2000 5th International Symposium on Plasma Process Induced Damage: May 22 - 24, 2000, Santa Clara, California, USA
Gespeichert in:
| Körperschaft: | |
|---|---|
| Weitere Verfasser: | |
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Santa Clara, Calif.
2000
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| Schlagworte: | |
| Beschreibung: | 172 S. Ill., graph. Darst. |
| ISBN: | 0965157741 |
Internformat
MARC
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| 246 | 1 | 3 | |a Two-thousand 5th International Symposium on Plasma Process Induced Damage |
| 264 | 1 | |a Santa Clara, Calif. |c 2000 | |
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Datensatz im Suchindex
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| author_sort | International Symposium on Plasma Process Induced Damage Santa Clara, Calif |
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| isbn | 0965157741 |
| language | English |
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| physical | 172 S. Ill., graph. Darst. |
| publishDate | 2000 |
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| spelling | International Symposium on Plasma Process Induced Damage 5 2000 Santa Clara, Calif. Verfasser (DE-588)6029846-7 aut 2000 5th International Symposium on Plasma Process Induced Damage May 22 - 24, 2000, Santa Clara, California, USA published by American Vacuum Society, Northern California Chapter. Mitsumasa Koyanagi... ed. Two-thousand 5th International Symposium on Plasma Process Induced Damage Santa Clara, Calif. 2000 172 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier (DE-588)1071861417 Konferenzschrift gnd-content Koyanagi, Mitsumasa edt American Vacuum Society Northern California Chapter Sonstige (DE-588)5205121-3 oth |
| spellingShingle | 2000 5th International Symposium on Plasma Process Induced Damage May 22 - 24, 2000, Santa Clara, California, USA |
| subject_GND | (DE-588)1071861417 |
| title | 2000 5th International Symposium on Plasma Process Induced Damage May 22 - 24, 2000, Santa Clara, California, USA |
| title_alt | Two-thousand 5th International Symposium on Plasma Process Induced Damage |
| title_auth | 2000 5th International Symposium on Plasma Process Induced Damage May 22 - 24, 2000, Santa Clara, California, USA |
| title_exact_search | 2000 5th International Symposium on Plasma Process Induced Damage May 22 - 24, 2000, Santa Clara, California, USA |
| title_full | 2000 5th International Symposium on Plasma Process Induced Damage May 22 - 24, 2000, Santa Clara, California, USA published by American Vacuum Society, Northern California Chapter. Mitsumasa Koyanagi... ed. |
| title_fullStr | 2000 5th International Symposium on Plasma Process Induced Damage May 22 - 24, 2000, Santa Clara, California, USA published by American Vacuum Society, Northern California Chapter. Mitsumasa Koyanagi... ed. |
| title_full_unstemmed | 2000 5th International Symposium on Plasma Process Induced Damage May 22 - 24, 2000, Santa Clara, California, USA published by American Vacuum Society, Northern California Chapter. Mitsumasa Koyanagi... ed. |
| title_short | 2000 5th International Symposium on Plasma Process Induced Damage |
| title_sort | 2000 5th international symposium on plasma process induced damage may 22 24 2000 santa clara california usa |
| title_sub | May 22 - 24, 2000, Santa Clara, California, USA |
| topic_facet | Konferenzschrift |
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