ASMC '92 proceedings: September 30 - October 1, 1992, Cambridge, Massachusetts
Gespeichert in:
| Körperschaft: | |
|---|---|
| Format: | Tagungsbericht Buch |
| Sprache: | Undetermined |
| Veröffentlicht: |
New York, NY
1992
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| Schlagworte: | |
| Beschreibung: | V, 230 S. Ill., graph. Darst. |
| ISBN: | 0780307410 0780307402 |
Internformat
MARC
| LEADER | 00000nam a2200000 c 4500 | ||
|---|---|---|---|
| 001 | BV024384884 | ||
| 003 | DE-604 | ||
| 005 | 20090910 | ||
| 007 | t | ||
| 008 | 931019s1992 ad|| |||| 10||| und d | ||
| 020 | |a 0780307410 |9 0-7803-0741-0 | ||
| 020 | |a 0780307402 |9 0-7803-0740-2 | ||
| 035 | |a (OCoLC)830954606 | ||
| 035 | |a (DE-599)BVBBV024384884 | ||
| 040 | |a DE-604 |b ger |e rakwb | ||
| 041 | |a und | ||
| 049 | |a DE-83 | ||
| 084 | |a ZN 3460 |0 (DE-625)157317: |2 rvk | ||
| 111 | 2 | |a Advanced Semiconductor Manufacturing Conference and Workshop |n 3 |d 1992 |c Cambridge, Mass. |j Verfasser |0 (DE-588)5080101-6 |4 aut | |
| 245 | 1 | 0 | |a ASMC '92 proceedings |b September 30 - October 1, 1992, Cambridge, Massachusetts |c IEEE ... |
| 264 | 1 | |a New York, NY |c 1992 | |
| 300 | |a V, 230 S. |b Ill., graph. Darst. | ||
| 336 | |b txt |2 rdacontent | ||
| 337 | |b n |2 rdamedia | ||
| 338 | |b nc |2 rdacarrier | ||
| 655 | 7 | |0 (DE-588)1071861417 |a Konferenzschrift |2 gnd-content | |
| 710 | 2 | |a Institute of Electrical and Electronics Engineers |e Sonstige |0 (DE-588)1692-5 |4 oth | |
| 999 | |a oai:aleph.bib-bvb.de:BVB01-018364476 | ||
Datensatz im Suchindex
| _version_ | 1804140345091424256 |
|---|---|
| any_adam_object | |
| author_corporate | Advanced Semiconductor Manufacturing Conference and Workshop Cambridge, Mass |
| author_corporate_role | aut |
| author_facet | Advanced Semiconductor Manufacturing Conference and Workshop Cambridge, Mass |
| author_sort | Advanced Semiconductor Manufacturing Conference and Workshop Cambridge, Mass |
| building | Verbundindex |
| bvnumber | BV024384884 |
| classification_rvk | ZN 3460 |
| ctrlnum | (OCoLC)830954606 (DE-599)BVBBV024384884 |
| discipline | Elektrotechnik / Elektronik / Nachrichtentechnik |
| format | Conference Proceeding Book |
| fullrecord | <?xml version="1.0" encoding="UTF-8"?><collection xmlns="http://www.loc.gov/MARC21/slim"><record><leader>01077nam a2200301 c 4500</leader><controlfield tag="001">BV024384884</controlfield><controlfield tag="003">DE-604</controlfield><controlfield tag="005">20090910 </controlfield><controlfield tag="007">t</controlfield><controlfield tag="008">931019s1992 ad|| |||| 10||| und d</controlfield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0780307410</subfield><subfield code="9">0-7803-0741-0</subfield></datafield><datafield tag="020" ind1=" " ind2=" "><subfield code="a">0780307402</subfield><subfield code="9">0-7803-0740-2</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(OCoLC)830954606</subfield></datafield><datafield tag="035" ind1=" " ind2=" "><subfield code="a">(DE-599)BVBBV024384884</subfield></datafield><datafield tag="040" ind1=" " ind2=" "><subfield code="a">DE-604</subfield><subfield code="b">ger</subfield><subfield code="e">rakwb</subfield></datafield><datafield tag="041" ind1=" " ind2=" "><subfield code="a">und</subfield></datafield><datafield tag="049" ind1=" " ind2=" "><subfield code="a">DE-83</subfield></datafield><datafield tag="084" ind1=" " ind2=" "><subfield code="a">ZN 3460</subfield><subfield code="0">(DE-625)157317:</subfield><subfield code="2">rvk</subfield></datafield><datafield tag="111" ind1="2" ind2=" "><subfield code="a">Advanced Semiconductor Manufacturing Conference and Workshop</subfield><subfield code="n">3</subfield><subfield code="d">1992</subfield><subfield code="c">Cambridge, Mass.