Symposium: held November 27 - 28, 2000, Boston, Massachusetts, USA
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Warrendale, Pa.
Materials Research Soc.
2001
|
| Schriftenreihe: | Materials Research Society symposium proceedings
657 : Materials science of microelectromechanical systems (MEMS) devices ; 3 Materials Research Society symposium proceedings 657 |
| Schlagworte: | |
| Beschreibung: | Getr. Zählung Ill., graph. Darst. |
| ISBN: | 1558995676 |
Internformat
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| 490 | 1 | |a Materials Research Society symposium proceedings |v 657 : Materials science of microelectromechanical systems (MEMS) devices |v 3 | |
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Datensatz im Suchindex
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| author_corporate | Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices Boston, Mass |
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| author_facet | Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices Boston, Mass |
| author_sort | Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices Boston, Mass |
| building | Verbundindex |
| bvnumber | BV024492184 |
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| discipline | Physik |
| format | Conference Proceeding Book |
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| id | DE-604.BV024492184 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:00:44Z |
| institution | BVB |
| institution_GND | (DE-588)10039949-6 |
| isbn | 1558995676 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018467321 |
| oclc_num | 916597005 |
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| owner_facet | DE-83 |
| physical | Getr. Zählung Ill., graph. Darst. |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society symposium proceedings |
| series2 | Materials Research Society symposium proceedings |
| spelling | Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices 3 2000 Boston, Mass. Verfasser (DE-588)10039949-6 aut Symposium held November 27 - 28, 2000, Boston, Massachusetts, USA [Symposium "Materials Science of Microelectromechanical Systems (MEMS) Devices III"] ; ed.: Harold Kahn ... Warrendale, Pa. Materials Research Soc. 2001 Getr. Zählung Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposium proceedings 657 : Materials science of microelectromechanical systems (MEMS) devices 3 Materials Research Society symposium proceedings 657 (DE-588)1071861417 Konferenzschrift gnd-content Kahn, Harold Sonstige oth Materials Research Society symposium proceedings 657 : Materials science of microelectromechanical systems (MEMS) devices ; 3 (DE-604)BV024483297 3 Materials Research Society symposium proceedings 657 (DE-604)BV001899105 657 |
| spellingShingle | Symposium held November 27 - 28, 2000, Boston, Massachusetts, USA Materials Research Society symposium proceedings |
| subject_GND | (DE-588)1071861417 |
| title | Symposium held November 27 - 28, 2000, Boston, Massachusetts, USA |
| title_auth | Symposium held November 27 - 28, 2000, Boston, Massachusetts, USA |
| title_exact_search | Symposium held November 27 - 28, 2000, Boston, Massachusetts, USA |
| title_full | Symposium held November 27 - 28, 2000, Boston, Massachusetts, USA [Symposium "Materials Science of Microelectromechanical Systems (MEMS) Devices III"] ; ed.: Harold Kahn ... |
| title_fullStr | Symposium held November 27 - 28, 2000, Boston, Massachusetts, USA [Symposium "Materials Science of Microelectromechanical Systems (MEMS) Devices III"] ; ed.: Harold Kahn ... |
| title_full_unstemmed | Symposium held November 27 - 28, 2000, Boston, Massachusetts, USA [Symposium "Materials Science of Microelectromechanical Systems (MEMS) Devices III"] ; ed.: Harold Kahn ... |
| title_short | Symposium |
| title_sort | symposium held november 27 28 2000 boston massachusetts usa |
| title_sub | held November 27 - 28, 2000, Boston, Massachusetts, USA |
| topic_facet | Konferenzschrift |
| volume_link | (DE-604)BV024483297 (DE-604)BV001899105 |
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