Symposium: held November 30 - December 3, 1992, Boston, Massachusetts, USA
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Bibliographic Details
Corporate Author: Meeting of Chemical Perspectives of Microelectronic Materials Boston, Mass (Author)
Other Authors: Abernathy, C. R. (Editor)
Format: Conference Proceeding Book
Language:Undetermined
Published: Pittsburgh, Pa. 1993
Series:Materials Research Society symposium proceedings 282 : Chemical perspectives of microelectronic materials ; 3
Materials Research Society symposium proceedings 282
Subjects:
Physical Description:XV, 727 S. Ill., graph. Darst.
ISBN:1558991778

There is no print copy available.

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