16th Annual Symposium on Photomask Technology and Management: 18 - 20 September 1996, Redwood City, California
Gespeichert in:
| Körperschaften: | , |
|---|---|
| Weitere Verfasser: | |
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
1996
|
| Schriftenreihe: | Proceedings / SPIE
2884 |
| Schlagworte: | |
| Beschreibung: | X, 586 S. Ill., graph. Darst. |
| ISBN: | 0819422827 |
Internformat
MARC
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| 245 | 1 | 0 | |a 16th Annual Symposium on Photomask Technology and Management |b 18 - 20 September 1996, Redwood City, California |c Gilbert V. Shelden ... chairs/ed. |
| 264 | 1 | |a Bellingham, Wash. |b SPIE |c 1996 | |
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| 711 | 2 | 2 | |a Symposium on Photomask Technology and Management |n 16 |d 1996 |c Redwood City, Calif. |0 (DE-588)5201022-3 |4 aut |t Sixteenth Annual Symposium on Photomask Technology and Management |
| 810 | 2 | |a SPIE |t Proceedings |v 2884 |w (DE-604)BV000010887 |9 2884 | |
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Datensatz im Suchindex
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| author2 | Shelden, Gilbert V. |
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| author_corporate | Symposium on Photomask Technology and Management Redwood City, Calif Symposium on Photomask Technology and Management |
| author_corporate_role | aut aut |
| author_facet | Shelden, Gilbert V. Symposium on Photomask Technology and Management Redwood City, Calif Symposium on Photomask Technology and Management |
| author_sort | Symposium on Photomask Technology and Management Redwood City, Calif |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
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| id | DE-604.BV024416818 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:59:10Z |
| institution | BVB |
| institution_GND | (DE-588)5201022-3 |
| isbn | 0819422827 |
| language | Undetermined |
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| physical | X, 586 S. Ill., graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings / SPIE |
| spelling | Symposium on Photomask Technology and Management 16 1996 Redwood City, Calif. Verfasser (DE-588)5201022-3 aut 16th Annual Symposium on Photomask Technology and Management 18 - 20 September 1996, Redwood City, California Gilbert V. Shelden ... chairs/ed. Bellingham, Wash. SPIE 1996 X, 586 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings / SPIE 2884 (DE-588)1071861417 Konferenzschrift gnd-content Shelden, Gilbert V. edt Symposium on Photomask Technology and Management 16 1996 Redwood City, Calif. (DE-588)5201022-3 aut Sixteenth Annual Symposium on Photomask Technology and Management SPIE Proceedings 2884 (DE-604)BV000010887 2884 |
| spellingShingle | 16th Annual Symposium on Photomask Technology and Management 18 - 20 September 1996, Redwood City, California |
| subject_GND | (DE-588)1071861417 |
| title | 16th Annual Symposium on Photomask Technology and Management 18 - 20 September 1996, Redwood City, California |
| title_alt | Sixteenth Annual Symposium on Photomask Technology and Management |
| title_auth | 16th Annual Symposium on Photomask Technology and Management 18 - 20 September 1996, Redwood City, California |
| title_exact_search | 16th Annual Symposium on Photomask Technology and Management 18 - 20 September 1996, Redwood City, California |
| title_full | 16th Annual Symposium on Photomask Technology and Management 18 - 20 September 1996, Redwood City, California Gilbert V. Shelden ... chairs/ed. |
| title_fullStr | 16th Annual Symposium on Photomask Technology and Management 18 - 20 September 1996, Redwood City, California Gilbert V. Shelden ... chairs/ed. |
| title_full_unstemmed | 16th Annual Symposium on Photomask Technology and Management 18 - 20 September 1996, Redwood City, California Gilbert V. Shelden ... chairs/ed. |
| title_short | 16th Annual Symposium on Photomask Technology and Management |
| title_sort | 16th annual symposium on photomask technology and management 18 20 september 1996 redwood city california |
| title_sub | 18 - 20 September 1996, Redwood City, California |
| topic_facet | Konferenzschrift |
| volume_link | (DE-604)BV000010887 |
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