Microcircuit engineering 91: ME ; proceedings of the International Conference on Microlithography, September 17 - 19, 1991, Rome, Italy
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Amsterdam <<[u.a.]>>
Elsevier
1992
|
| Schlagworte: | |
| Beschreibung: | Weitere Ausgabe: Auch in: Microelectronic engineering ; 17 |
| Beschreibung: | XVII, 581 S. Ill., graph. Darst. |
| ISBN: | 0444895094 |
Internformat
MARC
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Datensatz im Suchindex
| _version_ | 1804140347426603008 |
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| author2 | Tucciarone, A. |
| author2_role | edt |
| author2_variant | a t at |
| author_facet | Tucciarone, A. |
| building | Verbundindex |
| bvnumber | BV024386580 |
| classification_rvk | ZN 4170 |
| ctrlnum | (OCoLC)180573678 (DE-599)BVBBV024386580 |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
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| genre | (DE-588)1071861417 Konferenzschrift 1991 Rom gnd-content |
| genre_facet | Konferenzschrift 1991 Rom |
| id | DE-604.BV024386580 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:58:32Z |
| institution | BVB |
| institution_GND | (DE-588)5067128-5 |
| isbn | 0444895094 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018366074 |
| oclc_num | 180573678 |
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| owner_facet | DE-83 |
| physical | XVII, 581 S. Ill., graph. Darst. |
| publishDate | 1992 |
| publishDateSearch | 1992 |
| publishDateSort | 1992 |
| publisher | Elsevier |
| record_format | marc |
| spelling | Microcircuit engineering 91 ME ; proceedings of the International Conference on Microlithography, September 17 - 19, 1991, Rome, Italy ed. by A. Tucciarone ... Amsterdam <<[u.a.]>> Elsevier 1992 XVII, 581 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Weitere Ausgabe: Auch in: Microelectronic engineering ; 17 Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd rswk-swf (DE-588)1071861417 Konferenzschrift 1991 Rom gnd-content Lithografie Halbleitertechnologie (DE-588)4191584-7 s DE-604 Tucciarone, A. edt International Conference on Microlithography 17 1991 Rom Sonstige (DE-588)5067128-5 oth |
| spellingShingle | Microcircuit engineering 91 ME ; proceedings of the International Conference on Microlithography, September 17 - 19, 1991, Rome, Italy Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| subject_GND | (DE-588)4191584-7 (DE-588)1071861417 |
| title | Microcircuit engineering 91 ME ; proceedings of the International Conference on Microlithography, September 17 - 19, 1991, Rome, Italy |
| title_auth | Microcircuit engineering 91 ME ; proceedings of the International Conference on Microlithography, September 17 - 19, 1991, Rome, Italy |
| title_exact_search | Microcircuit engineering 91 ME ; proceedings of the International Conference on Microlithography, September 17 - 19, 1991, Rome, Italy |
| title_full | Microcircuit engineering 91 ME ; proceedings of the International Conference on Microlithography, September 17 - 19, 1991, Rome, Italy ed. by A. Tucciarone ... |
| title_fullStr | Microcircuit engineering 91 ME ; proceedings of the International Conference on Microlithography, September 17 - 19, 1991, Rome, Italy ed. by A. Tucciarone ... |
| title_full_unstemmed | Microcircuit engineering 91 ME ; proceedings of the International Conference on Microlithography, September 17 - 19, 1991, Rome, Italy ed. by A. Tucciarone ... |
| title_short | Microcircuit engineering 91 |
| title_sort | microcircuit engineering 91 me proceedings of the international conference on microlithography september 17 19 1991 rome italy |
| title_sub | ME ; proceedings of the International Conference on Microlithography, September 17 - 19, 1991, Rome, Italy |
| topic | Lithografie Halbleitertechnologie (DE-588)4191584-7 gnd |
| topic_facet | Lithografie Halbleitertechnologie Konferenzschrift 1991 Rom |
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