Symposium: held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A.
Gespeichert in:
| Körperschaft: | |
|---|---|
| Weitere Verfasser: | |
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Warrendale, Pa.
Materials Research Soc.
2000
|
| Schriftenreihe: | Materials Research Society symposium proceedings
605 : Materials science of microelectromechanical systems (MEMS) devices ; 2 Materials Research Society symposium proceedings 605 |
| Schlagworte: | |
| Beschreibung: | XIII, 314 S. Ill., graph. Darst. |
| ISBN: | 1558995137 |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV024483298 | ||
| 003 | DE-604 | ||
| 005 | 20090910 | ||
| 007 | t | ||
| 008 | 090924s2000 ad|| |||| 10||| eng d | ||
| 020 | |a 1558995137 |9 1-55899-513-7 | ||
| 035 | |a (OCoLC)916565857 | ||
| 035 | |a (DE-599)BVBBV024483298 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | 0 | |a eng | |
| 049 | |a DE-83 | ||
| 084 | |a UD 8400 |0 (DE-625)145545: |2 rvk | ||
| 111 | 2 | |a Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices |n 2 |d 1999 |c Boston, Mass. |j Verfasser |0 (DE-588)10026117-6 |4 aut | |
| 245 | 1 | 0 | |a Symposium |b held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. |c [Symposium "Materials Science of Microelectromechanical Systems (MEMS) Devices II"] ; ed.: Maarten P. de Boer ... |
| 264 | 1 | |a Warrendale, Pa. |b Materials Research Soc. |c 2000 | |
| 300 | |a XIII, 314 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Materials Research Society symposium proceedings |v 605 : Materials science of microelectromechanical systems (MEMS) devices |v 2 | |
| 490 | 1 | |a Materials Research Society symposium proceedings |v 605 | |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 700 | 1 | |a DeBoer, Maarten P. |4 edt | |
| 830 | 0 | |a Materials Research Society symposium proceedings |v 605 : Materials science of microelectromechanical systems (MEMS) devices ; 2 |w (DE-604)BV024483297 |9 2 | |
| 830 | 0 | |a Materials Research Society symposium proceedings |v 605 |w (DE-604)BV001899105 |9 605 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-018458903 | ||
Datensatz im Suchindex
| _version_ | 1804140474744700928 |
|---|---|
| any_adam_object | |
| author2 | DeBoer, Maarten P. |
| author2_role | edt |
| author2_variant | m p d mp mpd |
| author_corporate | Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices Boston, Mass |
| author_corporate_role | aut |
| author_facet | DeBoer, Maarten P. Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices Boston, Mass |
| author_sort | Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices Boston, Mass |
| building | Verbundindex |
| bvnumber | BV024483298 |
| classification_rvk | UD 8400 |
| ctrlnum | (OCoLC)916565857 (DE-599)BVBBV024483298 |
| discipline | Physik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01605nam a2200337 cb4500</leader><controlfield tag="001">BV024483298</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20090910 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">090924s2000 ad|| |||| 10||| eng d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">1558995137</subfield><subfield code="9">1-55899-513-7</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)916565857</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV024483298</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1="0" ind2=" "><subfield code="a">eng</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-83</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">UD 8400</subfield><subfield code="0">(DE-625)145545:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices</subfield><subfield code="n">2</subfield><subfield code="d">1999</subfield><subfield code="c">Boston, Mass.</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)10026117-6</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">Symposium</subfield><subfield code="b">held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A.</subfield><subfield code="c">[Symposium "Materials Science of Microelectromechanical Systems (MEMS) Devices II"] ; ed.: Maarten P. de Boer ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Warrendale, Pa.</subfield><subfield code="b">Materials Research Soc.</subfield><subfield code="c">2000</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">XIII, 314 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Materials Research Society symposium proceedings</subfield><subfield code="v">605 : Materials science of microelectromechanical systems (MEMS) devices</subfield><subfield code="v">2</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Materials Research Society symposium proceedings</subfield><subfield code="v">605</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">DeBoer, Maarten P.</subfield><subfield code="4">edt</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Materials Research Society symposium proceedings</subfield><subfield code="v">605 : Materials science of microelectromechanical systems (MEMS) devices ; 2</subfield><subfield code="w">(DE-604)BV024483297</subfield><subfield code="9">2</subfield></datafield><datafield tag="830" ind1=" " ind2="0"><subfield code="a">Materials Research Society symposium proceedings</subfield><subfield code="v">605</subfield><subfield code="w">(DE-604)BV001899105</subfield><subfield code="9">605</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-018458903</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV024483298 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T22:00:33Z |
| institution | BVB |
| institution_GND | (DE-588)10026117-6 |
| isbn | 1558995137 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018458903 |
| oclc_num | 916565857 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | XIII, 314 S. Ill., graph. Darst. |
| publishDate | 2000 |
| publishDateSearch | 2000 |
| publishDateSort | 2000 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society symposium proceedings |
| series2 | Materials Research Society symposium proceedings |
| spelling | Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices 2 1999 Boston, Mass. Verfasser (DE-588)10026117-6 aut Symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. [Symposium "Materials Science of Microelectromechanical Systems (MEMS) Devices II"] ; ed.: Maarten P. de Boer ... Warrendale, Pa. Materials Research Soc. 2000 XIII, 314 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposium proceedings 605 : Materials science of microelectromechanical systems (MEMS) devices 2 Materials Research Society symposium proceedings 605 (DE-588)1071861417 Konferenzschrift gnd-content DeBoer, Maarten P. edt Materials Research Society symposium proceedings 605 : Materials science of microelectromechanical systems (MEMS) devices ; 2 (DE-604)BV024483297 2 Materials Research Society symposium proceedings 605 (DE-604)BV001899105 605 |
| spellingShingle | Symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. Materials Research Society symposium proceedings |
| subject_GND | (DE-588)1071861417 |
| title | Symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. |
| title_auth | Symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. |
| title_exact_search | Symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. |
| title_full | Symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. [Symposium "Materials Science of Microelectromechanical Systems (MEMS) Devices II"] ; ed.: Maarten P. de Boer ... |
| title_fullStr | Symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. [Symposium "Materials Science of Microelectromechanical Systems (MEMS) Devices II"] ; ed.: Maarten P. de Boer ... |
| title_full_unstemmed | Symposium held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. [Symposium "Materials Science of Microelectromechanical Systems (MEMS) Devices II"] ; ed.: Maarten P. de Boer ... |
| title_short | Symposium |
| title_sort | symposium held november 29 december 1 1999 boston massachusetts u s a |
| title_sub | held November 29 - December 1, 1999, Boston, Massachusetts, U.S.A. |
| topic_facet | Konferenzschrift |
| volume_link | (DE-604)BV024483297 (DE-604)BV001899105 |
| work_keys_str_mv | AT symposiumonmaterialsscienceofmicroelectromechanicalsystemsmemsdevicesbostonmass symposiumheldnovember29december11999bostonmassachusettsusa AT deboermaartenp symposiumheldnovember29december11999bostonmassachusettsusa |