2001 6th International Symposium on Plasma- and Process Induced Damage: May 13 - 15, 2001, Monterey, California, USA
Gespeichert in:
| Körperschaft: | |
|---|---|
| Weitere Verfasser: | |
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Santa Clara, Calif.
American Vacuum Society
2001
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| Schlagworte: | |
| Beschreibung: | I, 128 S. Ill., graph. Darst. |
| ISBN: | 096515775X |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV024488783 | ||
| 003 | DE-604 | ||
| 005 | 20090910 | ||
| 007 | t | ||
| 008 | 090924s2001 ad|| |||| 10||| eng d | ||
| 020 | |a 096515775X |9 0-9651577-5-X | ||
| 035 | |a (OCoLC)248279594 | ||
| 035 | |a (DE-599)BVBBV024488783 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-83 | ||
| 084 | |a ZN 4060 |0 (DE-625)157346: |2 rvk | ||
| 111 | 2 | |a International Symposium on Plasma- and Process Induced Damage |n 6 |d 2001 |c Monterey, Calif. |j Verfasser |0 (DE-588)6034095-2 |4 aut | |
| 245 | 1 | 0 | |a 2001 6th International Symposium on Plasma- and Process Induced Damage |b May 13 - 15, 2001, Monterey, California, USA |c Manfred Engelhardt ... ed. |
| 246 | 1 | 3 | |a Two-Thousand and One 6th International Symposium on Plasma- and Process Induced Damage |
| 264 | 1 | |a Santa Clara, Calif. |c 2001 | |
| 264 | 1 | |b American Vacuum Society | |
| 300 | |a I, 128 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 700 | 1 | |a Engelhardt, Manfred |4 edt | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-018464085 | ||
Datensatz im Suchindex
| _version_ | 1804140481665302528 |
|---|---|
| any_adam_object | |
| author2 | Engelhardt, Manfred |
| author2_role | edt |
| author2_variant | m e me |
| author_corporate | International Symposium on Plasma- and Process Induced Damage Monterey, Calif |
| author_corporate_role | aut |
| author_facet | Engelhardt, Manfred International Symposium on Plasma- and Process Induced Damage Monterey, Calif |
| author_sort | International Symposium on Plasma- and Process Induced Damage Monterey, Calif |
| building | Verbundindex |
| bvnumber | BV024488783 |
| classification_rvk | ZN 4060 |
| ctrlnum | (OCoLC)248279594 (DE-599)BVBBV024488783 |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01186nam a2200313 c 4500</leader><controlfield tag="001">BV024488783</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20090910 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">090924s2001 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">096515775X</subfield><subfield code="9">0-9651577-5-X</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)248279594</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV024488783</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-83</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 4060</subfield><subfield code="0">(DE-625)157346:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">International Symposium on Plasma- and Process Induced Damage</subfield><subfield code="n">6</subfield><subfield code="d">2001</subfield><subfield code="c">Monterey, Calif.</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)6034095-2</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">2001 6th International Symposium on Plasma- and Process Induced Damage</subfield><subfield code="b">May 13 - 15, 2001, Monterey, California, USA</subfield><subfield code="c">Manfred Engelhardt ... ed.</subfield></datafield><datafield tag="246" ind1="1" ind2="3"><subfield code="a">Two-Thousand and One 6th International Symposium on Plasma- and Process Induced Damage</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Santa Clara, Calif.</subfield><subfield code="c">2001</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="b">American Vacuum Society</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">I, 128 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Engelhardt, Manfred</subfield><subfield code="4">edt</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-018464085</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV024488783 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:00:40Z |
| institution | BVB |
| institution_GND | (DE-588)6034095-2 |
| isbn | 096515775X |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018464085 |
| oclc_num | 248279594 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | I, 128 S. Ill., graph. Darst. |
| publishDate | 2001 |
| publishDateSearch | 2001 |
| publishDateSort | 2001 |
| publisher | American Vacuum Society |
| record_format | marc |
| spelling | International Symposium on Plasma- and Process Induced Damage 6 2001 Monterey, Calif. Verfasser (DE-588)6034095-2 aut 2001 6th International Symposium on Plasma- and Process Induced Damage May 13 - 15, 2001, Monterey, California, USA Manfred Engelhardt ... ed. Two-Thousand and One 6th International Symposium on Plasma- and Process Induced Damage Santa Clara, Calif. 2001 American Vacuum Society I, 128 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier (DE-588)1071861417 Konferenzschrift gnd-content Engelhardt, Manfred edt |
| spellingShingle | 2001 6th International Symposium on Plasma- and Process Induced Damage May 13 - 15, 2001, Monterey, California, USA |
| subject_GND | (DE-588)1071861417 |
| title | 2001 6th International Symposium on Plasma- and Process Induced Damage May 13 - 15, 2001, Monterey, California, USA |
| title_alt | Two-Thousand and One 6th International Symposium on Plasma- and Process Induced Damage |
| title_auth | 2001 6th International Symposium on Plasma- and Process Induced Damage May 13 - 15, 2001, Monterey, California, USA |
| title_exact_search | 2001 6th International Symposium on Plasma- and Process Induced Damage May 13 - 15, 2001, Monterey, California, USA |
| title_full | 2001 6th International Symposium on Plasma- and Process Induced Damage May 13 - 15, 2001, Monterey, California, USA Manfred Engelhardt ... ed. |
| title_fullStr | 2001 6th International Symposium on Plasma- and Process Induced Damage May 13 - 15, 2001, Monterey, California, USA Manfred Engelhardt ... ed. |
| title_full_unstemmed | 2001 6th International Symposium on Plasma- and Process Induced Damage May 13 - 15, 2001, Monterey, California, USA Manfred Engelhardt ... ed. |
| title_short | 2001 6th International Symposium on Plasma- and Process Induced Damage |
| title_sort | 2001 6th international symposium on plasma and process induced damage may 13 15 2001 monterey california usa |
| title_sub | May 13 - 15, 2001, Monterey, California, USA |
| topic_facet | Konferenzschrift |
| work_keys_str_mv | AT internationalsymposiumonplasmaandprocessinduceddamagemontereycalif 20016thinternationalsymposiumonplasmaandprocessinduceddamagemay13152001montereycaliforniausa AT engelhardtmanfred 20016thinternationalsymposiumonplasmaandprocessinduceddamagemay13152001montereycaliforniausa AT internationalsymposiumonplasmaandprocessinduceddamagemontereycalif twothousandandone6thinternationalsymposiumonplasmaandprocessinduceddamage AT engelhardtmanfred twothousandandone6thinternationalsymposiumonplasmaandprocessinduceddamage |