In-process optical metrology for precision machining: 31 March - 2 April 1987, The Hague, The Netherlands
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Bellingham, Wash.
SPIE
1987
|
| Schriftenreihe: | Proceedings / SPIE
802 |
| Schlagworte: | |
| Beschreibung: | VIII, 217 S. Ill., graph. Darst. |
Internformat
MARC
| LEADER | 00000nam a2200000 cb4500 | ||
|---|---|---|---|
| 001 | BV024409204 | ||
| 003 | DE-604 | ||
| 005 | 20090910 | ||
| 007 | t | ||
| 008 | 960328s1987 ad|| |||| 10||| und d | ||
| 035 | |a (OCoLC)830858732 | ||
| 035 | |a (DE-599)BVBBV024409204 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | |a und | ||
| 049 | |a DE-83 |a DE-11 | ||
| 245 | 1 | 0 | |a In-process optical metrology for precision machining |b 31 March - 2 April 1987, The Hague, The Netherlands |c Peter Langenbeck, chair/ed. |
| 264 | 1 | |a Bellingham, Wash. |b SPIE |c 1987 | |
| 300 | |a VIII, 217 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Proceedings / SPIE |v 802 | |
| 650 | 0 | 7 | |a Ellipsometrie |0 (DE-588)4152025-7 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Präzisionsinstrument |0 (DE-588)4276048-3 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Metrologie |0 (DE-588)4169749-2 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Interferometrie |0 (DE-588)4027296-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Topografie |0 (DE-588)4133697-5 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Optik |0 (DE-588)4043650-0 |2 gnd |9 rswk-swf |
| 650 | 0 | 7 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |2 gnd |9 rswk-swf |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 689 | 0 | 0 | |a Optik |0 (DE-588)4043650-0 |D s |
| 689 | 0 | |5 DE-604 | |
| 689 | 1 | 0 | |a Präzisionsinstrument |0 (DE-588)4276048-3 |D s |
| 689 | 1 | |5 DE-604 | |
| 689 | 2 | 0 | |a Mikrosystemtechnik |0 (DE-588)4221617-5 |D s |
| 689 | 2 | |5 DE-604 | |
| 689 | 3 | 0 | |a Metrologie |0 (DE-588)4169749-2 |D s |
| 689 | 3 | |5 DE-604 | |
| 689 | 4 | 0 | |a Topografie |0 (DE-588)4133697-5 |D s |
| 689 | 4 | |5 DE-604 | |
| 689 | 5 | 0 | |a Interferometrie |0 (DE-588)4027296-5 |D s |
| 689 | 5 | |5 DE-604 | |
| 689 | 6 | 0 | |a Ellipsometrie |0 (DE-588)4152025-7 |D s |
| 689 | 6 | |5 DE-604 | |
| 700 | 1 | |a Langenbeck, Peter |0 (DE-588)106894250 |4 edt | |
| 810 | 2 | |a SPIE |t Proceedings |v 802 |w (DE-604)BV000010887 |9 802 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-018387381 | ||
Datensatz im Suchindex
| _version_ | 1804140376960794624 |
|---|---|
| any_adam_object | |
| author2 | Langenbeck, Peter |
| author2_role | edt |
| author2_variant | p l pl |
| author_GND | (DE-588)106894250 |
| author_facet | Langenbeck, Peter |
| building | Verbundindex |
| bvnumber | BV024409204 |
| ctrlnum | (OCoLC)830858732 (DE-599)BVBBV024409204 |
| format | Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01916nam a2200529 cb4500</leader><controlfield tag="001">BV024409204</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20090910 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">960328s1987 ad|| |||| 10||| und d</controlfield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)830858732</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV024409204</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">und</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-83</subfield><subfield code="a">DE-11</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">In-process optical metrology for precision machining</subfield><subfield code="b">31 March - 2 April 1987, The Hague, The Netherlands</subfield><subfield code="c">Peter Langenbeck, chair/ed.</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">Bellingham, Wash.</subfield><subfield code="b">SPIE</subfield><subfield code="c">1987</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">VIII, 217 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="490" ind1="1" ind2=" "><subfield code="a">Proceedings / SPIE</subfield><subfield code="v">802</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Ellipsometrie</subfield><subfield code="0">(DE-588)4152025-7</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Präzisionsinstrument</subfield><subfield code="0">(DE-588)4276048-3</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Metrologie</subfield><subfield code="0">(DE-588)4169749-2</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Interferometrie</subfield><subfield code="0">(DE-588)4027296-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Topografie</subfield><subfield code="0">(DE-588)4133697-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Optik</subfield><subfield code="0">(DE-588)4043650-0</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="650" ind1="0" ind2="7"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="2">gnd</subfield><subfield code="9">rswk-swf</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="689" ind1="0" ind2="0"><subfield code="a">Optik</subfield><subfield code="0">(DE-588)4043650-0</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="0" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="1" ind2="0"><subfield code="a">Präzisionsinstrument</subfield><subfield