Symposium: held April 17 - 19, 2001, San Francisco, California, USA
Gespeichert in:
| Körperschaft: | |
|---|---|
| Weitere Verfasser: | |
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Warrendale, Pa.
Material Research Soc.
2002
|
| Schriftenreihe: | Materials Research Society symposium proceedings
670 : Gate stack and silicide issues in silicon processing ; 2 Materials Research Society symposium proceedings 670 |
| Schlagworte: | |
| Beschreibung: | Getr. Zählung Ill., graph. Darst. |
| ISBN: | 1558996060 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV024495990 | ||
| 003 | DE-604 | ||
| 005 | 20090910 | ||
| 007 | t | ||
| 008 | 090924s2002 ad|| |||| 10||| eng d | ||
| 020 | |a 1558996060 |9 1-55899-606-0 | ||
| 035 | |a (OCoLC)916611074 | ||
| 035 | |a (DE-599)BVBBV024495990 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-83 | ||
| 084 | |a UD 8400 |0 (DE-625)145545: |2 rvk | ||
| 111 | 2 | |a Three-Day Symposium Gate Stack and Silicide Issues in Silicon Processing |n 2 |d 2001 |c San Francisco, Calif. |j Verfasser |0 (DE-588)10058536-X |4 aut | |
| 245 | 1 | 0 | |a Symposium |b held April 17 - 19, 2001, San Francisco, California, USA |c [Three-Day Symposium "Gate Stack and Silicide Issues in Silicon Processing II" ; ed.: S. A. Campbell ... |
| 264 | 1 | |a Warrendale, Pa. |b Material Research Soc. |c 2002 | |
| 300 | |a Getr. Zählung |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Materials Research Society symposium proceedings |v 670 : Gate stack and silicide issues in silicon processing |v 2 | |
| 490 | 1 | |a Materials Research Society symposium proceedings |v 670 | |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 700 | 1 | |a Campbell, Stephen A. |4 edt | |
| 830 | 0 | |a Materials Research Society symposium proceedings |v 670 : Gate stack and silicide issues in silicon processing ; 2 |w (DE-604)BV024495989 |9 2 | |
| 830 | 0 | |a Materials Research Society symposium proceedings |v 670 |w (DE-604)BV001899105 |9 670 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-018470933 | ||
Datensatz im Suchindex
| _version_ | 1804140490662084608 |
|---|---|
| any_adam_object | |
| author2 | Campbell, Stephen A. |
| author2_role | edt |
| author2_variant | s a c sa sac |
| author_corporate | Three-Day Symposium Gate Stack and Silicide Issues in Silicon Processing San Francisco, Calif |
| author_corporate_role | aut |
| author_facet | Campbell, Stephen A. Three-Day Symposium Gate Stack and Silicide Issues in Silicon Processing San Francisco, Calif |
| author_sort | Three-Day Symposium Gate Stack and Silicide Issues in Silicon Processing San Francisco, Calif |
| building | Verbundindex |
| bvnumber | BV024495990 |
| classification_rvk | UD 8400 |
| ctrlnum | (OCoLC)916611074 (DE-599)BVBBV024495990 |
| discipline | Physik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01562nam a2200337 cb4500</leader><controlfield tag="001">BV024495990</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20090910 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">090924s2002 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1558996060</subfield><subfield code="9">1-55899-606-0</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)916611074</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV024495990</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-83</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UD 8400</subfield><subfield code="0">(DE-625)145545:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">Three-Day Symposium Gate Stack and Silicide Issues in Silicon Processing</subfield><subfield code="n">2</subfield><subfield code="d">2001</subfield><subfield code="c">San Francisco, Calif.</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)10058536-X</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Symposium</subfield><subfield code="b">held April 17 - 19, 2001, San Francisco, California, USA</subfield><subfield code="c">[Three-Day Symposium "Gate Stack and Silicide Issues in Silicon Processing II" ; ed.: S. A. Campbell ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Warrendale, Pa.</subfield><subfield code="b">Material Research Soc.