Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices Boston, Mass. (2001). Symposium: Held November 27 - 28, 2000, Boston, Massachusetts, USA. Materials Research Soc.
Chicago-Zitierstil (17. Ausg.)Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices Boston, Mass. Symposium: Held November 27 - 28, 2000, Boston, Massachusetts, USA. Warrendale, Pa: Materials Research Soc, 2001.
MLA-Zitierstil (9. Ausg.)Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices Boston, Mass. Symposium: Held November 27 - 28, 2000, Boston, Massachusetts, USA. Materials Research Soc, 2001.
Achtung: Diese Zitate sind unter Umständen nicht zu 100% korrekt.