1997 2nd International Symposium on Plasma Process Induced Damage: 13 - 14 May 1997, Monterey, California, USA
Gespeichert in:
| Körperschaften: | , |
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| Weitere Verfasser: | |
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Sunnyvale, Calif.
1997
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| Schlagworte: | |
| Beschreibung: | I, 259 S. Ill., graph. Darst. |
Internformat
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| 245 | 1 | 0 | |a 1997 2nd International Symposium on Plasma Process Induced Damage |b 13 - 14 May 1997, Monterey, California, USA |c published by Northern California Chapter of the American Vacuum Society. Kin P. Cheung ... ed. |
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Datensatz im Suchindex
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| physical | I, 259 S. Ill., graph. Darst. |
| publishDate | 1997 |
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| spelling | International Symposium on Plasma Process Induced Damage 2 1997 Monterey, Calif. Verfasser (DE-588)5255212-3 aut 1997 2nd International Symposium on Plasma Process Induced Damage 13 - 14 May 1997, Monterey, California, USA published by Northern California Chapter of the American Vacuum Society. Kin P. Cheung ... ed. Sunnyvale, Calif. 1997 I, 259 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier (DE-588)1071861417 Konferenzschrift gnd-content Cheung, Kin P. 1954- (DE-588)121053466 edt American Vacuum Society Northern California Chapter Sonstige (DE-588)5205121-3 oth International Symposium on Plasma Process Induced Damage 2 1997 Monterey, Calif. (DE-588)5255212-3 aut Nineteen Hundred and Ninety-Seven 2nd International Symposium on Plasma Process Induced Damage |
| spellingShingle | 1997 2nd International Symposium on Plasma Process Induced Damage 13 - 14 May 1997, Monterey, California, USA |
| subject_GND | (DE-588)1071861417 |
| title | 1997 2nd International Symposium on Plasma Process Induced Damage 13 - 14 May 1997, Monterey, California, USA |
| title_alt | Nineteen Hundred and Ninety-Seven 2nd International Symposium on Plasma Process Induced Damage |
| title_auth | 1997 2nd International Symposium on Plasma Process Induced Damage 13 - 14 May 1997, Monterey, California, USA |
| title_exact_search | 1997 2nd International Symposium on Plasma Process Induced Damage 13 - 14 May 1997, Monterey, California, USA |
| title_full | 1997 2nd International Symposium on Plasma Process Induced Damage 13 - 14 May 1997, Monterey, California, USA published by Northern California Chapter of the American Vacuum Society. Kin P. Cheung ... ed. |
| title_fullStr | 1997 2nd International Symposium on Plasma Process Induced Damage 13 - 14 May 1997, Monterey, California, USA published by Northern California Chapter of the American Vacuum Society. Kin P. Cheung ... ed. |
| title_full_unstemmed | 1997 2nd International Symposium on Plasma Process Induced Damage 13 - 14 May 1997, Monterey, California, USA published by Northern California Chapter of the American Vacuum Society. Kin P. Cheung ... ed. |
| title_short | 1997 2nd International Symposium on Plasma Process Induced Damage |
| title_sort | 1997 2nd international symposium on plasma process induced damage 13 14 may 1997 monterey california usa |
| title_sub | 13 - 14 May 1997, Monterey, California, USA |
| topic_facet | Konferenzschrift |
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