Elektron-Zyklotron-Resonanz Mikrowellen-Ionenquelle hoher Leistung zur Mikrostrukturierung Schichtdeposition und Diagnostik:
Gespeichert in:
| 1. Verfasser: | |
|---|---|
| Format: | Abschlussarbeit Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
1995
|
| Schlagworte: | |
| Beschreibung: | XIV, 133 S. graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
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| 003 | DE-604 | ||
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| 007 | t | ||
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| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | |a und | ||
| 049 | |a DE-83 | ||
| 100 | 1 | |a Papenbreer, Rudolf L. |e Verfasser |4 aut | |
| 245 | 1 | 0 | |a Elektron-Zyklotron-Resonanz Mikrowellen-Ionenquelle hoher Leistung zur Mikrostrukturierung Schichtdeposition und Diagnostik |c von Rudolf L. Papenbreer |
| 264 | 1 | |c 1995 | |
| 300 | |a XIV, 133 S. |b graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 502 | |a Wuppertal, Univ., Diss., 1995 | ||
| 650 | 0 | 7 | |a Keramik |0 (DE-588)4030270-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Metall |0 (DE-588)4038860-8 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Plasma |0 (DE-588)4046249-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Hochfrequenzionenquelle |0 (DE-588)4287206-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikrowelle |0 (DE-588)4039246-6 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Integrierte Schaltung |0 (DE-588)4027242-4 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ätzen |0 (DE-588)4000648-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Ion |0 (DE-588)4027597-8 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)4113937-9 |a Hochschulschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Hochfrequenzionenquelle |0 (DE-588)4287206-6 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Plasma |0 (DE-588)4046249-3 |D s |
| 689 | 1 | |8 1\p |5 DE-604 | |
| 689 | 2 | 0 | |a Mikrowelle |0 (DE-588)4039246-6 |D s |
| 689 | 2 | |8 2\p |5 DE-604 | |
| 689 | 3 | 0 | |a Integrierte Schaltung |0 (DE-588)4027242-4 |D s |
| 689 | 3 | |8 3\p |5 DE-604 | |
| 689 | 4 | 0 | |a Keramik |0 (DE-588)4030270-2 |D s |
| 689 | 4 | |8 4\p |5 DE-604 | |
| 689 | 5 | 0 | |a Metall |0 (DE-588)4038860-8 |D s |
| 689 | 5 | |8 5\p |5 DE-604 | |
| 689 | 6 | 0 | |a Ätzen |0 (DE-588)4000648-7 |D s |
| 689 | 6 | |8 6\p |5 DE-604 | |
| 689 | 7 | 0 | |a Ion |0 (DE-588)4027597-8 |D s |
| 689 | 7 | |8 7\p |5 DE-604 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-018391649 | ||
| 883 | 1 | |8 1\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 2\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 3\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 4\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 5\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 6\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
| 883 | 1 | |8 7\p |a cgwrk |d 20201028 |q DE-101 |u https://d-nb.info/provenance/plan#cgwrk | |
Datensatz im Suchindex
| _version_ | 1804140383055118336 |
|---|---|
| any_adam_object | |
| author | Papenbreer, Rudolf L. |
| author_facet | Papenbreer, Rudolf L. |
| author_role | aut |
| author_sort | Papenbreer, Rudolf L. |
| author_variant | r l p rl rlp |
| building | Verbundindex |
| bvnumber | BV024413736 |
| ctrlnum | (OCoLC)64531905 (DE-599)BVBBV024413736 |
| format | Thesis Book |
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| genre | (DE-588)4113937-9 Hochschulschrift gnd-content |
| genre_facet | Hochschulschrift |
| id | DE-604.BV024413736 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:59:06Z |
| institution | BVB |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018391649 |
| oclc_num | 64531905 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | XIV, 133 S. graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| record_format | marc |
