1996 1st International Symposium on Plasma Process Induced Damage: 13 - 14 May 1996, Santa Clara, California, USA
Gespeichert in:
| Körperschaften: | , |
|---|---|
| Weitere Verfasser: | |
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Sunnyvale, Calif.
1996
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| Schlagworte: | |
| Beschreibung: | I, 237 S. Ill., graph. Darst. |
| ISBN: | 0965157709 |
Internformat
MARC
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| 245 | 1 | 0 | |a 1996 1st International Symposium on Plasma Process Induced Damage |b 13 - 14 May 1996, Santa Clara, California, USA |c published by Northern California Chapter of the American Vacuum Society. Kin P. Cheung ... |
| 264 | 1 | |a Sunnyvale, Calif. |c 1996 | |
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| 711 | 2 | 2 | |a International Symposium on Plasma Process Induced Damage |n 1 |d 1996 |c Santa Clara, Calif. |0 (DE-588)5205119-5 |4 aut |t Nineteen Hundred and Ninety-Six 1st International Symposium on Plasma Process Induced Damage |
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Datensatz im Suchindex
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| indexdate | 2024-07-09T21:59:12Z |
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| physical | I, 237 S. Ill., graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
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| spelling | International Symposium on Plasma Process Induced Damage 1 1996 Santa Clara, Calif. Verfasser (DE-588)5205119-5 aut 1996 1st International Symposium on Plasma Process Induced Damage 13 - 14 May 1996, Santa Clara, California, USA published by Northern California Chapter of the American Vacuum Society. Kin P. Cheung ... Sunnyvale, Calif. 1996 I, 237 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier (DE-588)1071861417 Konferenzschrift gnd-content Cheung, Kin P. 1954- (DE-588)121053466 edt American Vacuum Society Northern California Chapter Sonstige (DE-588)5205121-3 oth International Symposium on Plasma Process Induced Damage 1 1996 Santa Clara, Calif. (DE-588)5205119-5 aut Nineteen Hundred and Ninety-Six 1st International Symposium on Plasma Process Induced Damage |
| spellingShingle | 1996 1st International Symposium on Plasma Process Induced Damage 13 - 14 May 1996, Santa Clara, California, USA |
| subject_GND | (DE-588)1071861417 |
| title | 1996 1st International Symposium on Plasma Process Induced Damage 13 - 14 May 1996, Santa Clara, California, USA |
| title_alt | Nineteen Hundred and Ninety-Six 1st International Symposium on Plasma Process Induced Damage |
| title_auth | 1996 1st International Symposium on Plasma Process Induced Damage 13 - 14 May 1996, Santa Clara, California, USA |
| title_exact_search | 1996 1st International Symposium on Plasma Process Induced Damage 13 - 14 May 1996, Santa Clara, California, USA |
| title_full | 1996 1st International Symposium on Plasma Process Induced Damage 13 - 14 May 1996, Santa Clara, California, USA published by Northern California Chapter of the American Vacuum Society. Kin P. Cheung ... |
| title_fullStr | 1996 1st International Symposium on Plasma Process Induced Damage 13 - 14 May 1996, Santa Clara, California, USA published by Northern California Chapter of the American Vacuum Society. Kin P. Cheung ... |
| title_full_unstemmed | 1996 1st International Symposium on Plasma Process Induced Damage 13 - 14 May 1996, Santa Clara, California, USA published by Northern California Chapter of the American Vacuum Society. Kin P. Cheung ... |
| title_short | 1996 1st International Symposium on Plasma Process Induced Damage |
| title_sort | 1996 1st international symposium on plasma process induced damage 13 14 may 1996 santa clara california usa |
| title_sub | 13 - 14 May 1996, Santa Clara, California, USA |
| topic_facet | Konferenzschrift |
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