Gettering and defect engineering in semiconductor technology: proceedings of the 3. international autumn meeting, Garzau, German Democratic Republic, October 8 - 13, 1989
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | English |
| Veröffentlicht: |
Brookfield, Vt. <<[u.a.]>>
Sci-Tech Publ.
1989
|
| Schriftenreihe: | Diffusion and defect data B
6 |
| Schlagworte: | |
| Beschreibung: | XI, 607 S. Ill., graph. Darst. |
Internformat
MARC
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| 245 | 1 | 0 | |a Gettering and defect engineering in semiconductor technology |b proceedings of the 3. international autumn meeting, Garzau, German Democratic Republic, October 8 - 13, 1989 |c GADEST '89. Ed. M. Kittler |
| 264 | 1 | |a Brookfield, Vt. <<[u.a.]>> |b Sci-Tech Publ. |c 1989 | |
| 300 | |a XI, 607 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
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| 338 | |b nc |2 rdacarrier | ||
| 490 | 1 | |a Diffusion and defect data : B, Solid state phenomena |v 6.7 | |
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 700 | 1 | |a Kittler, Martin |4 edt | |
| 711 | 2 | |a GADEST |n 3 |d 1989 |c Garzau |j Sonstige |0 (DE-588)5043024-5 |4 oth | |
| 830 | 0 | |a Diffusion and defect data |p B |v 6 |w (DE-604)BV021637351 |9 6 | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-018376922 | ||
Datensatz im Suchindex
| _version_ | 1804140362676043776 |
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| author2 | Kittler, Martin |
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| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre_facet | Konferenzschrift |
| id | DE-604.BV024398077 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:58:47Z |
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| language | English |
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| physical | XI, 607 S. Ill., graph. Darst. |
| publishDate | 1989 |
| publishDateSearch | 1989 |
| publishDateSort | 1989 |
| publisher | Sci-Tech Publ. |
| record_format | marc |
| series | Diffusion and defect data B |
| series2 | Diffusion and defect data : B, Solid state phenomena |
| spelling | Gettering and defect engineering in semiconductor technology proceedings of the 3. international autumn meeting, Garzau, German Democratic Republic, October 8 - 13, 1989 GADEST '89. Ed. M. Kittler Brookfield, Vt. <<[u.a.]>> Sci-Tech Publ. 1989 XI, 607 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Diffusion and defect data : B, Solid state phenomena 6.7 (DE-588)1071861417 Konferenzschrift gnd-content Kittler, Martin edt GADEST 3 1989 Garzau Sonstige (DE-588)5043024-5 oth Diffusion and defect data B 6 (DE-604)BV021637351 6 |
| spellingShingle | Gettering and defect engineering in semiconductor technology proceedings of the 3. international autumn meeting, Garzau, German Democratic Republic, October 8 - 13, 1989 Diffusion and defect data B |
| subject_GND | (DE-588)1071861417 |
| title | Gettering and defect engineering in semiconductor technology proceedings of the 3. international autumn meeting, Garzau, German Democratic Republic, October 8 - 13, 1989 |
| title_auth | Gettering and defect engineering in semiconductor technology proceedings of the 3. international autumn meeting, Garzau, German Democratic Republic, October 8 - 13, 1989 |
| title_exact_search | Gettering and defect engineering in semiconductor technology proceedings of the 3. international autumn meeting, Garzau, German Democratic Republic, October 8 - 13, 1989 |
| title_full | Gettering and defect engineering in semiconductor technology proceedings of the 3. international autumn meeting, Garzau, German Democratic Republic, October 8 - 13, 1989 GADEST '89. Ed. M. Kittler |
| title_fullStr | Gettering and defect engineering in semiconductor technology proceedings of the 3. international autumn meeting, Garzau, German Democratic Republic, October 8 - 13, 1989 GADEST '89. Ed. M. Kittler |
| title_full_unstemmed | Gettering and defect engineering in semiconductor technology proceedings of the 3. international autumn meeting, Garzau, German Democratic Republic, October 8 - 13, 1989 GADEST '89. Ed. M. Kittler |
| title_short | Gettering and defect engineering in semiconductor technology |
| title_sort | gettering and defect engineering in semiconductor technology proceedings of the 3 international autumn meeting garzau german democratic republic october 8 13 1989 |
| title_sub | proceedings of the 3. international autumn meeting, Garzau, German Democratic Republic, October 8 - 13, 1989 |
| topic_facet | Konferenzschrift |
| volume_link | (DE-604)BV021637351 |
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