Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays: 8 - 9 August 1996, Denver, Colorado
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
1996
|
| Schriftenreihe: | Proceedings / SPIE
2862 |
| Schlagworte: | |
| Beschreibung: | VII, 188 S. Ill., graph. Darst. |
| ISBN: | 0819422509 |
Internformat
MARC
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| 245 | 1 | 0 | |a Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays |b 8 - 9 August 1996, Denver, Colorado |c John C. Stover, chair/ed. |
| 264 | 1 | |a Bellingham, Wash. |b SPIE |c 1996 | |
| 300 | |a VII, 188 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 700 | 1 | |a Stover, John C. |4 edt | |
| 810 | 2 | |a SPIE |t Proceedings |v 2862 |w (DE-604)BV000010887 |9 2862 | |
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Datensatz im Suchindex
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| any_adam_object | |
| author2 | Stover, John C. |
| author2_role | edt |
| author2_variant | j c s jc jcs |
| author_facet | Stover, John C. |
| building | Verbundindex |
| bvnumber | BV024416807 |
| ctrlnum | (OCoLC)636375867 (DE-599)BVBBV024416807 |
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| genre_facet | Konferenzschrift |
| id | DE-604.BV024416807 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:59:10Z |
| institution | BVB |
| isbn | 0819422509 |
| language | Undetermined |
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| physical | VII, 188 S. Ill., graph. Darst. |
| publishDate | 1996 |
| publishDateSearch | 1996 |
| publishDateSort | 1996 |
| publisher | SPIE |
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| series2 | Proceedings / SPIE |
| spelling | Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays 8 - 9 August 1996, Denver, Colorado John C. Stover, chair/ed. Bellingham, Wash. SPIE 1996 VII, 188 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings / SPIE 2862 (DE-588)1071861417 Konferenzschrift gnd-content Stover, John C. edt SPIE Proceedings 2862 (DE-604)BV000010887 2862 |
| spellingShingle | Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays 8 - 9 August 1996, Denver, Colorado |
| subject_GND | (DE-588)1071861417 |
| title | Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays 8 - 9 August 1996, Denver, Colorado |
| title_auth | Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays 8 - 9 August 1996, Denver, Colorado |
| title_exact_search | Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays 8 - 9 August 1996, Denver, Colorado |
| title_full | Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays 8 - 9 August 1996, Denver, Colorado John C. Stover, chair/ed. |
| title_fullStr | Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays 8 - 9 August 1996, Denver, Colorado John C. Stover, chair/ed. |
| title_full_unstemmed | Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays 8 - 9 August 1996, Denver, Colorado John C. Stover, chair/ed. |
| title_short | Flatness, roughness, and discrete defect characterization for computer disks, wafers, and flat panel displays |
| title_sort | flatness roughness and discrete defect characterization for computer disks wafers and flat panel displays 8 9 august 1996 denver colorado |
| title_sub | 8 - 9 August 1996, Denver, Colorado |
| topic_facet | Konferenzschrift |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT stoverjohnc flatnessroughnessanddiscretedefectcharacterizationforcomputerdiskswafersandflatpaneldisplays89august1996denvercolorado |