Advanced metallization for devices and circuits - science, technology and manufacturability: symposium held April 4 - 8, 1994, San Francisco, California, USA
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Pittsburgh, Pa.
Materials Research Soc.
1994
|
| Schriftenreihe: | Materials Research Society symposium proceedings
337 |
| Schlagworte: | |
| Beschreibung: | XIV, 768 S. Ill., graph. Darst. |
| ISBN: | 1558992375 |
Internformat
MARC
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| 245 | 1 | 0 | |a Advanced metallization for devices and circuits - science, technology and manufacturability |b symposium held April 4 - 8, 1994, San Francisco, California, USA |c ed.: S. P. Murarka ... |
| 264 | 1 | |a Pittsburgh, Pa. |b Materials Research Soc. |c 1994 | |
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| 336 | |b txt |2 rdacontent | ||
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Datensatz im Suchindex
| _version_ | 1804140360697380864 |
|---|---|
| any_adam_object | |
| author2 | Murarka, Shyam P. |
| author2_role | edt |
| author2_variant | s p m sp spm |
| author_facet | Murarka, Shyam P. |
| building | Verbundindex |
| bvnumber | BV024396641 |
| classification_rvk | UD 8400 |
| ctrlnum | (OCoLC)634360632 (DE-599)BVBBV024396641 |
| discipline | Physik |
| format | Book |
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| id | DE-604.BV024396641 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:58:45Z |
| institution | BVB |
| isbn | 1558992375 |
| language | English |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018375552 |
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| physical | XIV, 768 S. Ill., graph. Darst. |
| publishDate | 1994 |
| publishDateSearch | 1994 |
| publishDateSort | 1994 |
| publisher | Materials Research Soc. |
| record_format | marc |
| series | Materials Research Society symposium proceedings |
| series2 | Materials Research Society symposium proceedings |
| spelling | Advanced metallization for devices and circuits - science, technology and manufacturability symposium held April 4 - 8, 1994, San Francisco, California, USA ed.: S. P. Murarka ... Pittsburgh, Pa. Materials Research Soc. 1994 XIV, 768 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Materials Research Society symposium proceedings 337 Metallisieren (DE-588)4169599-9 gnd rswk-swf (DE-588)1071861417 Konferenzschrift gnd-content Metallisieren (DE-588)4169599-9 s 1\p DE-604 Murarka, Shyam P. edt Materials Research Society symposium proceedings 337 (DE-604)BV001899105 337 1\p cgwrk 20201028 DE-101 https://d-nb.info/provenance/plan#cgwrk |
| spellingShingle | Advanced metallization for devices and circuits - science, technology and manufacturability symposium held April 4 - 8, 1994, San Francisco, California, USA Materials Research Society symposium proceedings Metallisieren (DE-588)4169599-9 gnd |
| subject_GND | (DE-588)4169599-9 (DE-588)1071861417 |
| title | Advanced metallization for devices and circuits - science, technology and manufacturability symposium held April 4 - 8, 1994, San Francisco, California, USA |
| title_auth | Advanced metallization for devices and circuits - science, technology and manufacturability symposium held April 4 - 8, 1994, San Francisco, California, USA |
| title_exact_search | Advanced metallization for devices and circuits - science, technology and manufacturability symposium held April 4 - 8, 1994, San Francisco, California, USA |
| title_full | Advanced metallization for devices and circuits - science, technology and manufacturability symposium held April 4 - 8, 1994, San Francisco, California, USA ed.: S. P. Murarka ... |
| title_fullStr | Advanced metallization for devices and circuits - science, technology and manufacturability symposium held April 4 - 8, 1994, San Francisco, California, USA ed.: S. P. Murarka ... |
| title_full_unstemmed | Advanced metallization for devices and circuits - science, technology and manufacturability symposium held April 4 - 8, 1994, San Francisco, California, USA ed.: S. P. Murarka ... |
| title_short | Advanced metallization for devices and circuits - science, technology and manufacturability |
| title_sort | advanced metallization for devices and circuits science technology and manufacturability symposium held april 4 8 1994 san francisco california usa |
| title_sub | symposium held April 4 - 8, 1994, San Francisco, California, USA |
| topic | Metallisieren (DE-588)4169599-9 gnd |
| topic_facet | Metallisieren Konferenzschrift |
| volume_link | (DE-604)BV001899105 |
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