Symposium: symposium held December 1 - 2, 1998, Boston, Massachusetts, USA
Gespeichert in:
| Körperschaft: | |
|---|---|
| Weitere Verfasser: | |
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Warrendale, Pa.
Materials Research Soc.
1999
|
| Schriftenreihe: | Materials Research Society symposium proceedings
546 : Materials science of microelectromechanical systems (MEMS) devices ; [1] Materials Research Society symposium proceedings 546 |
| Schlagworte: | |
| Beschreibung: | IX, 246 S. Ill., graph. Darst. |
| ISBN: | 1558994521 |
Internformat
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Datensatz im Suchindex
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| author_corporate | Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices Boston, Mass |
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| author_facet | Heuer, Arthur H. 1936- Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices Boston, Mass |
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| indexdate | 2024-07-09T21:59:55Z |
| institution | BVB |
| institution_GND | (DE-588)10026115-2 |
| isbn | 1558994521 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018430643 |
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| physical | IX, 246 S. Ill., graph. Darst. |
| publishDate | 1999 |
| publishDateSearch | 1999 |
| publishDateSort | 1999 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society symposium proceedings |
| series2 | Materials Research Society symposium proceedings |
| spelling | Symposium on Materials Science of Microelectromechanical Systems (MEMS) Devices 1 1998 Boston, Mass. Verfasser (DE-588)10026115-2 aut Symposium symposium held December 1 - 2, 1998, Boston, Massachusetts, USA [Symposium "Materials Science of Microelectromechanical Systems (MEMS) Devices"] ; ed.: Arthur H. Heuer ... Warrendale, Pa. Materials Research Soc. 1999 IX, 246 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposium proceedings 546 : Materials science of microelectromechanical systems (MEMS) devices [1] Materials Research Society symposium proceedings 546 (DE-588)1071861417 Konferenzschrift gnd-content Heuer, Arthur H. 1936- (DE-588)122263316 edt Materials Research Society symposium proceedings 546 : Materials science of microelectromechanical systems (MEMS) devices ; [1] (DE-604)BV024483297 1 Materials Research Society symposium proceedings 546 (DE-604)BV001899105 546 |
| spellingShingle | Symposium symposium held December 1 - 2, 1998, Boston, Massachusetts, USA Materials Research Society symposium proceedings |
| subject_GND | (DE-588)1071861417 |
| title | Symposium symposium held December 1 - 2, 1998, Boston, Massachusetts, USA |
| title_auth | Symposium symposium held December 1 - 2, 1998, Boston, Massachusetts, USA |
| title_exact_search | Symposium symposium held December 1 - 2, 1998, Boston, Massachusetts, USA |
| title_full | Symposium symposium held December 1 - 2, 1998, Boston, Massachusetts, USA [Symposium "Materials Science of Microelectromechanical Systems (MEMS) Devices"] ; ed.: Arthur H. Heuer ... |
| title_fullStr | Symposium symposium held December 1 - 2, 1998, Boston, Massachusetts, USA [Symposium "Materials Science of Microelectromechanical Systems (MEMS) Devices"] ; ed.: Arthur H. Heuer ... |
| title_full_unstemmed | Symposium symposium held December 1 - 2, 1998, Boston, Massachusetts, USA [Symposium "Materials Science of Microelectromechanical Systems (MEMS) Devices"] ; ed.: Arthur H. Heuer ... |
| title_short | Symposium |
| title_sort | symposium symposium held december 1 2 1998 boston massachusetts usa |
| title_sub | symposium held December 1 - 2, 1998, Boston, Massachusetts, USA |
| topic_facet | Konferenzschrift |
| volume_link | (DE-604)BV024483297 (DE-604)BV001899105 |
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