Submicrometer metallization: the challenges, opportunities, and limitations ; 23 - 25 September 1992, San Jose, California
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
Bellingham, Wash.
1993
|
| Schriftenreihe: | Proceedings / SPIE
1805 |
| Schlagworte: | |
| Beschreibung: | IX, 344 S. Ill., graph. Darst. |
| ISBN: | 0819410039 |
Internformat
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| 245 | 1 | 0 | |a Submicrometer metallization |b the challenges, opportunities, and limitations ; 23 - 25 September 1992, San Jose, California |c Thomas Kwok ..., chairs/ed. |
| 264 | 1 | |a Bellingham, Wash. |c 1993 | |
| 300 | |a IX, 344 S. |b Ill., graph. Darst. | ||
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Datensatz im Suchindex
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| author2 | Kwok, Thomas |
| author2_role | edt |
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| ctrlnum | (OCoLC)636728349 (DE-599)BVBBV024385575 |
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| genre_facet | Konferenzschrift |
| id | DE-604.BV024385575 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:58:31Z |
| institution | BVB |
| isbn | 0819410039 |
| language | Undetermined |
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| physical | IX, 344 S. Ill., graph. Darst. |
| publishDate | 1993 |
| publishDateSearch | 1993 |
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| series2 | Proceedings / SPIE |
| spelling | Submicrometer metallization the challenges, opportunities, and limitations ; 23 - 25 September 1992, San Jose, California Thomas Kwok ..., chairs/ed. Bellingham, Wash. 1993 IX, 344 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier Proceedings / SPIE 1805 (DE-588)1071861417 Konferenzschrift gnd-content Kwok, Thomas edt SPIE Proceedings 1805 (DE-604)BV000010887 1805 |
| spellingShingle | Submicrometer metallization the challenges, opportunities, and limitations ; 23 - 25 September 1992, San Jose, California |
| subject_GND | (DE-588)1071861417 |
| title | Submicrometer metallization the challenges, opportunities, and limitations ; 23 - 25 September 1992, San Jose, California |
| title_auth | Submicrometer metallization the challenges, opportunities, and limitations ; 23 - 25 September 1992, San Jose, California |
| title_exact_search | Submicrometer metallization the challenges, opportunities, and limitations ; 23 - 25 September 1992, San Jose, California |
| title_full | Submicrometer metallization the challenges, opportunities, and limitations ; 23 - 25 September 1992, San Jose, California Thomas Kwok ..., chairs/ed. |
| title_fullStr | Submicrometer metallization the challenges, opportunities, and limitations ; 23 - 25 September 1992, San Jose, California Thomas Kwok ..., chairs/ed. |
| title_full_unstemmed | Submicrometer metallization the challenges, opportunities, and limitations ; 23 - 25 September 1992, San Jose, California Thomas Kwok ..., chairs/ed. |
| title_short | Submicrometer metallization |
| title_sort | submicrometer metallization the challenges opportunities and limitations 23 25 september 1992 san jose california |
| title_sub | the challenges, opportunities, and limitations ; 23 - 25 September 1992, San Jose, California |
| topic_facet | Konferenzschrift |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT kwokthomas submicrometermetallizationthechallengesopportunitiesandlimitations2325september1992sanjosecalifornia |