| spelling | Papenbreer, Rudolf L. Verfasser aut Elektron-Zyklotron-Resonanz Mikrowellen-Ionenquelle hoher Leistung zur Mikrostrukturierung Schichtdeposition und Diagnostik von Rudolf L. Papenbreer 1995 XIV, 133 S. graph. Darst. txt rdacontent n rdamedia nc rdacarrier Wuppertal, Univ., Diss., 1995 Keramik (DE-588)4030270-2 gnd rswk-swf Metall (DE-588)4038860-8 gnd rswk-swf Plasma (DE-588)4046249-3 gnd rswk-swf Hochfrequenzionenquelle (DE-588)4287206-6 gnd rswk-swf Mikrowelle (DE-588)4039246-6 gnd rswk-swf Integrierte Schaltung (DE-588)4027242-4 gnd rswk-swf Ätzen (DE-588)4000648-7 gnd rswk-swf Ion (DE-588)4027597-8 gnd rswk-swf (DE-588)4113937-9 Hochschulschrift gnd-content Hochfrequenzionenquelle (DE-588)4287206-6 s DE-604 Plasma (DE-588)4046249-3 s 1\p DE-604 Mikrowelle (DE-588)4039246-6 s 2\p DE-604 Integrierte Schaltung (DE-588)4027242-4 s 3\p DE-604 Keramik (DE-588)4030270-2 s 4\p DE-604 Metall (DE-588)4038860-8 s 5\p DE-604 Ätzen (DE-588)4000648-7 s 6\p DE-604 Ion (DE-588)4027597-8 s 7\p DE-604 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 2\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 3\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 4\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 5\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 6\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk 7\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Papenbreer, Rudolf L. Elektron-Zyklotron-Resonanz Mikrowellen-Ionenquelle hoher Leistung zur Mikrostrukturierung Schichtdeposition und Diagnostik Keramik (DE-588)4030270-2 gnd Metall (DE-588)4038860-8 gnd Plasma (DE-588)4046249-3 gnd Hochfrequenzionenquelle (DE-588)4287206-6 gnd Mikrowelle (DE-588)4039246-6 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Ätzen (DE-588)4000648-7 gnd Ion (DE-588)4027597-8 gnd |
| subject_GND | (DE-588)4030270-2 (DE-588)4038860-8 (DE-588)4046249-3 (DE-588)4287206-6 (DE-588)4039246-6 (DE-588)4027242-4 (DE-588)4000648-7 (DE-588)4027597-8 (DE-588)4113937-9 |
| title | Elektron-Zyklotron-Resonanz Mikrowellen-Ionenquelle hoher Leistung zur Mikrostrukturierung Schichtdeposition und Diagnostik |
| title_auth | Elektron-Zyklotron-Resonanz Mikrowellen-Ionenquelle hoher Leistung zur Mikrostrukturierung Schichtdeposition und Diagnostik |
| title_exact_search | Elektron-Zyklotron-Resonanz Mikrowellen-Ionenquelle hoher Leistung zur Mikrostrukturierung Schichtdeposition und Diagnostik |
| title_full | Elektron-Zyklotron-Resonanz Mikrowellen-Ionenquelle hoher Leistung zur Mikrostrukturierung Schichtdeposition und Diagnostik von Rudolf L. Papenbreer |
| title_fullStr | Elektron-Zyklotron-Resonanz Mikrowellen-Ionenquelle hoher Leistung zur Mikrostrukturierung Schichtdeposition und Diagnostik von Rudolf L. Papenbreer |
| title_full_unstemmed | Elektron-Zyklotron-Resonanz Mikrowellen-Ionenquelle hoher Leistung zur Mikrostrukturierung Schichtdeposition und Diagnostik von Rudolf L. Papenbreer |
| title_short | Elektron-Zyklotron-Resonanz Mikrowellen-Ionenquelle hoher Leistung zur Mikrostrukturierung Schichtdeposition und Diagnostik |
| title_sort | elektron zyklotron resonanz mikrowellen ionenquelle hoher leistung zur mikrostrukturierung schichtdeposition und diagnostik |
| topic | Keramik (DE-588)4030270-2 gnd Metall (DE-588)4038860-8 gnd Plasma (DE-588)4046249-3 gnd Hochfrequenzionenquelle (DE-588)4287206-6 gnd Mikrowelle (DE-588)4039246-6 gnd Integrierte Schaltung (DE-588)4027242-4 gnd Ätzen (DE-588)4000648-7 gnd Ion (DE-588)4027597-8 gnd |
| topic_facet | Keramik Metall Plasma Hochfrequenzionenquelle Mikrowelle Integrierte Schaltung Ätzen Ion Hochschulschrift |
| work_keys_str_mv | AT papenbreerrudolfl elektronzyklotronresonanzmikrowellenionenquellehoherleistungzurmikrostrukturierungschichtdepositionunddiagnostik |