Surface and interface analysis of microelectronic materials processing and growth: 12 - 13 October 1989, Santa Clara, Calif.
Gespeichert in:
| Weitere Verfasser: | |
|---|---|
| Format: | Buch |
| Sprache: | English |
| Veröffentlicht: |
Bellingham, Wash.
1990
|
| Schriftenreihe: | Proceedings / SPIE
1186 |
| Schlagworte: | |
| Beschreibung: | Vi, 201 S. |
Internformat
MARC
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| 245 | 1 | 0 | |a Surface and interface analysis of microelectronic materials processing and growth |b 12 - 13 October 1989, Santa Clara, Calif. |c Leonard J. Brillson ..., eds. |
| 264 | 1 | |a Bellingham, Wash. |c 1990 | |
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Datensatz im Suchindex
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| author2 | Brillson, Leonard J. |
| author2_role | edt |
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| author_facet | Brillson, Leonard J. |
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| format | Book |
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| id | DE-604.BV024380845 |
| illustrated | Not Illustrated |
| indexdate | 2024-07-09T21:58:25Z |
| institution | BVB |
| language | English |
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| spelling | Surface and interface analysis of microelectronic materials processing and growth 12 - 13 October 1989, Santa Clara, Calif. Leonard J. Brillson ..., eds. Bellingham, Wash. 1990 Vi, 201 S. txt rdacontent n rdamedia nc rdacarrier Proceedings / SPIE 1186 (DE-588)1071861417 Konferenzschrift gnd-content Brillson, Leonard J. edt SPIE Proceedings 1186 (DE-604)BV000010887 1186 |
| spellingShingle | Surface and interface analysis of microelectronic materials processing and growth 12 - 13 October 1989, Santa Clara, Calif. |
| subject_GND | (DE-588)1071861417 |
| title | Surface and interface analysis of microelectronic materials processing and growth 12 - 13 October 1989, Santa Clara, Calif. |
| title_auth | Surface and interface analysis of microelectronic materials processing and growth 12 - 13 October 1989, Santa Clara, Calif. |
| title_exact_search | Surface and interface analysis of microelectronic materials processing and growth 12 - 13 October 1989, Santa Clara, Calif. |
| title_full | Surface and interface analysis of microelectronic materials processing and growth 12 - 13 October 1989, Santa Clara, Calif. Leonard J. Brillson ..., eds. |
| title_fullStr | Surface and interface analysis of microelectronic materials processing and growth 12 - 13 October 1989, Santa Clara, Calif. Leonard J. Brillson ..., eds. |
| title_full_unstemmed | Surface and interface analysis of microelectronic materials processing and growth 12 - 13 October 1989, Santa Clara, Calif. Leonard J. Brillson ..., eds. |
| title_short | Surface and interface analysis of microelectronic materials processing and growth |
| title_sort | surface and interface analysis of microelectronic materials processing and growth 12 13 october 1989 santa clara calif |
| title_sub | 12 - 13 October 1989, Santa Clara, Calif. |
| topic_facet | Konferenzschrift |
| volume_link | (DE-604)BV000010887 |
| work_keys_str_mv | AT brillsonleonardj surfaceandinterfaceanalysisofmicroelectronicmaterialsprocessingandgrowth1213october1989santaclaracalif |