</subfield><subfield code="j">Verfasser</subfield><subfield code="0">(DE-588)5080101-6</subfield><subfield code="4">aut</subfield></datafield><datafield tag="245" ind1="1" ind2="0"><subfield code="a">ASMC '92 proceedings</subfield><subfield code="b">September 30 - October 1, 1992, Cambridge, Massachusetts</subfield><subfield code="c">IEEE ...</subfield></datafield><datafield tag="264" ind1=" " ind2="1"><subfield code="a">New York, NY</subfield><subfield code="c">1992</subfield></datafield><datafield tag="300" ind1=" " ind2=" "><subfield code="a">V, 230 S.</subfield><subfield code="b">Ill., graph. Darst.</subfield></datafield><datafield tag="336" ind1=" " ind2=" "><subfield code="b">txt</subfield><subfield code="2">rdacontent</subfield></datafield><datafield tag="337" ind1=" " ind2=" "><subfield code="b">n</subfield><subfield code="2">rdamedia</subfield></datafield><datafield tag="338" ind1=" " ind2=" "><subfield code="b">nc</subfield><subfield code="2">rdacarrier</subfield></datafield><datafield tag="655" ind1=" " ind2="7"><subfield code="0">(DE-588)1071861417</subfield><subfield code="a">Konferenzschrift</subfield><subfield code="2">gnd-content</subfield></datafield><datafield tag="710" ind1="2" ind2=" "><subfield code="a">Institute of Electrical and Electronics Engineers</subfield><subfield code="e">Sonstige</subfield><subfield code="0">(DE-588)1692-5</subfield><subfield code="4">oth</subfield></datafield><datafield tag="999" ind1=" " ind2=" "><subfield code="a">oai:aleph.bib-bvb.de:BVB01-018364476</subfield></datafield></record></collection> |
| genre | (DE-588)1071861417 Konferenzschrift gnd-content |
| genre_facet | Konferenzschrift |
| id | DE-604.BV024384884 |
| illustrated | Illustrated |
| indexdate | 2024-07-09T21:58:30Z |
| institution | BVB |
| institution_GND | (DE-588)5080101-6 (DE-588)1692-5 |
| isbn | 0780307410 0780307402 |
| language | Undetermined |
| oai_aleph_id | oai:aleph.bib-bvb.de:BVB01-018364476 |
| oclc_num | 830954606 |
| open_access_boolean | |
| owner | DE-83 |
| owner_facet | DE-83 |
| physical | V, 230 S. Ill., graph. Darst. |
| publishDate | 1992 |
| publishDateSearch | 1992 |
| publishDateSort | 1992 |
| record_format | marc |
| spelling | Advanced Semiconductor Manufacturing Conference and Workshop 3 1992 Cambridge, Mass. Verfasser (DE-588)5080101-6 aut ASMC '92 proceedings September 30 - October 1, 1992, Cambridge, Massachusetts IEEE ... New York, NY 1992 V, 230 S. Ill., graph. Darst. txt rdacontent n rdamedia nc rdacarrier (DE-588)1071861417 Konferenzschrift gnd-content Institute of Electrical and Electronics Engineers Sonstige (DE-588)1692-5 oth |
| spellingShingle | ASMC '92 proceedings September 30 - October 1, 1992, Cambridge, Massachusetts |
| subject_GND | (DE-588)1071861417 |
| title | ASMC '92 proceedings September 30 - October 1, 1992, Cambridge, Massachusetts |
| title_auth | ASMC '92 proceedings September 30 - October 1, 1992, Cambridge, Massachusetts |
| title_exact_search | ASMC '92 proceedings September 30 - October 1, 1992, Cambridge, Massachusetts |
| title_full | ASMC '92 proceedings September 30 - October 1, 1992, Cambridge, Massachusetts IEEE ... |
| title_fullStr | ASMC '92 proceedings September 30 - October 1, 1992, Cambridge, Massachusetts IEEE ... |
| title_full_unstemmed | ASMC '92 proceedings September 30 - October 1, 1992, Cambridge, Massachusetts IEEE ... |
| title_short | ASMC '92 proceedings |
| title_sort | asmc 92 proceedings september 30 october 1 1992 cambridge massachusetts |
| title_sub | September 30 - October 1, 1992, Cambridge, Massachusetts |
| topic_facet | Konferenzschrift |
| work_keys_str_mv | AT advancedsemiconductormanufacturingconferenceandworkshopcambridgemass asmc92proceedingsseptember30october11992cambridgemassachusetts AT instituteofelectricalandelectronicsengineers asmc92proceedingsseptember30october11992cambridgemassachusetts |