposium held November 25 - 28, 2001, Boston, Massachusetts, USA [Symposium "Materials Science of Microelectromechanical Systems (MEMS) Devices IV"] ; ed.: Arturo A. Ayón ... Warrendale, Pa. Materials Research Soc. 2002 XI, 318 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposium proceedings 687 : Materials science of microelectromechanical systems (MEMS) devices 4 Materials Research Society symposium proceedings 687 (DE-588)1071861417 Konferenzschrift gnd-content Ayón, Arturo A. edt Materials Research Society symposium proceedings 687 : Materials science of microelectromechanical systems (MEMS) devices ; 4 (DE-604)BV024483297 4 Materials Research Society symposium proceedings 687 (DE-604)BV001899105 687 |
| spellingShingle | Symposium held November 25 - 28, 2001, Boston, Massachusetts, USA Materials Research Society symposium proceedings |
| subject_GND | (DE-588)1071861417 |
| title | Symposium held November 25 - 28, 2001, Boston, Massachusetts, USA |
| title_auth | Symposium held November 25 - 28, 2001, Boston, Massachusetts, USA |
| title_exact_search | Symposium held November 25 - 28, 2001, Boston, Massachusetts, USA |
| title_full | Symposium held November 25 - 28, 2001, Boston, Massachusetts, USA [Symposium "Materials Science of Microelectromechanical Systems (MEMS) Devices IV"] ; ed.: Arturo A. Ayón ... |
| title_fullStr | Symposium held November 25 - 28, 2001, Boston, Massachusetts, USA [Symposium "Materials Science of Microelectromechanical Systems (MEMS) Devices IV"] ; ed.: Arturo A. Ayón ... |
| title_full_unstemmed | Symposium held November 25 - 28, 2001, Boston, Massachusetts, USA [Symposium "Materials Science of Microelectromechanical Systems (MEMS) Devices IV"] ; ed.: Arturo A. Ayón ... |
| title_short | Symposium |
| title_sort | symposium held november 25 28 2001 boston massachusetts usa |
| title_sub | held November 25 - 28, 2001, Boston, Massachusetts, USA |
| topic_facet | Konferenzschrift |
| volume_link | (DE-604)BV024483297 (DE-604)BV001899105 |
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