ASMC '93 proceedings: October 18 - 19, 1993, Boston, Massachusetts
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Piscataway, NJ
1993
|
| Schlagworte: | |
| Beschreibung: | VI, 253 S. Ill., graph. Darst. |
| ISBN: | 0780313674 0780313666 |
Internformat
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Datensatz im Suchindex
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| physical | VI, 253 S. Ill., graph. Darst. |
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| spelling | Advanced Semiconductor Manufacturing Conference and Workshop 4 1993 Boston, Mass. Verfasser (DE-588)5110297-3 aut ASMC '93 proceedings October 18 - 19, 1993, Boston, Massachusetts IEEE ... Piscataway, NJ 1993 VI, 253 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier (DE-588)1071861417 Konferenzschrift gnd-content Institute of Electrical and Electronics Engineers Sonstige (DE-588)1692-5 oth |
| spellingShingle | ASMC '93 proceedings October 18 - 19, 1993, Boston, Massachusetts |
| subject_GND | (DE-588)1071861417 |
| title | ASMC '93 proceedings October 18 - 19, 1993, Boston, Massachusetts |
| title_auth | ASMC '93 proceedings October 18 - 19, 1993, Boston, Massachusetts |
| title_exact_search | ASMC '93 proceedings October 18 - 19, 1993, Boston, Massachusetts |
| title_full | ASMC '93 proceedings October 18 - 19, 1993, Boston, Massachusetts IEEE ... |
| title_fullStr | ASMC '93 proceedings October 18 - 19, 1993, Boston, Massachusetts IEEE ... |
| title_full_unstemmed | ASMC '93 proceedings October 18 - 19, 1993, Boston, Massachusetts IEEE ... |
| title_short | ASMC '93 proceedings |
| title_sort | asmc 93 proceedings october 18 19 1993 boston massachusetts |
| title_sub | October 18 - 19, 1993, Boston, Massachusetts |
| topic_facet | Konferenzschrift |
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