15th Annual Symposium on Photomask Technology and Management: 20 - 22 September 1995, Santa Clara, California
Gespeichert in:
| Körperschaften: | , |
|---|---|
| Weitere Verfasser: | |
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
1995
|
| Schriftenreihe: | Proceedings / SPIE
2621 |
| Schlagworte: | |
| Beschreibung: | IX, 636 S. Ill., graph. Darst. |
| ISBN: | 0819419850 |
Internformat
MARC
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| 245 | 1 | 0 | |a 15th Annual Symposium on Photomask Technology and Management |b 20 - 22 September 1995, Santa Clara, California |c Gilbert V. Shelden ... chairs/ed. |
| 264 | 1 | |a Bellingham, Wash. |b SPIE |c 1995 | |
| 300 | |a IX, 636 S. |b Ill., graph. Darst. | ||
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| 810 | 2 | |a SPIE |t Proceedings |v 2621 |w (DE-604)BV000010887 |9 2621 | |
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Datensatz im Suchindex
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| author2 | Shelden, Gilbert V. |
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| author_corporate | Symposium on Photomask Technology and Management Santa Clara, Calif Symposium on Photomask Technology and Management |
| author_corporate_role | aut aut |
| author_facet | Shelden, Gilbert V. Symposium on Photomask Technology and Management Santa Clara, Calif Symposium on Photomask Technology and Management |
| author_sort | Symposium on Photomask Technology and Management Santa Clara, Calif |
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| bvnumber | BV024410706 |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre_facet | Konferenzschrift |
| id | DE-604.BV024410706 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:59:02Z |
| institution | BVB |
| institution_GND | (DE-588)5181524-2 |
| isbn | 0819419850 |
| language | Undetermined |
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| physical | IX, 636 S. Ill., graph. Darst. |
| publishDate | 1995 |
| publishDateSearch | 1995 |
| publishDateSort | 1995 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings / SPIE |
| spelling | Symposium on Photomask Technology and Management 15 1995 Santa Clara, Calif. Verfasser (DE-588)5181524-2 aut 15th Annual Symposium on Photomask Technology and Management 20 - 22 September 1995, Santa Clara, California Gilbert V. Shelden ... chairs/ed. Bellingham, Wash. SPIE 1995 IX, 636 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings / SPIE 2621 (DE-588)1071861417 Konferenzschrift gnd-content Shelden, Gilbert V. edt Symposium on Photomask Technology and Management 15 1995 Santa Clara, Calif. (DE-588)5181524-2 aut Fifteenth Annual Symposium on Photomask Technology and Management SPIE Proceedings 2621 (DE-604)BV000010887 2621 |
| spellingShingle | 15th Annual Symposium on Photomask Technology and Management 20 - 22 September 1995, Santa Clara, California |
| subject_GND | (DE-588)1071861417 |
| title | 15th Annual Symposium on Photomask Technology and Management 20 - 22 September 1995, Santa Clara, California |
| title_alt | Fifteenth Annual Symposium on Photomask Technology and Management |
| title_auth | 15th Annual Symposium on Photomask Technology and Management 20 - 22 September 1995, Santa Clara, California |
| title_exact_search | 15th Annual Symposium on Photomask Technology and Management 20 - 22 September 1995, Santa Clara, California |
| title_full | 15th Annual Symposium on Photomask Technology and Management 20 - 22 September 1995, Santa Clara, California Gilbert V. Shelden ... chairs/ed. |
| title_fullStr | 15th Annual Symposium on Photomask Technology and Management 20 - 22 September 1995, Santa Clara, California Gilbert V. Shelden ... chairs/ed. |
| title_full_unstemmed | 15th Annual Symposium on Photomask Technology and Management 20 - 22 September 1995, Santa Clara, California Gilbert V. Shelden ... chairs/ed. |
| title_short | 15th Annual Symposium on Photomask Technology and Management |
| title_sort | 15th annual symposium on photomask technology and management 20 22 september 1995 santa clara california |
| title_sub | 20 - 22 September 1995, Santa Clara, California |
| topic_facet | Konferenzschrift |
| volume_link | (DE-604)BV000010887 |
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