</subfield><subfield code="c">2002</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">Getr. Zählung</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Materials Research Society symposium proceedings</subfield><subfield code="v">670 : Gate stack and silicide issues in silicon processing</subfield><subfield code="v">2</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Materials Research Society symposium proceedings</subfield><subfield code="v">670</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Campbell, Stephen A.</subfield><subfield code="4">edt</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Materials Research Society symposium proceedings</subfield><subfield code="v">670 : Gate stack and silicide issues in silicon processing ; 2</subfield><subfield code="w">(DE-604)BV024495989</subfield><subfield code="9">2</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Materials Research Society symposium proceedings</subfield><subfield code="v">670</subfield><subfield code="w">(DE-604)BV001899105</subfield><subfield code="9">670</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-018470933</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV024495990 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:00:49Z |
| institution | BVB |
| institution_GND | (DE-588)10058536-X |
| isbn | 1558996060 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018470933 |
| oclc_num | 916611074 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | Getr. Zählung Ill., graph. Darst. |
| publishDate | 2002 |
| publishDateSearch | 2002 |
| publishDateSort | 2002 |
| publisher | Material Research Soc. |
| record_format | marc |
| series | Materials Research Society symposium proceedings |
| series2 | Materials Research Society symposium proceedings |
| spelling | Three-Day Symposium Gate Stack and Silicide Issues in Silicon Processing 2 2001 San Francisco, Calif. Verfasser (DE-588)10058536-X aut Symposium held April 17 - 19, 2001, San Francisco, California, USA [Three-Day Symposium "Gate Stack and Silicide Issues in Silicon Processing II" ; ed.: S. A. Campbell ... Warrendale, Pa. Material Research Soc. 2002 Getr. Zählung Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposium proceedings 670 : Gate stack and silicide issues in silicon processing 2 Materials Research Society symposium proceedings 670 (DE-588)1071861417 Konferenzschrift gnd-content Campbell, Stephen A. edt Materials Research Society symposium proceedings 670 : Gate stack and silicide issues in silicon processing ; 2 (DE-604)BV024495989 2 Materials Research Society symposium proceedings 670 (DE-604)BV001899105 670 |
| spellingShingle | Symposium held April 17 - 19, 2001, San Francisco, California, USA Materials Research Society symposium proceedings |
| subject_GND | (DE-588)1071861417 |
| title | Symposium held April 17 - 19, 2001, San Francisco, California, USA |
| title_auth | Symposium held April 17 - 19, 2001, San Francisco, California, USA |
| title_exact_search | Symposium held April 17 - 19, 2001, San Francisco, California, USA |
| title_full | Symposium held April 17 - 19, 2001, San Francisco, California, USA [Three-Day Symposium "Gate Stack and Silicide Issues in Silicon Processing II" ; ed.: S. A. Campbell ... |
| title_fullStr | Symposium held April 17 - 19, 2001, San Francisco, California, USA [Three-Day Symposium "Gate Stack and Silicide Issues in Silicon Processing II" ; ed.: S. A. Campbell ... |
| title_full_unstemmed | Symposium held April 17 - 19, 2001, San Francisco, California, USA [Three-Day Symposium "Gate Stack and Silicide Issues in Silicon Processing II" ; ed.: S. A. Campbell ... |
| title_short | Symposium |
| title_sort | symposium held april 17 19 2001 san francisco california usa |
| title_sub | held April 17 - 19, 2001, San Francisco, California, USA |
| topic_facet | Konferenzschrift |
| volume_link | (DE-604)BV024495989 (DE-604)BV001899105 |
| work_keys_str_mv | AT threedaysymposiumgatestackandsilicideissuesinsiliconprocessingsanfranciscocalif symposiumheldapril17192001sanfranciscocaliforniausa AT campbellstephena symposiumheldapril17192001sanfranciscocaliforniausa |