code="0">(DE-588)4276048-3</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="1" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="2" ind2="0"><subfield code="a">Mikrosystemtechnik</subfield><subfield code="0">(DE-588)4221617-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="2" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="3" ind2="0"><subfield code="a">Metrologie</subfield><subfield code="0">(DE-588)4169749-2</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="3" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="4" ind2="0"><subfield code="a">Topografie</subfield><subfield code="0">(DE-588)4133697-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="4" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="5" ind2="0"><subfield code="a">Interferometrie</subfield><subfield code="0">(DE-588)4027296-5</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="5" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="689" ind1="6" ind2="0"><subfield code="a">Ellipsometrie</subfield><subfield code="0">(DE-588)4152025-7</subfield><subfield code="D">s</subfield></datafield><datafield tag="689" ind1="6" ind2=" "><subfield code="5">DE-604</subfield></datafield><datafield tag="700" ind1="1" ind2=" "><subfield code="a">Langenbeck, Peter</subfield><subfield code="0">(DE-588)106894250</subfield><subfield code="4">edt</subfield></datafield><datafield tag="810" ind1="2" ind2=" "><subfield code="a">SPIE</subfield><subfield code="t">Proceedings</subfield><subfield code="v">802</subfield><subfield code="w">(DE-604)BV000010887</subfield><subfield code="9">802</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-018387381</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV024409204 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:59:00Z |
| institution | BVB |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018387381 |
| oclc_num | 830858732 |
| open_access_boolean | |
| owner | DE-83 DE-11 |
| owner_facet | DE-83 DE-11 |
| physical | VIII, 217 S. Ill., graph. Darst. |
| publishDate | 1987 |
| publishDateSearch | 1987 |
| publishDateSort | 1987 |
| publisher | SPIE |
| record_format | marc |
| series2 | Proceedings / SPIE |
| spelling | In-process optical metrology for precision machining 31 March - 2 April 1987, The Hague, The Netherlands Peter Langenbeck, chair/ed. Bellingham, Wash. SPIE 1987 VIII, 217 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings / SPIE 802 Ellipsometrie (DE-588)4152025-7 gnd rswk-swf Präzisionsinstrument (DE-588)4276048-3 gnd rswk-swf Metrologie (DE-588)4169749-2 gnd rswk-swf Interferometrie (DE-588)4027296-5 gnd rswk-swf Topografie (DE-588)4133697-5 gnd rswk-swf Optik (DE-588)4043650-0 gnd rswk-swf Mikrosystemtechnik (DE-588)4221617-5 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Optik (DE-588)4043650-0 s DE-604 Präzisionsinstrument (DE-588)4276048-3 s Mikrosystemtechnik (DE-588)4221617-5 s Metrologie (DE-588)4169749-2 s Topografie (DE-588)4133697-5 s Interferometrie (DE-588)4027296-5 s Ellipsometrie (DE-588)4152025-7 s Langenbeck, Peter (DE-588)106894250 edt SPIE Proceedings 802 (DE-604)BV000010887 802 |
| spellingShingle | In-process optical metrology for precision machining 31 March - 2 April 1987, The Hague, The Netherlands Ellipsometrie (DE-588)4152025-7 gnd Präzisionsinstrument (DE-588)4276048-3 gnd Metrologie (DE-588)4169749-2 gnd Interferometrie (DE-588)4027296-5 gnd Topografie (DE-588)4133697-5 gnd Optik (DE-588)4043650-0 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| subject_GND | (DE-588)4152025-7 (DE-588)4276048-3 (DE-588)4169749-2 (DE-588)4027296-5 (DE-588)4133697-5 (DE-588)4043650-0 (DE-588)4221617-5 (DE-588)1071861417 |
| title | In-process optical metrology for precision machining 31 March - 2 April 1987, The Hague, The Netherlands |
| title_auth | In-process optical metrology for precision machining 31 March - 2 April 1987, The Hague, The Netherlands |
| title_exact_search | In-process optical metrology for precision machining 31 March - 2 April 1987, The Hague, The Netherlands |
| title_full | In-process optical metrology for precision machining 31 March - 2 April 1987, The Hague, The Netherlands Peter Langenbeck, chair/ed. |
| title_fullStr | In-process optical metrology for precision machining 31 March - 2 April 1987, The Hague, The Netherlands Peter Langenbeck, chair/ed. |
| title_full_unstemmed | In-process optical metrology for precision machining 31 March - 2 April 1987, The Hague, The Netherlands Peter Langenbeck, chair/ed. |
| title_short | In-process optical metrology for precision machining |
| title_sort | in process optical metrology for precision machining 31 march 2 april 1987 the hague the netherlands |
| title_sub | 31 March - 2 April 1987, The Hague, The Netherlands |
| topic | Ellipsometrie (DE-588)4152025-7 gnd Präzisionsinstrument (DE-588)4276048-3 gnd Metrologie (DE-588)4169749-2 gnd Interferometrie (DE-588)4027296-5 gnd Topografie (DE-588)4133697-5 gnd Optik (DE-588)4043650-0 gnd Mikrosystemtechnik (DE-588)4221617-5 gnd |
| topic_facet | Ellipsometrie Präzisionsinstrument Metrologie Interferometrie Topografie Optik Mikrosystemtechnik Konferenzschrift |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT langenbeckpeter inprocessopticalmetrologyforprecisionmachining31march2april1987thehaguethenetherlands |